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公开(公告)号:US20210002143A1
公开(公告)日:2021-01-07
申请号:US16979087
申请日:2019-02-21
发明人: Seiichiro Tani , So Fukasawa , Hideyuki Takahashi
摘要: The tantalum chloride according to the present invention contains TaCl5, and has a total content of tantalum subchlorides of 1% by mass or less.
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公开(公告)号:US20190233301A1
公开(公告)日:2019-08-01
申请号:US16338020
申请日:2017-10-06
发明人: Hideyuki Takahashi
IPC分类号: C01G41/04
CPC分类号: C01G41/04
摘要: Provided are high purity tungsten pentachloride, and a method for obtaining such high purity tungsten pentachloride at a high yield and in an efficient manner. Tungsten pentachloride in which a total content of metal impurities excluding Sb, Ti, and As is less than 10 wtppm is obtained by uniformly mixing one or more types of reducing agents selected from Sb, Ti, and As and tungsten hexachloride at a molar ratio of 1.0:2.0 to 1.0:5.0 (reducing agent/WCl6 ratio) in an inert atmosphere to obtain a mixture, heating and reducing the mixture for 1 to 100 hours in a temperature range in which a chloride of tungsten and the reducing agent becomes a liquid phase to obtain a reduced product, heating the reduced product for 1 to 100 hours at 100 Pa or less and in a temperature range of 90 to 130° C., and performing reduced-pressure distillation thereto to obtain a reduced-pressure distilled product, heating and sublimating the reduced-pressure distilled product for 1 to 100 hours at 100 Pa or less and in a temperature range of 130 to 170° C., and performing sublimation purification of achieving precipitation at 70 to 120° C.
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公开(公告)号:US11939231B2
公开(公告)日:2024-03-26
申请号:US16955547
申请日:2019-04-12
发明人: Hideyuki Takahashi
IPC分类号: C30B25/16 , C01G39/00 , C30B23/00 , C30B23/06 , C23C16/455
CPC分类号: C01G39/00 , C30B23/002 , C30B23/066 , C30B25/16 , C01P2006/10 , C23C16/45553
摘要: Provided is a method of producing a high purity molybdenum oxychloride by including means of sublimating and reaggregating a raw material molybdenum oxychloride in a reduced-pressure atmosphere, or means of retaining a gaseous raw material molybdenum oxychloride, which was synthesized in a vapor phase, in a certain temperature range, and thereby growing crystals to obtain a higher purity molybdenum oxychloride having a high bulk density and high hygroscopicity resistance.
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公开(公告)号:US20210053839A1
公开(公告)日:2021-02-25
申请号:US16979021
申请日:2019-07-24
发明人: Hideyuki Takahashi
摘要: A molybdenum oxychloride or a tungsten oxychloride, wherein the molybdenum oxychloride or the tungsten oxychloride has a moisture content of less than 1 wt %. A method of producing a molybdenum oxychloride or a tungsten oxychloride, wherein a molybdenum oxide or a tungsten oxide as a raw material is subject to dehydration treatment at 400° C. or higher and 800° C. or less, and the raw material that underwent dehydration treatment is thereafter reacted with a chlorine gas to synthesize a molybdenum oxychloride or a tungsten oxychloride. An object of the present invention is to provide a molybdenum oxychloride or a tungsten oxychloride having a low moisture content, as well as a production method thereof.
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公开(公告)号:US20180085828A1
公开(公告)日:2018-03-29
申请号:US15829600
申请日:2017-12-01
IPC分类号: B22F3/11 , G11B7/2433 , B22F3/14 , C22C1/04 , C22C12/00 , C22C28/00 , C22C30/00 , C23C14/06 , C23C14/34 , B22F3/15 , G11B7/243
CPC分类号: B22F3/1103 , B22F3/14 , B22F3/15 , B22F2998/10 , C22C1/04 , C22C12/00 , C22C28/00 , C22C30/00 , C23C14/0623 , C23C14/3414 , G11B7/2433 , G11B2007/24308 , G11B2007/2431 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , G11B2007/24322
摘要: A sintered compact target containing an element(s) (A) and an element(s) (B) as defined below is provided. The sintered compact target is free from pores having an average diameter of 1 μm or more, and the number of micropores having an average diameter of less than 1 μm existing in 40000 μm2 of the target surface is 100 micropores or less. The element(s) (A) is one or more chalcogenide elements selected from S, Se, and Te, and the element(s) (B) is one or more Vb group elements selected from Bi, Sb, As, P, and N. The provided technology is able to eliminate the source of grain dropping or generation of nodules in the target during sputtering, and additionally inhibit the generation of particles.
