公开(公告)号：US20230111278A1

公开(公告)日：2023-04-13

申请号：US17961589

申请日：2022-10-07

Applicant: Tokyo Electron Limited

Inventor： Soya TODO ,  Ryohei TAKEDA ,  Muneyuki OMI ,  Shin OKAMOTO ,  Joji TAKAYOSHI

IPC: H01J37/32

Abstract: The present disclosure provides a non-transitory computer-readable storage medium storing a control program of a plasma processing apparatus which performs a plasma processing by supplying a source power to a plasma generator and supplying a bias power to a stage that places a processing target substrate thereon. The control program causes a computer to execute a process including: monitoring a peak-to-peak voltage value of the source power or the bias power; and correcting the source power supplied to the plasma generator and the bias power supplied to the stage according to a fluctuation of the peak-to-peak voltage value, to make the monitored peak-to-peak voltage value approach an initial set value while fixing a ratio of the source power and the bias power.

公开(公告)号：US20250157798A1

公开(公告)日：2025-05-15

申请号：US19021284

申请日：2025-01-15

Applicant: Tokyo Electron Limited

Inventor： Ryohei TAKEDA ,  Wataru TAKAYAMA ,  Muneyuki OMI ,  Keita YAEGASHI ,  Sho TOMINAGA ,  Joji TAKAYOSHI

IPC: H01J37/32

Abstract: A control program for a plasma processing device that executes plasma processing by supplying source power to a plasma generation source and supplying bias power to a stage on which a substrate to be processed is placed, and the control program causes a computer to observe a peak-to-peak voltage between the source power and the bias power, and adjust the source power supplied to the plasma generation source, the bias power supplied to the stage, a direct-current voltage applied to an outer peripheral member disposed around the stage, and an impedance of a filter circuit connected between a source of the direct-current voltage and the outer peripheral member, the source power, the bias power, the direct-current voltage and the impedance being adjustment parameters for controlling a fluctuation width of the observed peak-to-peak voltage.