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    Micromechanical high-pressure sensor
    6.
    发明授权
    Micromechanical high-pressure sensor 失效
    微机械式高压传感器

    公开(公告)号：US07040172B2

    公开(公告)日：2006-05-09

    申请号：US11059229

    申请日：2005-02-16

    申请人： Thomas Moelkner ,  Ralf Henn ,  Werner Steiner ,  Hans-Peter Didra ,  Philip Cutuli ,  Frank Klopf

    发明人： Thomas Moelkner ,  Ralf Henn ,  Werner Steiner ,  Hans-Peter Didra ,  Philip Cutuli ,  Frank Klopf

    IPC分类号： G01L7/00

    CPC分类号： G01L9/0055 ,  G01L9/08

    摘要： A micromechanical pressure sensor and a method for producing a micromechanical pressure sensor. This pressure sensor has at least one membrane and a measuring element situated on the membrane. A pressure applied at the membrane or a pressure differential applied at the different sides of the membrane results in deformation of the membrane. Simultaneous with the deformation of the membrane, the measuring element is subjected to elastic elongation and/or compression. In a piezo-sensitive component, such elastic elongation and/or compression generates a measured variable in the measuring element, which represents the applied pressure or the applied pressure differential at the membrane. It is provided in this context that the measuring element have at least partially a NiCr(Si) layer. Due to an at least partial crystallization in the production of the micromechanical pressure sensor, this NiCr(Si) layer has more advantageous piezoelectrical characteristics than an amorphous NiCr(Si) layer.

    摘要翻译： 微机械压力传感器和微机械压力传感器的制造方法。 该压力传感器具有位于膜上的至少一个膜和测量元件。 在膜上施加的压力或在膜的不同侧施加的压力差导致膜的变形。 与膜的变形同时，测量元件受到弹性伸长和/或压缩。 在压敏元件中，这种弹性伸长和/或压缩在测量元件中产生测量的变量，其表示施加的压力或膜上施加的压差。 在本文中提供测量元件至少部分地具有NiCr（Si）层。 由于在微机械压力传感器的生产中至少部分结晶，该NiCr（Si）层具有比非晶NiCr（Si）层更有利的压电特性。

    High-Pressure Sensor for Pressure-Independent Measurement
    8.
    发明申请
    High-Pressure Sensor for Pressure-Independent Measurement 审中-公开
    用于压力独立测量的高压传感器

    公开(公告)号：US20070263700A1

    公开(公告)日：2007-11-15

    申请号：US10590169

    申请日：2004-11-19

    申请人： Thomas Moelkner ,  Carsten Kaschube ,  Hans-Peter Didra ,  Michael Kott

    发明人： Thomas Moelkner ,  Carsten Kaschube ,  Hans-Peter Didra ,  Michael Kott

    IPC分类号： G01K7/20

    CPC分类号： G01K7/206 ,  G01K1/26 ,  G01K2205/00 ,  G01L9/065

    摘要： A method for pressure-independent temperature determination using a metal diaphragm is provided. A bridge circuit having multiple resistors is provided on this diaphragm. One pair of resistors is near the center of the diaphragm and another pair of resistors is situated at a distance from the center. The resistors are provided on the metal diaphragm in such a way that the tensile elongation of the pair of resistors near the center corresponds in absolute value to compressions of the pair of resistors far from the center.

    摘要翻译： 提供了一种使用金属膜片进行压力独立温度测定的方法。 具有多个电阻器的桥接电路设置在该隔膜上。 一对电阻靠近隔膜的中心，另一对电阻位于离中心一定距离处。 电阻器设置在金属隔膜上，使得靠近中心的一对电阻器的拉伸长度对应于远离中心的一对电阻器的绝对值的压缩。

    Micromechanical high-pressure sensor
    10.
    发明申请
    Micromechanical high-pressure sensor 失效
    微机械式高压传感器

    公开(公告)号：US20050188769A1

    公开(公告)日：2005-09-01

    申请号：US11059229

    申请日：2005-02-16

    申请人： Thomas Moelkner ,  Ralf Henn ,  Werner Steiner ,  Hans-Peter Didra ,  Philip Cutuli ,  Frank Klopf

    发明人： Thomas Moelkner ,  Ralf Henn ,  Werner Steiner ,  Hans-Peter Didra ,  Philip Cutuli ,  Frank Klopf

    IPC分类号： G01L9/00 ,  B32B17/06 ,  G01L1/22 ,  G01L9/08 ,  H01L29/84

    CPC分类号： G01L9/0055 ,  G01L9/08

    摘要： A micromechanical pressure sensor and a method for producing a micromechanical pressure sensor. This pressure sensor has at least one membrane and a measuring element situated on the membrane. A pressure applied at the membrane or a pressure differential applied at the different sides of the membrane results in deformation of the membrane. Simultaneous with the deformation of the membrane, the measuring element is subjected to elastic elongation and/or compression. In a piezo-sensitive component, such elastic elongation and/or compression generates a measured variable in the measuring element, which represents the applied pressure or the applied pressure differential at the membrane. It is provided in this context that the measuring element have at least partially a NiCr(Si) layer. Due to an at least partial crystallization in the production of the micromechanical pressure sensor, this NiCr(Si) layer has more advantageous piezoelectrical characteristics than an amorphous NiCr(Si) layer.

    摘要翻译： 微机械压力传感器和微机械压力传感器的制造方法。 该压力传感器具有位于膜上的至少一个膜和测量元件。 在膜上施加的压力或在膜的不同侧施加的压力差导致膜的变形。 与膜的变形同时，测量元件受到弹性伸长和/或压缩。 在压敏元件中，这种弹性伸长和/或压缩在测量元件中产生测量的变量，其表示施加的压力或膜上施加的压差。 在本文中提供测量元件至少部分地具有NiCr（Si）层。 由于在微机械压力传感器的生产中至少部分结晶，该NiCr（Si）层具有比非晶NiCr（Si）层更有利的压电特性。