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公开(公告)号:US10882757B2
公开(公告)日:2021-01-05
申请号:US15753126
申请日:2017-01-13
IPC分类号: C01G53/09 , C25B1/26 , H01L21/285 , C23C16/455 , C23C16/14
摘要: Provided is anhydrous nickel chloride having a total content of impurity elements other than gas components of less than 10 wt. ppm; each content of boron, sodium, magnesium, aluminum, potassium, calcium, titanium, chromium, manganese, iron, copper, zinc, arsenic, silver, cadmium, indium, tin, thallium and lead of less than 1 wt. ppm, which can be produced by a method for producing anhydrous nickel chloride comprising the steps of carrying out ion exchange membrane electrolysis in an anolyte and a catholyte separated by an anion exchange membrane using raw metal nickel as an anode, a conductive material as a cathode and high purity hydrochloric acid as an electrolytic solution, to obtain a nickel chloride solution as the anolyte; concentrating the obtained nickel chloride solution by heating it at 80 to 100° C. under atmospheric pressure to obtain a concentrated nickel chloride solution; and dehydrating and drying the resulting concentrated nickel chloride solution by heating it at 180 to 220° C. under atmospheric pressure to obtain anhydrous nickel chloride.
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公开(公告)号:US11846015B2
公开(公告)日:2023-12-19
申请号:US16522876
申请日:2019-07-26
IPC分类号: C23C14/34 , C22C28/00 , C23C14/06 , C22C1/04 , C04B35/547 , C22C12/00 , C04B35/626 , C04B35/645 , G11B7/26
CPC分类号: C23C14/3414 , C04B35/547 , C04B35/6261 , C04B35/645 , C22C1/04 , C22C12/00 , C22C28/00 , C23C14/0623 , G11B7/266 , C04B2235/40 , C04B2235/404 , C04B2235/408 , C04B2235/421 , C04B2235/422 , C04B2235/428 , C04B2235/5436 , C04B2235/5445 , C04B2235/77 , C04B2235/785 , C04B2235/96
摘要: An Sb—Te-based alloy sintered compact sputtering target having Sb and Te as main components and which contains 0.1 to 30 at % of carbon or boron and comprises a uniform mixed structure of Sb—Te-based alloy particles and fine carbon (C) or boron (B) particles is provided. An average grain size of the Sb—Te-based alloy particles is 3 μm or less and a standard deviation thereof is less than 1.00. An average grain size of the C or B particles is 0.5 μm or less and a standard deviation thereof is less than 0.20. When the average grain size of the Sb—Te-based alloy particles is X and the average grain size of the carbon or boron particles is Y, Y/X is within a range of 0.1 to 0.5. This provides an improved Sb—Te-based alloy sputtering target that inhibits generation of cracks in the sintered target and prevents generation of arcing during sputtering.
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公开(公告)号:US11427479B2
公开(公告)日:2022-08-30
申请号:US16338020
申请日:2017-10-06
发明人: Hideyuki Takahashi
IPC分类号: C01G41/04
摘要: Provided are high purity tungsten pentachloride, and a method for obtaining such high purity tungsten pentachloride at a high yield and in an efficient manner. Tungsten pentachloride in which a total content of metal impurities excluding Sb, Ti, and As is less than 10 wtppm is obtained by uniformly mixing one or more types of reducing agents selected from Sb, Ti, and As and tungsten hexachloride at a molar ratio of 1.0:2.0 to 1.0:5.0 (reducing agent/WCl6 ratio) in an inert atmosphere to obtain a mixture, heating and reducing the mixture for 1 to 100 hours in a temperature range in which a chloride of tungsten and the reducing agent becomes a liquid phase to obtain a reduced product, heating the reduced product for 1 to 100 hours at 100 Pa or less and in a temperature range of 90 to 130° C., and performing reduced-pressure distillation thereto to obtain a reduced-pressure distilled product, heating and sublimating the reduced-pressure distilled product for 1 to 100 hours at 100 Pa or less and in a temperature range of 130 to 170° C., and performing sublimation purification of achieving precipitation at 70 to 120° C.
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公开(公告)号:US20210009436A1
公开(公告)日:2021-01-14
申请号:US16955547
申请日:2019-04-12
发明人: Hideyuki Takahashi
IPC分类号: C01G39/00
摘要: Provided is a method of producing a high purity molybdenum oxychloride by including means of sublimating and reaggregating a raw material molybdenum oxychloride in a reduced-pressure atmosphere, or means of retaining a gaseous raw material molybdenum oxychloride, which was synthesized in a vapor phase, in a certain temperature range, and thereby growing crystals to obtain a higher purity molybdenum oxychloride having a high bulk density and high hygroscopicity resistance.
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公开(公告)号:US20200017955A1
公开(公告)日:2020-01-16
申请号:US16522876
申请日:2019-07-26
IPC分类号: C23C14/34 , C23C14/06 , C22C1/04 , C04B35/547 , C22C12/00 , C04B35/626 , C22C28/00 , C04B35/645 , G11B7/26
摘要: An Sb—Te-based alloy sintered compact sputtering target having Sb and Te as main components and which contains 0.1 to 30 at % of carbon or boron and comprises a uniform mixed structure of Sb—Te-based alloy particles and fine carbon (C) or boron (B) particles is provided. An average grain size of the Sb—Te-based alloy particles is 3 μm or less and a standard deviation thereof is less than 1.00. An average grain size of the C or B particles is 0.5 μm or less and a standard deviation thereof is less than 0.20. When the average grain size of the Sb—Te-based alloy particles is X and the average grain size of the carbon or boron particles is Y, Y/X is within a range of 0.1 to 0.5. This provides an improved Sb—Te-based alloy sputtering target that inhibits generation of cracks in the sintered target and prevents generation of arcing during sputtering.
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