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公开(公告)号：US20210407771A1
公开(公告)日：2021-12-30
申请号：US16913548
申请日：2020-06-26
Applicant: Tokyo Electron Limited
Inventor： Merritt Funk , Yohei Yamazawa , Chelsea Dubose , Barton Lane
IPC: H01J37/32 , H01J37/244
Abstract: In accordance with an embodiment, a measurement system includes a sensor circuit configured to provide a voltage sense signal proportional to an electric field sensed by the RF sensor and a current sense signal proportional to a magnetic field sensed by the RF sensor; an analysis circuit comprising a frequency selective demodulator circuit configured to: demodulate the voltage sense signal into a first set of analog demodulated signals according to a set of demodulation frequencies, demodulate the current sense signal into a second set of analog demodulated signals according to the set of demodulation frequencies, and determine a phase shift between the voltage sense signal and the current sense signal for at least one frequency of the set of demodulation frequencies; and analog-to-digital converters configured to receive the first and second sets of analog demodulated signals.
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公开(公告)号：US11410832B2
公开(公告)日：2022-08-09
申请号：US16913548
申请日：2020-06-26
Applicant: Tokyo Electron Limited
Inventor： Merritt Funk , Yohei Yamazawa , Chelsea Dubose , Barton Lane
IPC: H01J37/32 , H01J37/244
Abstract: In accordance with an embodiment, a measurement system includes a sensor circuit configured to provide a voltage sense signal proportional to an electric field sensed by the RF sensor and a current sense signal proportional to a magnetic field sensed by the RF sensor; an analysis circuit comprising a frequency selective demodulator circuit configured to: demodulate the voltage sense signal into a first set of analog demodulated signals according to a set of demodulation frequencies, demodulate the current sense signal into a second set of analog demodulated signals according to the set of demodulation frequencies, and determine a phase shift between the voltage sense signal and the current sense signal for at least one frequency of the set of demodulation frequencies; and analog-to-digital converters configured to receive the first and second sets of analog demodulated signals.
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公开(公告)号：US12224164B2
公开(公告)日：2025-02-11
申请号：US17514815
申请日：2021-10-29
Applicant: Tokyo Electron Limited
Inventor： Chelsea Dubose , Barton Lane , Merritt Funk , Justin Moses , Yohei Yamazawa
IPC: H01J37/32
Abstract: A radio frequency (RF) system including: a first conductive covering surface, a portion of the first conductive covering surface including a portion of the first outer wall of a first RF device; a second conductive covering surface aligned to the first conductive covering surface, the second conductive covering surface being disposed around the insulating hole; an insulating hole for an RF center conductor extending through the first conductive covering surface and the second conductive covering surface, the first conductive covering surface and the second conductive covering surface being disposed around the insulating hole; a cavity bounded by the first conductive covering surface and the second conductive covering surface, the cavity being an insulating region; and an RF signal pickup disposed within the cavity.
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公开(公告)号：US20210407775A1
公开(公告)日：2021-12-30
申请号：US16913526
申请日：2020-06-26
Applicant: Tokyo Electron Limited
Inventor： Justin Moses , Barton Lane , Merritt Funk , Chelsea Dubose , Yohei Yamazawa , Michael Hummel
Abstract: A radio frequency (RF) system includes a RF power source configured to power a load with an RF signal; an RF pipe including an inner conductor and an outer conductor connected to ground coupling the RF power source to the load; and a current sensor aligned to a central axis of the RF pipe carrying the RF signal. A sensor casing is disposed around the RF pipe, where the sensor casing includes a conductive material connected to the outer conductor of the RF pipe. A gallery is disposed within the sensor casing and outside the outer conductor of the RF pipe, where the current sensor is disposed in the gallery. A slit in the outer conductor of the RF pipe exposes the current sensor to a magnetic field due to the current of the RF signal in the inner conductor of the RF pipe.
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Patent Agency Ranking
公开(公告)号：US20210343504A1
公开(公告)日：2021-11-04
申请号：US17374857
申请日：2021-07-13
Applicant: Tokyo Electron Limited
Inventor： Merritt Funk , Chelsea Dubose , Justin Moses , Kazuki Moyama , Kazushi Kaneko
Abstract: Embodiments are described herein for power generation systems and methods that use quadrature splitters and combiners to facilitate plasma stability and control. For one embodiment, a quadrature splitter receives an input signal and generates a first and second signals as outputs with the second signal being ninety degrees out of phase with respect to the first signal. Two amplifiers then generate a first and second amplified signals. A quadrature combiner receives the first and second amplified signals and generates a combined amplified signal that represents re-aligned versions of the first and second amplified signals. The power amplifiers can be combined into a system to generate a high power output to a processing chamber. Further, detectors can generate measurements used to monitor and control power generation. The power amplifiers, system, and methods provide significant advantages for high-power generation delivered to process chambers for plasma generation during plasma processing.
