公开(公告)号：US20240120867A1

公开(公告)日：2024-04-11

申请号：US18480575

申请日：2023-10-04

Applicant: Tokyo Electron Limited

Inventor： Youichi MASAKI ,  Mitsuteru YANO ,  Eiichi SEKIMOTO ,  Tsuyoshi OTSUKA ,  Akihiro TERAMOTO ,  Teppei ITO ,  Koji TAKAYANAGI

IPC: H02P21/20 ,  H02P21/22

CPC classification number: H02P21/20 ,  H02P21/22 ,  H02P2205/05

Abstract: A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.