公开(公告)号：US11873556B2

公开(公告)日：2024-01-16

申请号：US17229799

申请日：2021-04-13

Applicant: Tokyo Electron Limited

Inventor： Tomohisa Kimoto ,  Noriyuki Watanabe ,  Kensaku Narushima ,  Kouichi Sekido ,  Takuya Kawaguchi

IPC: G05D7/06 ,  G05D23/12 ,  H01L21/67 ,  F16K21/00 ,  C23C16/448 ,  C23C16/44 ,  C23C16/52 ,  C23C16/455 ,  G05D23/20 ,  F16K24/04

CPC classification number: C23C16/448 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/45561 ,  C23C16/52 ,  F16K24/04 ,  G05D7/0629 ,  G05D23/12 ,  G05D23/2037 ,  H01L21/67017 ,  F16K21/00

Abstract: A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.