公开(公告)号：US20180233392A1

公开(公告)日：2018-08-16

申请号：US15893490

申请日：2018-02-09

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takahiro ABE

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/67

CPC classification number: H01L21/67766 ,  H01L21/67017 ,  H01L21/67389 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775

Abstract: There is provided a substrate processing system, including: a carrier transfer region in which a carrier that accommodates a substrate is transferred to a substrate processing apparatus, and a substrate transfer region in which the substrate accommodated in the carrier is transferred to a processing furnace, the substrate transfer region being partitioned from the carrier transfer region by a partition wall; a transfer port formed in the partition wall and through which the substrate is transferred between the carrier transfer region and the substrate transfer region; an opening/closing door configured to open and close the transfer port; and a pressure equalizing part configured to substantially equalize a pressure of the substrate transfer region and a pressure of a space surrounded by the carrier and the opening/closing door.

公开(公告)号：US20240116709A1

公开(公告)日：2024-04-11

申请号：US18483050

申请日：2023-10-09

Applicant: Tokyo Electron Limited

Inventor： Masato KADOBE ,  Hiromi NITADORI ,  Takahiro ABE ,  Junichi SATO

IPC: B65G1/10 ,  B65G49/06

CPC classification number: B65G1/10 ,  B65G49/061 ,  B65G49/062 ,  B65G2201/0297

Abstract: A substrate processing apparatus includes: a loading/unloading part having a first side surface into or from which a container accommodating a substrate is loaded or unloaded and a second side surface opposite to the first side surface; a substrate transfer part extending in a first direction orthogonal to the second side surface; and a plurality of batch processors adjacent to each other in a length direction of the substrate transfer part. The loading/unloading part includes: a first transfer device and a second transfer device configured to transfer the container; a first area accessible to the first transfer device and having a plurality of first storage shelves configured to store the container, a second area accessible to the second transfer device and having a plurality of second storage shelves configured to store the container; and a movable shelf configured to be movable between the first area and the second area.