公开(公告)号：US20230005763A1

公开(公告)日：2023-01-05

申请号：US17808160

申请日：2022-06-22

Applicant: Tokyo Electron Limited

Inventor： Kazuki KOSAI ,  Hideaki UDOU ,  Seiya FUJIMOTO ,  Yudai TAKANAGA ,  Takahito NAKASHOYA ,  Shogo FUKUI ,  Atsushi ANAMOTO ,  So OSADA

IPC: H01L21/67 ,  B08B3/02 ,  B08B13/00 ,  B08B3/14

Abstract: An apparatus includes: a tank storing a processing liquid; a circulation line; a branch line; a processing part for supplying the processing liquid to a substrate at the branch line; a discharge part for reducing a storage amount of the processing liquid; a supply part for supplying a new processing liquid to the tank; and a controller including: a first determination part for determining whether the storage amount is less than a lower limit value; a first replenishment controller for replenishing the processing liquid to the tank when the storage amount is less than the lower limit value; a calculation part for calculating a replenishment amount of the processing liquid; and a second replenishment controller for reducing the storage amount and replenishing the processing liquid to the tank when a calculation value of the replenishment amount is less than a set value.