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公开(公告)号:US08068223B2
公开(公告)日:2011-11-29
申请号:US12377350
申请日:2008-06-05
申请人: Tomofumi Suzuki , Katsumi Shibayama , Takashi Iida , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Tomofumi Suzuki , Katsumi Shibayama , Takashi Iida , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/28
CPC分类号: G01J3/14 , G01J3/02 , G01J3/0256
摘要: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a light incident opening 42a of the light-passing hole 42 is partially covered by a light transmitting plate 16.
摘要翻译: 光谱分析模块1设置有用于透射光L1,L2的主体部分2,用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a,光检测元件4,具有光检测部分41,用于检测由分光部分3分散和反射的光L2,并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充在光检测元件4的主体部分2侧的底部填充材料12以透射光L1,L2。 光检测元件4设置有通向分光部3的光L1通过的通光孔42,透光孔42的光入射开口42a被透光板16部分地覆盖。
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公开(公告)号:US20100208259A1
公开(公告)日:2010-08-19
申请号:US12377350
申请日:2008-06-05
申请人: Tomofumi Suzuki , Katsumi Shibayama , Takashi Iida , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Tomofumi Suzuki , Katsumi Shibayama , Takashi Iida , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/02
CPC分类号: G01J3/14 , G01J3/02 , G01J3/0256
摘要: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a light incident opening 42a of the light-passing hole 42 is partially covered by a light transmitting plate 16.
摘要翻译: 光谱分析模块1设置有用于透射光L1,L2的主体部分2,用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a,光检测元件4,具有光检测部分41,用于检测由分光部分3分散和反射的光L2,并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充在光检测元件4的主体部分2侧的底部填充材料12以透射光L1,L2。 光检测元件4设置有通向分光部3的光L1通过的通光孔42,透光孔42的光入射开口42a被透光板16部分地覆盖。
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公开(公告)号:US08049887B2
公开(公告)日:2011-11-01
申请号:US12377314
申请日:2008-06-05
申请人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
CPC分类号: G01J3/2803 , G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/0286 , G01J3/0291 , G01J3/04
摘要: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of to the light detecting element 4 to transmit the light L1, L2.
摘要翻译: 光谱分析模块1设置有用于透射光L1,L2的主体部分2,用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a,光检测元件4,具有光检测部分41,用于检测由分光部分3分散和反射的光L2,并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充到光检测元件4的主体部分2侧的底部填充材料12以透射光L1,L2。
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公开(公告)号:US08045155B2
公开(公告)日:2011-10-25
申请号:US12377343
申请日:2008-06-05
申请人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/26
CPC分类号: G01J3/02 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/04
摘要: The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.
摘要翻译: 光谱模块设置有用于透射光的主体部分,用于将从主体部分的前平面入射的光分散到主体部分中以将光反射到前平面上的光谱部分,具有光检测的光检测元件 用于检测由分光部分分散和反射的光并通过面朝下接合与形成在主体部分的前平面上的布线电连接的光;以及填充在光检测元件的主体部分侧的底部填充材料, 光。 光检测元件设置有通向分光部分的光通过的通光孔,并且在光检测元件中的主体部分侧的后平面上形成储存部分,以便包围光出射 打开通光孔。
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公开(公告)号:US20100238439A1
公开(公告)日:2010-09-23
申请号:US12377314
申请日:2008-06-05
申请人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/02
CPC分类号: G01J3/2803 , G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/0286 , G01J3/0291 , G01J3/04
摘要: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a lisht detecting element 4 having a lisht detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the lisht detecting element 4 to transmit the light L1, L2. The lisht detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a raised portion 43 in a rectangular annular shape is formed on a rear plane 4a of the body portion 2 side in the lisht detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.
摘要翻译: 光谱分析模块1设置有用于透射光L1,L2的主体部分2,用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a,具有检测由分光部3分散和反射的光L2的检测部分41的电极检测元件4,并且通过面朝下的接合电连接到形成在主体部分2的前面2a上的布线9 以及填充在检测元件4的主体部2侧的底部填充材料12,以透过光L1,L2。 所述检测元件4设有通向所述分光部3的光L1通过的通光孔42,并且在所述主体部2侧的背面4a上形成矩形环状的隆起部43 在检测元件4中,封闭光通过孔42的光出射口42b。
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公开(公告)号:US20100214563A1
公开(公告)日:2010-08-26
申请号:US12377343
申请日:2008-06-05
申请人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Tomofumi Suzuki , Katsumi Shibayama , Takafumi Yokino , Masashi Ito , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/02
CPC分类号: G01J3/02 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/04
摘要: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a reservoir portion 43 is formed on a rear plane 4a of the body portion 2 side in the light detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.
