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    System for sensing a sample
    1.
    发明申请
    System for sensing a sample 审中-公开
    用于感测样品的系统

    公开(公告)号：US20050262931A1

    公开(公告)日：2005-12-01

    申请号：US11192808

    申请日：2005-07-28

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    IPC分类号： G01Q70/08 ,  G01B3/00 ,  G01B5/28 ,  G01B7/34 ,  G01B21/20 ,  G01B21/30 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/38 ,  G01Q70/00 ,  G01Q70/06 ,  G01Q70/12 ,  G01Q90/00 ,  G01N13/10

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。

    System for sensing a sample
    4.
    发明授权
    System for sensing a sample 失效
    用于感测样品的系统

    公开(公告)号：US07278301B2

    公开(公告)日：2007-10-09

    申请号：US11423098

    申请日：2006-06-08

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    IPC分类号： G01B5/28 ,  G01N13/10 ,  G01N13/16

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。

    System for Sensing a Sample
    5.
    发明申请
    System for Sensing a Sample 失效
    感应样品系统

    公开(公告)号：US20060230819A1

    公开(公告)日：2006-10-19

    申请号：US11423098

    申请日：2006-06-08

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    IPC分类号： G01B5/28

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。

    System for sensing a sample
    6.
    发明授权
    System for sensing a sample 有权

    公开(公告)号：US06520005B2

    公开(公告)日：2003-02-18

    申请号：US09313962

    申请日：1999-05-18

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    IPC分类号： G01B528

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    System for Sensing a Sample
    7.
    发明申请
    System for Sensing a Sample 审中-公开

    公开(公告)号：US20060207318A1

    公开(公告)日：2006-09-21

    申请号：US11422319

    申请日：2006-06-05

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    IPC分类号： G01B5/28

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    System for sensing a sample
    9.
    发明授权
    System for sensing a sample 失效

    公开(公告)号：US06931917B2

    公开(公告)日：2005-08-23

    申请号：US10729609

    申请日：2003-12-05

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    IPC分类号： G01Q70/08 ,  G01B3/00 ,  G01B5/28 ,  G01B7/34 ,  G01B21/20 ,  G01B21/30 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/38 ,  G01Q70/00 ,  G01Q70/06 ,  G01Q70/12 ,  G01Q90/00 ,  G01N13/16

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    Optical profilometer combined with stylus probe measurement device
    10.
    发明授权
    Optical profilometer combined with stylus probe measurement device 失效
    光学轮廓仪结合触针探头测量装置

    公开(公告)号：US5955661A

    公开(公告)日：1999-09-21

    申请号：US779087

    申请日：1997-01-06

    申请人： Amin Samsavar ,  Michael Weber ,  Thomas McWaid ,  William P. Kuhn ,  Robert E. Parks

    发明人： Amin Samsavar ,  Michael Weber ,  Thomas McWaid ,  William P. Kuhn ,  Robert E. Parks

    IPC分类号： G01B21/30 ,  G01B11/00 ,  G01B21/04 ,  G01Q30/02 ,  G01Q60/24 ,  G01B5/28

    CPC分类号： G01B21/04 ,  B82Y35/00 ,  G01B11/005 ,  G01Q30/025 ,  Y10S977/869

    摘要： An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.

    摘要翻译： 在相同仪器中使用的光学轮廓仪和触针探头测量装置具有这两个传感器可以彼此快速切换的优点。 当用于测量样品时，这可能是有利的，因为可以使用光学轮廓仪，直到发现样品超出所需的公差。 之后，可以使用触控笔测量装置精确地确定轮廓数据。 这是一个优点，因为光学轮廓仪相对较快，而探针测量装置相对准确。 此外，由于光学轮廓仪和触针探针装置在相同的仪器中，这些装置的X和Y位置可以相互精确地相关。 这允许在图像上的位置容易相关的地方产生图像。 例如，传感器数据显示中的测量光标可以通过位置偏移信息相关联。