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公开(公告)号：US11721524B2
公开(公告)日：2023-08-08
申请号：US17374857
申请日：2021-07-13
Applicant: Tokyo Electron Limited
Inventor： Merritt Funk , Chelsea Dubose , Justin Moses , Kazuki Moyama , Kazushi Kaneko
CPC classification number: H01J37/32183 , H03F1/0288 , H03F1/56 , H03F3/21 , H03F2200/222 , H03F2200/387 , H03F2200/451
Abstract: Embodiments are described herein for power generation systems and methods that use quadrature splitters and combiners to facilitate plasma stability and control. For one embodiment, a quadrature splitter receives an input signal and generates a first and second signals as outputs with the second signal being ninety degrees out of phase with respect to the first signal. Two amplifiers then generate a first and second amplified signals. A quadrature combiner receives the first and second amplified signals and generates a combined amplified signal that represents re-aligned versions of the first and second amplified signals. The power amplifiers can be combined into a system to generate a high power output to a processing chamber. Further, detectors can generate measurements used to monitor and control power generation. The power amplifiers, system, and methods provide significant advantages for high-power generation delivered to process chambers for plasma generation during plasma processing.
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公开(公告)号：US20230132660A1
公开(公告)日：2023-05-04
申请号：US17514815
申请日：2021-10-29
Applicant: Tokyo Electron Limited
Inventor： Chelsea Dubose , Barton Lane , Merritt Funk , Justin Moses , Yohei Yamazawa
Abstract: A radio frequency (RF) system including: a first conductive covering surface, a portion of the first conductive covering surface including a portion of the first outer wall of a first RF device; a second conductive covering surface aligned to the first conductive covering surface, the second conductive covering surface being disposed around the insulating hole; an insulating hole for an RF center conductor extending through the first conductive covering surface and the second conductive covering surface, the first conductive covering surface and the second conductive covering surface being disposed around the insulating hole; a cavity bounded by the first conductive covering surface and the second conductive covering surface, the cavity being an insulating region; and an RF signal pickup disposed within the cavity.
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公开(公告)号：US11600474B2
公开(公告)日：2023-03-07
申请号：US16913526
申请日：2020-06-26
Applicant: Tokyo Electron Limited
Inventor： Barton Lane , Merritt Funk , Yohei Yamazawa , Justin Moses , Chelsea Dubose , Michael Hummel
Abstract: A radio frequency (RF) system includes a RF power source configured to power a load with an RF signal; an RF pipe including an inner conductor and an outer conductor connected to ground coupling the RF power source to the load; and a current sensor aligned to a central axis of the RF pipe carrying the RF signal. A sensor casing is disposed around the RF pipe, where the sensor casing includes a conductive material connected to the outer conductor of the RF pipe. A gallery is disposed within the sensor casing and outside the outer conductor of the RF pipe, where the current sensor is disposed in the gallery. A slit in the outer conductor of the RF pipe exposes the current sensor to a magnetic field due to the current of the RF signal in the inner conductor of the RF pipe.
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公开(公告)号：US20210407770A1
公开(公告)日：2021-12-30
申请号：US16913545
申请日：2020-06-26
Applicant: Tokyo Electron Limited
Inventor： Justin Moses , Barton Lane , Merritt Funk , Chelsea Dubose , Yohei Yamazawa , Michael Hummel
Abstract: A radio frequency sensor assembly includes a sensor casing disposed around a central hole, the sensor casing including a first conductive cover and a second conductive cover. The assembly includes a cavity disposed around the central hole and includes a dielectric material, the cavity being bounded by a first major outer surface and a second major outer surface along a radial direction from a center of the central hole, where the first conductive cover is electrically coupled to the second conductive cover through a coupling region beyond the second major outer surface of the cavity, and electrically insulated from the second conductive cover by the cavity and the central hole. The assembly includes a current sensor electrically insulated from the sensor casing and including a current pickup disposed symmetrically around the central hole, the current pickup being disposed within the cavity and being insulated from the sensor casing.
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