Filter device
    4.
    发明授权
    Filter device 失效
    过滤装置

    公开(公告)号:US06949990B2

    公开(公告)日:2005-09-27

    申请号:US10665209

    申请日:2003-09-22

    摘要: A filter device includes a filter element that has piezoelectric thin-film resonators arranged in series arms and parallel arms, and a package that houses the filter element in a face-down state. In this filter device, the filter element and the package are electrically connected to each other through bumps. The package includes first pad parts on which the bumps are placed, and transmission paths that electrically connect the first pad parts to the outside. The filter element includes second pad parts that are electrically connected to the first pad parts through the bumps, and wiring parts that electrically connect the second pads to the piezoelectric thin-film resonators and electrically connect the piezoelectric thin-film resonators to one another. In this structure, inductances formed with the transmission paths are connected in series to the piezoelectric thin-film resonators.

    摘要翻译: 滤波器装置包括具有布置成串联臂和平行臂的压电薄膜谐振器的滤波器元件和以面朝下的状态容纳滤波元件的封装。 在该过滤器装置中,过滤元件和封装通过凸块彼此电连接。 该包装包括其上放置有凸块的第一垫片部分和将第一垫片部分电连接到外部的传输路径。 滤波器元件包括通过凸块电连接到第一焊盘部分的第二焊盘部分,以及将第二焊盘电连接到压电薄膜谐振器并将压电薄膜谐振器彼此电连接的布线部分。 在该结构中,形成有传输路径的电感与压电薄膜谐振器串联连接。

    Resonator, filter and fabrication of resonator
    5.
    发明授权
    Resonator, filter and fabrication of resonator 有权
    谐振器的谐振器,滤波器和制造

    公开(公告)号:US07498717B2

    公开(公告)日:2009-03-03

    申请号:US11092979

    申请日:2005-03-30

    IPC分类号: H01L41/09

    摘要: A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.

    摘要翻译: 谐振器包括设置在基板的主表面上的压电薄膜,设置在压电薄膜的第一表面上的第一电极膜,设置在压电薄膜的第二表面上的第二电极膜, 频率调节膜,其设置在所述第一和第二电极膜中的一个上,所述频率调节膜包括膜层叠体,所述膜层叠体包括设置在所述第一和第二电极膜中的所述一个上的第一调节膜,以及设置在所述第一调节膜上的第二调节膜 。 第一调节膜用于Deltaf调节,第二调节膜用于校正过滤器制造过程中产生的频率偏差。 因此,可以精确地控制多个谐振器连接的滤波器的中心频率。