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公开(公告)号：US12230523B2
公开(公告)日：2025-02-18
申请号：US17889624
申请日：2022-08-17
Applicant: Tokyo Electron Limited
Inventor： Tadashi Enomoto , Nao Akashi , Yutai Matsuhashi , Masakazu Yamamoto
IPC: H01L21/67 , H01L21/673 , H01L21/68
Abstract: A substrate processing apparatus includes: a chamber that accommodates a boat; a transfer mechanism that is provided inside the chamber, and transfers a substrate; a first camera that captures an image of a support column of the boat and the substrate; a support member that is inserted through an opening formed in a wall surface of the chamber, and supports the first camera; and a driver that drives the support member in order to move the first camera between a standby position and a measurement position.
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公开(公告)号：US11598007B2
公开(公告)日：2023-03-07
申请号：US16549365
申请日：2019-08-23
Applicant: Tokyo Electron Limited
Inventor： Nao Akashi , Yuta Haga , Hiroyuki Sato , Motoi Okada , Kei Sano , Junya Sato , Takayuki Kita , Atsushi Suzuki , Kiwamu Tsukino , Takuro Tsutsui
Abstract: According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.
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公开(公告)号：US20200080202A1
公开(公告)日：2020-03-12
申请号：US16549365
申请日：2019-08-23
Applicant: Tokyo Electron Limited
Inventor： Nao Akashi , Yuta Haga , Hiroyuki Sato , Motoi Okada , Kei Sano , Junya Sato , Takayuki Kita , Atsushi Suzuki , Kiwamu Tsukino , Takuro Tsutsui
Abstract: According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.
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