-
公开(公告)号：US20210305023A1
公开(公告)日：2021-09-30
申请号：US17195787
申请日：2021-03-09
IPC分类号： H01J37/32 , H01L21/687 , H01L21/311
摘要： An edge ring formed of a material including boron carbide and silicon carbide is provided. The content by percentage of the boron carbide contained in the material is in a range between 30% and 50%.
-
公开(公告)号：US20210217649A1
公开(公告)日：2021-07-15
申请号：US17145171
申请日：2021-01-08
发明人： Kazuhiko AKAHANE , Toshiya TSUKAHARA , Sungjae LEE , Namho YUN , Jisoo SUH
IPC分类号： H01L21/687 , H01L21/67 , H01J37/32
摘要： An edge ring is disposed to surround a target substrate. The edge ring includes a first upper surface made of silicon carbide, tungsten carbide, magnesium oxide, or yttria, and a second upper surface made of silicon. The second upper surface is formed at a position lower than the first upper surface to face a bottom surface of a peripheral portion of the target substrate.
-
公开(公告)号：US20210183685A1
公开(公告)日：2021-06-17
申请号：US17124139
申请日：2020-12-16
发明人： Sungjae LEE , Toshiya TSUKAHARA , Mitsuaki SATO , Tetsuji SATO
IPC分类号： H01L21/687 , H01L21/683 , H01L21/67 , H01J37/32
摘要： Provided is an edge ring to reduce the frequency of replacement of an edge ring used for plasma processing and to suppress the leakage of a heat transfer gas. The edge ring has an annular first member and an annular second member, the first member has a recess on the lower surface and is made of a first material having plasma resistance, and the second member is arranged in the recess of the first member and is made of a second material having a rigidity lower than that of the first material.
-
-
搜索结果
3 条记录 (耗时 0.012 秒)
