公开(公告)号：US20210111043A1

公开(公告)日：2021-04-15

申请号：US16603044

申请日：2018-03-23

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yusuke TAKAMATSU ,  Yasuhiro TAKAKI ,  Shinichi UMENO ,  Shogo FUKUI

IPC: H01L21/67 ,  H01L21/687 ,  B08B3/08 ,  B01D19/02 ,  B01D19/00 ,  B01D29/52 ,  B05C11/10 ,  B05C5/02

Abstract: A liquid supply device includes: a storage tank configured to store a processing liquid including a first processing liquid (sulfuric acid) and a second processing liquid (hydrogen peroxide solution); a circulation path having a first pipeline through which the processing liquid passes in a horizontal direction, and configured to circulate the processing liquid stored in the storage tank; a branch path configured to supply the processing liquid to a processing unit; and a branching part having an opening for allowing the processing liquid to flow out from the first pipeline to the branch path, wherein the opening is formed in the branching part and formed below a periphery of the first pipeline when the first pipeline is viewed in section.

公开(公告)号：US20200256330A1

公开(公告)日：2020-08-13

申请号：US16775468

申请日：2020-01-29

Applicant: Tokyo Electron Limited

Inventor： Daisuke ISHIMARU ,  Katsuya HASHIMOTO ,  Yasuhiro TAKAKI

IPC: F04B43/107

Abstract: There is disclosed a hollow tube body used for a liquid feeding member and deformable by pressurization, wherein: an axial cross-section of the tube body has two opposing long side parts and two opposing short side parts; four corner portions formed by the long side parts and the short side parts each have a shape curved to protrude outward; each of the long side parts has a recessed part recessed inward and continuing from the corner portions; and a portion other than the corner portions of each of the short side parts is in a flat shape.