公开(公告)号：US20240394668A1

公开(公告)日：2024-11-28

申请号：US18672248

申请日：2024-05-23

Applicant: Tokyo Electron Limited

Inventor： Tomonori OKUMURA ,  Manabu YAMANAKA

IPC: G06Q10/20 ,  G06Q50/26

Abstract: A substrate processing apparatus that processes a substrate includes a housing having an accommodation space that accommodates a device used to process the substrate, a switch that switches the accommodation space between an open state and a closed state, a detection unit provided around the housing to detect protective gear worn by an operator, and a control unit that controls an operation of the switch. The control unit determines whether the worn protective gear detected by the detector is pre-registered protective gear corresponding to the housing, and when determined that the worn protective gear is the corresponding protective gear, the control unit switches the accommodation space from the closed state to the open state.

公开(公告)号：US20240242978A1

公开(公告)日：2024-07-18

申请号：US18413295

申请日：2024-01-16

Applicant: Tokyo Electron Limited

Inventor： Shota UMEZAKI ,  Shigeru MORIYAMA ,  Tomotaka OMAGARI ,  Keiichi YAHATA ,  Shuji OIE ,  Yuichi TANAKA ,  Katsuhiro OOKAWA ,  Manabu YAMANAKA ,  Takuya ITAHASHI

IPC: H01L21/67 ,  F26B5/04

CPC classification number: H01L21/67034 ,  F26B5/04 ,  H01L21/67126 ,  H01L21/67242

Abstract: A substrate processing apparatus includes a drying unit for replacing a liquid film formed on a substrate with a supercritical fluid to dry the substrate, and a control device. The drying unit includes a pressure container, a supply mechanism for supplying fluid to the pressure container, a discharge mechanism for discharging the fluid from the pressure container, a panel for separating an internal space from an external space, an electromagnetic lock, and a concentration sensor for detecting a concentration of the fluid. An unlocking condition for the control device to switch a state of the electromagnetic lock from a locked state to an unlocked state includes a condition that a detection value of the pressure sensor is less than or equal to a first threshold value and a condition that a detection value of the concentration sensor is less than or equal to a second threshold value.