公开(公告)号：US10128138B2

公开(公告)日：2018-11-13

申请号：US15448882

申请日：2017-03-03

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/67 ,  H01L21/677

Abstract: A substrate transfer method is provided. The substrate transfer method comprises: loading the transfer container to a load port, and separating the cover body from the container main body; detecting an accommodation status of the substrate in the container main body by a detection unit; correcting, by a correction device, the accommodation status of the substrate in the container main body in which the accommodation status of the substrate detected by the detection unit is abnormal; and allowing a substrate transfer device to enter the container main body in which the accommodation status of the substrate is corrected, and unloading the substrate from the container main body.

公开(公告)号：US09627238B2

公开(公告)日：2017-04-18

申请号：US14135988

申请日：2013-12-20

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67265 ,  B65G2201/0297 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.

公开(公告)号：US20170178935A1

公开(公告)日：2017-06-22

申请号：US15448882

申请日：2017-03-03

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67265 ,  B65G2201/0297 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate transfer method is provided. The substrate transfer method comprises: loading the transfer container to a load port, and separating the cover body from the container main body; detecting an accommodation status of the substrate in the container main body by a detection unit; correcting, by a correction device, the accommodation status of the substrate in the container main body in which the accommodation status of the substrate detected by the detection unit is abnormal; and allowing a substrate transfer device to enter the container main body in which the accommodation status of the substrate is corrected, and unloading the substrate from the container main body.

公开(公告)号：US20140178162A1

公开(公告)日：2014-06-26

申请号：US14135988

申请日：2013-12-20

Applicant: Tokyo Electron Limited

Inventor： Katsuhiro Morikawa ,  Ikuo Sunaka ,  Seiji Nakano ,  Kazunori Kuratomi ,  Toshio Shimazu

IPC: H01L21/677

CPC classification number: H01L21/67265 ,  B65G2201/0297 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.

Abstract translation: 基板传送装置从其中盖体气密地封闭形成在容器主体的前表面的基板卸载开口的转印容器卸载基板，并且多个基板以架子的形式容纳。 基板输送装置包括装载转印容器的装载口， 检测单元，被配置为检测装载到所述负载端口并与所述盖体分离的所述容器主体中的所述基板的调节状态; 基板转印装置，被配置为进入所述容器主体并卸载所述基板; 以及校正装置，其被配置为当所述检测单元检测到所述调节状态中的异常时，通过所述基板传送装置从所述容器主体卸载所述基板之前的所述基板在所述容器主体中的调节状态。