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公开(公告)号：US07278301B2
公开(公告)日：2007-10-09
申请号：US11423098
申请日：2006-06-08
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。
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公开(公告)号：US06520005B2
公开(公告)日：2003-02-18
申请号：US09313962
申请日：1999-05-18
IPC分类号： G01B528
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
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公开(公告)号：US06931917B2
公开(公告)日：2005-08-23
申请号：US10729609
申请日：2003-12-05
IPC分类号： G01Q70/08 , G01B3/00 , G01B5/28 , G01B7/34 , G01B21/20 , G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q60/38 , G01Q70/00 , G01Q70/06 , G01Q70/12 , G01Q90/00 , G01N13/16
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
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公开(公告)号：US20050262931A1
公开(公告)日：2005-12-01
申请号：US11192808
申请日：2005-07-28
申请人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
IPC分类号： G01Q70/08 , G01B3/00 , G01B5/28 , G01B7/34 , G01B21/20 , G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q60/38 , G01Q70/00 , G01Q70/06 , G01Q70/12 , G01Q90/00 , G01N13/10
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。
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公开(公告)号：US20060230819A1
公开(公告)日：2006-10-19
申请号：US11423098
申请日：2006-06-08
申请人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
IPC分类号： G01B5/28
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。
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公开(公告)号：US20060207318A1
公开(公告)日：2006-09-21
申请号：US11422319
申请日：2006-06-05
申请人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
IPC分类号： G01B5/28
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
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公开(公告)号：US08583392B2
公开(公告)日：2013-11-12
申请号：US12794581
申请日：2010-06-04
申请人： Peter Panagas
发明人： Peter Panagas
CPC分类号： G01P21/00 , G01C21/16 , G01C25/005
摘要： An electronic device can include an inertial measurement unit (IMU) operative to monitor the movement of the electronic device. The IMU used in the device can be inaccurate due to the manufacturing process used to construct the IMU and to incorporate the IMU in the electronic device. To correct the IMU output, the electronic device in which the IMU is incorporated can be placed in a testing apparatus that moves the device to known orientations. The IMU output at the known orientations can be compared to an expected true IMU output, and correction factors (e.g., sensitivity and offset matrices) can be calculated. The correction factors can be stored in the device, and applied to the IMU output to provide a true output. The testing apparatus can include a fixture placed in a gimbal movable around three axes.
摘要翻译： 电子设备可以包括用于监测电子设备的移动的惯性测量单元（IMU）。 由于用于构建IMU的制造过程并将IMU并入电子设备中，所以在设备中使用的IMU可能不准确。 为了校正IMU输出，可以将其中结合有IMU的电子设备放置在将设备移动到已知取向的测试设备中。 可以将已知取向处的IMU输出与期望的真实IMU输出进行比较，并且可以计算校正因子（例如，灵敏度和偏移矩阵）。 校正因子可以存储在设备中，并应用于IMU输出以提供真实的输出。 测试装置可以包括放置在可围绕三个轴线移动的万向架中的夹具。
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公开(公告)号：US20110301901A1
公开(公告)日：2011-12-08
申请号：US12794578
申请日：2010-06-04
申请人： Peter Panagas
发明人： Peter Panagas
IPC分类号： G06F19/00
CPC分类号： G01C25/005 , G01P21/00
摘要： An electronic device can include an inertial measurement unit (IMU) operative to monitor the movement of the electronic device. The IMU used in the device can be inaccurate due to the manufacturing process used to construct the IMU and to incorporate the IMU in the electronic device. To correct the IMU output, the electronic device in which the IMU is incorporated can be placed in a testing apparatus that moves the device to known orientations. The IMU output at the known orientations can be compared to an expected true IMU output, and correction factors (e.g., sensitivity and offset matrices) can be calculated. The correction factors can be stored in the device, and applied to the IMU output to provide a true output. The testing apparatus can include a fixture placed in a gimbal movable around three axes.
摘要翻译： 电子设备可以包括用于监测电子设备的移动的惯性测量单元（IMU）。 由于用于构建IMU的制造过程并将IMU并入电子设备中，所以在设备中使用的IMU可能不准确。 为了校正IMU输出，可以将其中结合有IMU的电子设备放置在将设备移动到已知取向的测试设备中。 可以将已知取向处的IMU输出与期望的真实IMU输出进行比较，并且可以计算校正因子（例如，灵敏度和偏移矩阵）。 校正因子可以存储在设备中，并应用于IMU输出以提供真实的输出。 测试装置可以包括放置在可围绕三个轴线移动的万向架中的夹具。
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公开(公告)号：US20110301902A1
公开(公告)日：2011-12-08
申请号：US12794581
申请日：2010-06-04
申请人： Peter Panagas
发明人： Peter Panagas
CPC分类号： G01P21/00 , G01C21/16 , G01C25/005
摘要： An electronic device can include an inertial measurement unit (IMU) operative to monitor the movement of the electronic device. The IMU used in the device can be inaccurate due to the manufacturing process used to construct the IMU and to incorporate the IMU in the electronic device. To correct the IMU output, the electronic device in which the IMU is incorporated can be placed in a testing apparatus that moves the device to known orientations. The IMU output at the known orientations can be compared to an expected true IMU output, and correction factors (e.g., sensitivity and offset matrices) can be calculated. The correction factors can be stored in the device, and applied to the IMU output to provide a true output. The testing apparatus can include a fixture placed in a gimbal movable around three axes.
摘要翻译： 电子设备可以包括用于监测电子设备的移动的惯性测量单元（IMU）。 由于用于构建IMU的制造过程并将IMU并入电子设备中，所以在设备中使用的IMU可能不准确。 为了校正IMU输出，可以将其中结合有IMU的电子设备放置在将设备移动到已知取向的测试设备中。 可以将已知取向处的IMU输出与期望的真实IMU输出进行比较，并且可以计算校正因子（例如，灵敏度和偏移矩阵）。 校正因子可以存储在设备中，并应用于IMU输出以提供真实的输出。 测试装置可以包括放置在可围绕三个轴线移动的万向架中的夹具。
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公开(公告)号：US08527228B2
公开(公告)日：2013-09-03
申请号：US12794578
申请日：2010-06-04
申请人： Peter Panagas
发明人： Peter Panagas
CPC分类号： G01C25/005 , G01P21/00
摘要： An electronic device can include an inertial measurement unit (IMU) operative to monitor the movement of the electronic device. The IMU used in the device can be inaccurate due to the manufacturing process used to construct the IMU and to incorporate the IMU in the electronic device. To correct the IMU output, the electronic device in which the IMU is incorporated can be placed in a testing apparatus that moves the device to known orientations. The IMU output at the known orientations can be compared to an expected true IMU output, and correction factors (e.g., sensitivity and offset matrices) can be calculated. The correction factors can be stored in the device, and applied to the IMU output to provide a true output. The testing apparatus can include a fixture placed in a gimbal movable around three axes.
摘要翻译： 电子设备可以包括用于监测电子设备的移动的惯性测量单元（IMU）。 由于用于构建IMU的制造过程并将IMU并入电子设备中，所以在设备中使用的IMU可能不准确。 为了校正IMU输出，可以将其中结合有IMU的电子设备放置在将设备移动到已知取向的测试设备中。 可以将已知取向处的IMU输出与期望的真实IMU输出进行比较，并且可以计算校正因子（例如，灵敏度和偏移矩阵）。 校正因子可以存储在设备中，并应用于IMU输出以提供真实的输出。 测试装置可以包括放置在可围绕三个轴线移动的万向架中的夹具。
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