公开(公告)号：US20250132171A1

公开(公告)日：2025-04-24

申请号：US18917045

申请日：2024-10-16

Applicant: Tokyo Electron Limited

Inventor： So OSADA ,  Katsuya OKUDA ,  Naohiro IWANAGA ,  Kazuki KOSAI

IPC: H01L21/67

Abstract: A liquid supply device includes a tank storing a processing liquid, a circulation line, a pump, and a supply line for supplying the processing liquid to a liquid processor. The circulation line includes a main line, and first and second branch lines branching from the main line. The supply line includes first and second supply lines connected to the first and second branch lines, respectively. The first and second branch lines includes first and second heating mechanisms, first and second filters, first and second drain lines for draining the processing liquid, first and second branch circulation lines for returning the processing liquid to the tank, and first and second valves provided to switch a destination of the processing liquid, respectively.

公开(公告)号：US20250130597A1

公开(公告)日：2025-04-24

申请号：US18917105

申请日：2024-10-16

Applicant: Tokyo Electron Limited

Inventor： So OSADA ,  Katsuya OKUDA ,  Naohiro IWANAGA ,  Kazuki KOSAI ,  Toshiyuki SHIOKAWA

IPC: G05D7/06 ,  H01L21/67

Abstract: A liquid supply device includes: a processing liquid line through which a processing liquid is supplied to a liquid processor for performing liquid processing on a substrate; a heating mechanism provided in the processing liquid line to heat the processing liquid flowing through the processing liquid line; a filter provided downstream of the heating mechanism in the processing liquid line; a drain line provided downstream of the filter in the processing liquid line and through which the processing liquid flowing through the processing liquid line is drained; a first temperature sensor configured to respectively detect a temperature of the filter, the processing liquid line, the drain line, or the processing liquid; and a controller configured to determine whether to drain the processing liquid from the drain line based on a detection result by the first temperature sensor.

公开(公告)号：US20230005763A1

公开(公告)日：2023-01-05

申请号：US17808160

申请日：2022-06-22

Applicant: Tokyo Electron Limited

Inventor： Kazuki KOSAI ,  Hideaki UDOU ,  Seiya FUJIMOTO ,  Yudai TAKANAGA ,  Takahito NAKASHOYA ,  Shogo FUKUI ,  Atsushi ANAMOTO ,  So OSADA

IPC: H01L21/67 ,  B08B3/02 ,  B08B13/00 ,  B08B3/14

Abstract: An apparatus includes: a tank storing a processing liquid; a circulation line; a branch line; a processing part for supplying the processing liquid to a substrate at the branch line; a discharge part for reducing a storage amount of the processing liquid; a supply part for supplying a new processing liquid to the tank; and a controller including: a first determination part for determining whether the storage amount is less than a lower limit value; a first replenishment controller for replenishing the processing liquid to the tank when the storage amount is less than the lower limit value; a calculation part for calculating a replenishment amount of the processing liquid; and a second replenishment controller for reducing the storage amount and replenishing the processing liquid to the tank when a calculation value of the replenishment amount is less than a set value.