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公开(公告)号：US20110063590A1
公开(公告)日：2011-03-17
申请号：US12951777
申请日：2010-11-22
CPC分类号： G03F7/70891 , G02B7/008 , G02B7/028 , G02B7/181 , G03F7/70825
摘要： An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.
摘要翻译： 提供了包括多个模块部件的光学元件模块。 模块组件包括光学元件，光学元件保持器和接触元件。 光学元件具有第一热膨胀系数。 光学元件保持器经由第一接触元件保持光学元件，并具有第二热膨胀系数，第二热膨胀系数不同于第一热膨胀系数。 模块部件中的至少一个适于在光学元件和光学元件保持器之间的相对位置的热感应位置变化时提供至少引入到光学元件中的力的减小，温度情况导致的位置变化 多个模块部件的温度变化的变化。
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公开(公告)号：US07859641B2
公开(公告)日：2010-12-28
申请号：US12015894
申请日：2008-01-17
CPC分类号： G03F7/70891 , G02B7/008 , G02B7/028 , G02B7/181 , G03F7/70825
摘要： An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.
摘要翻译： 提供了包括多个模块部件的光学元件模块。 模块组件包括光学元件，光学元件保持器和接触元件。 光学元件具有第一热膨胀系数。 光学元件保持器经由第一接触元件保持光学元件，并具有第二热膨胀系数，第二热膨胀系数不同于第一热膨胀系数。 模块部件中的至少一个适于在光学元件和光学元件保持器之间的相对位置的热感应位置变化时提供至少引入到光学元件中的力的减小，温度情况导致的位置变化 多个模块部件的温度变化的变化。
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公开(公告)号：US20080239270A1
公开(公告)日：2008-10-02
申请号：US12015894
申请日：2008-01-17
CPC分类号： G03F7/70891 , G02B7/008 , G02B7/028 , G02B7/181 , G03F7/70825
摘要： An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.
摘要翻译： 提供了包括多个模块部件的光学元件模块。 模块组件包括光学元件，光学元件保持器和接触元件。 光学元件具有第一热膨胀系数。 光学元件保持器经由第一接触元件保持光学元件，并具有第二热膨胀系数，第二热膨胀系数不同于第一热膨胀系数。 模块部件中的至少一个适于在光学元件和光学元件保持器之间的相对位置的热感应位置变化时提供至少引入到光学元件中的力的减小，温度情况导致的位置变化 多个模块部件的温度变化的变化。
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公开(公告)号：US08441747B2
公开(公告)日：2013-05-14
申请号：US11901130
申请日：2007-09-14
申请人： Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner , Bernhard Geuppert , Ulrich Bingel , Tilman Schwertner
发明人： Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner , Bernhard Geuppert , Ulrich Bingel , Tilman Schwertner
CPC分类号： G03B27/54 , G02B7/021 , G02B13/143 , G03F7/70783 , G03F7/70825
摘要： There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.
摘要翻译： 提供了一种用于微光刻的光学模块。 光学模块包括光学元件和用于保持光学元件的保持装置。 光学元件具有（a）主延伸面，其中限定径向R和圆周方向U，以及（b）在其外周的区域中的自由光学直径和超限。 保持装置在超越范围内与光学元件接触，并且以这样的方式形成和/或接触光学元件，使得从超载计算的超载比与生产光学元件所需的最小超限有关 ，最多为1.5。
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公开(公告)号：US09134501B2
公开(公告)日：2015-09-15
申请号：US11901131
申请日：2007-09-14
CPC分类号： G02B7/026 , G02B7/008 , G03F7/70825
摘要： There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.
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公开(公告)号：US20090147229A1
公开(公告)日：2009-06-11
申请号：US11901131
申请日：2007-09-14
CPC分类号： G02B7/026 , G02B7/008 , G03F7/70825
摘要： There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.
摘要翻译： 提供了包括光学元件，连接器元件和光学元件保持器的光学元件单元。 光学元件具有主要延伸的平面以及外圆周并限定径向方向。 连接器元件连接光学元件和光学元件保持器，连接器元件具有在外周连接到光学元件的第一连接器部分和连接到光学元件保持器的第二连接器部件。 第一连接器部分和第二连接器部分经由至少一个联接部分连接，联接部分在径向上是柔性的，并且基本上防止第一连接器部分和第二连接器部分之间在基本上平行于 主要延伸。
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公开(公告)号：US20080204689A1
公开(公告)日：2008-08-28
申请号：US11901130
申请日：2007-09-14
申请人： Willi Heintel , Bernhard Geuppert , Ulrich Bingel , Joachim Hartjes , Hagen Federau , Harald Kirchner , Tilman Schwertner
发明人： Willi Heintel , Bernhard Geuppert , Ulrich Bingel , Joachim Hartjes , Hagen Federau , Harald Kirchner , Tilman Schwertner
CPC分类号： G03B27/54 , G02B7/021 , G02B13/143 , G03F7/70783 , G03F7/70825
摘要： There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.
摘要翻译： 提供了一种用于微光刻的光学模块。 光学模块包括光学元件和用于保持光学元件的保持装置。 光学元件具有（a）主延伸面，其中限定径向R和圆周方向U，以及（b）在其外周的区域中的自由光学直径和超限。 保持装置在超越范围内与光学元件接触，并且以这样的方式形成和/或接触光学元件，使得从超载计算的超载比与生产光学元件所需的最小超限有关 ，最多为1.5。
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