公开(公告)号：US06734763B2

公开(公告)日：2004-05-11

申请号：US10117219

申请日：2002-04-08

申请人： Tokihiro Nishihara ,  Takeshi Sakashita ,  Rei Kimachi ,  Tsuyoshi Yokoyama ,  Tsutomu Miyashita

发明人： Tokihiro Nishihara ,  Takeshi Sakashita ,  Rei Kimachi ,  Tsuyoshi Yokoyama ,  Tsutomu Miyashita

IPC分类号： H03H900

CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/173 ,  H03H9/564 ,  H03H9/568 ,  Y10T29/42

摘要： A thin-film piezo-resonator includes a silicon substrate and a resonator assembly. The substrate is formed with a cavity or through-hole which is opened in the upper and the lower surfaces of the substrate. The resonator assembly, disposed at a location corresponding to the cavity, is composed of a first electrode contacting the upper surface of the substrate, a piezoelectric layer formed on the first electrode and a second electrode formed on the piezoelectric layer. The cavity has a side surface extending in a substantially perpendicular direction to the first surface.

摘要翻译： 薄膜压电谐振器包括硅衬底和谐振器组件。 衬底形成有在衬底的上表面和下表面中打开的空腔或通孔。 设置在与空腔对应的位置处的谐振器组件由与基板的上表面接触的第一电极，形成在第一电极上的压电层和形成在压电层上的第二电极组成。 空腔具有在与第一表面大致垂直的方向上延伸的侧表面。

公开(公告)号：US07145417B2

公开(公告)日：2006-12-05

申请号：US10397172

申请日：2003-03-27

申请人： Rei Kimachi ,  Tokihiro Nishihara ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Tsutomu Miyashita

发明人： Rei Kimachi ,  Tokihiro Nishihara ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Tsutomu Miyashita

IPC分类号： H03H9/54 ,  H03H9/64

CPC分类号： H03H9/1014 ,  H03H9/0523 ,  H03H9/564 ,  H03H9/568 ,  H03H9/6483

摘要： A filter chip includes multiple series-arm resonators arranged in series arms of a ladder arrangement, and multiple parallel-arm resonators arranged in parallel arms of the ladder arrangement. A common line is connected to first electrodes of at least two parallel-arm resonators among the multiple parallel-arm resonators. Second electrodes of said at least two parallel-arm resonators are connected to associated series-arm resonators among the multiple series-arm resonators.