公开(公告)号：US20210305023A1

公开(公告)日：2021-09-30

申请号：US17195787

申请日：2021-03-09

Applicant: Tokyo Electron Limited

Inventor： Masahiro OGASAWARA ,  Hidetoshi HANAOKA ,  Masashi IKEGAMI ,  Naoyuki SATOH ,  Toshiya TSUKAHARA

IPC: H01J37/32 ,  H01L21/687 ,  H01L21/311

Abstract: An edge ring formed of a material including boron carbide and silicon carbide is provided. The content by percentage of the boron carbide contained in the material is in a range between 30% and 50%.

公开(公告)号：US20210217649A1

公开(公告)日：2021-07-15

申请号：US17145171

申请日：2021-01-08

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kazuhiko AKAHANE ,  Toshiya TSUKAHARA ,  Sungjae LEE ,  Namho YUN ,  Jisoo SUH

IPC: H01L21/687 ,  H01L21/67 ,  H01J37/32

Abstract: An edge ring is disposed to surround a target substrate. The edge ring includes a first upper surface made of silicon carbide, tungsten carbide, magnesium oxide, or yttria, and a second upper surface made of silicon. The second upper surface is formed at a position lower than the first upper surface to face a bottom surface of a peripheral portion of the target substrate.

公开(公告)号：US20210183685A1

公开(公告)日：2021-06-17

申请号：US17124139

申请日：2020-12-16

Applicant: TOKYO ELECTRON LIMITED

Inventor： Sungjae LEE ,  Toshiya TSUKAHARA ,  Mitsuaki SATO ,  Tetsuji SATO

IPC: H01L21/687 ,  H01L21/683 ,  H01L21/67 ,  H01J37/32

Abstract: Provided is an edge ring to reduce the frequency of replacement of an edge ring used for plasma processing and to suppress the leakage of a heat transfer gas. The edge ring has an annular first member and an annular second member, the first member has a recess on the lower surface and is made of a first material having plasma resistance, and the second member is arranged in the recess of the first member and is made of a second material having a rigidity lower than that of the first material.