摘要翻译: 光谱分析模块1设置有用于透射光L1,L2的主体部分2,用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a,光检测元件4,具有光检测部分41,用于检测由分光部分3分散和反射的光L2,并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充在光检测元件4的主体部分2侧的底部填充材料12以透射光L1,L2。 光检测元件4设置有通向分光部3的光L1通过的通光孔42,在光检测元件4的主体部2侧的背面4a上形成有储存部43 以便包围光通过孔42的光出射开口42b。
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公开(公告)号:US08045157B2
公开(公告)日:2011-10-25
申请号:US12377336
申请日:2008-06-05
申请人: Katsumi Shibayama , Helmut Teichmann , Takafumi Yokino , Tomofumi Suzuki , Dietmar Hiller , Ulrich Starker
发明人: Katsumi Shibayama , Helmut Teichmann , Takafumi Yokino , Tomofumi Suzuki , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/28
CPC分类号: G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0256 , G01J3/0259 , G01J3/0262 , G01J3/18 , G01J3/2803
摘要: Since a spectroscopic module (1) has a plate-shaped body section (2), the spectroscopic module can be reduced in size by reducing the thickness of the body section (2). Moreover, since the body section (2) is plate-shaped, the spectroscopic module (1) can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (3), diffraction layers (4), reflection layers (6) and light detecting elements (7) in a matrix form on a glass wafer which becomes many body sections (2) and dicing the glass wafer, many spectroscopic modules (1) can be manufactured. This enables easy mass production of spectroscopic modules (1).
摘要翻译: 由于分光模块(1)具有板状主体部(2),所以可以通过减小主体部(2)的厚度来减小分光模块的尺寸。 此外,由于主体部(2)是板状的,所以可以例如通过使用晶片工艺来制造分光模块(1)。 更具体地说,通过在成为许多主体部分(2)的玻璃晶片上提供矩阵形式的透镜部分(3),衍射层(4),反射层(6)和光检测元件(7),并将玻璃晶片 ,可以制造许多光谱模块(1)。 这使得能够容易地批量生产光谱模块(1)。
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公开(公告)号:US07961317B2
公开(公告)日:2011-06-14
申请号:US12377306
申请日:2008-06-10
申请人: Katsumi Shibayama , Takafumi Yokino , Tomofumi Suzuki , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Katsumi Shibayama , Takafumi Yokino , Tomofumi Suzuki , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
CPC分类号: G01J3/18 , G01J3/02 , G01J3/0205 , G01J3/0208 , G01J3/0237 , G01J3/0259 , G01J3/0291
摘要: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.
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公开(公告)号:US08045160B2
公开(公告)日:2011-10-25
申请号:US13086065
申请日:2011-04-13
申请人: Katsumi Shibayama , Takafumi Yokino , Tomofumi Suzuki , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Katsumi Shibayama , Takafumi Yokino , Tomofumi Suzuki , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
CPC分类号: G01J3/18 , G01J3/02 , G01J3/0205 , G01J3/0208 , G01J3/0237 , G01J3/0259 , G01J3/0291
摘要: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.
摘要翻译: 对准标记12a,12b,12c和12d形成在与衍射层8一体形成的周缘部分11的平面11a上,并且当透镜部分7安装到基板2上时,这些对准标记12a,12b ,12c和12d位于基板2上,从而使衍射层8相对于光检测元件4的光检测部分4a精确对准,例如不依赖于透镜的曲率半径的差异 特别地,对准标记12a,12b,12c和12d形成在平面11a上,由此,图像识别被精确地检测对准标记12a,12b,12c和12d的位置,从而可以 准确对齐。
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公开(公告)号:US08068224B2
公开(公告)日:2011-11-29
申请号:US12377325
申请日:2008-06-05
申请人: Katsumi Shibayama , Takafumi Yokino , Tomofumi Suzuki , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
发明人: Katsumi Shibayama , Takafumi Yokino , Tomofumi Suzuki , Helmut Teichmann , Dietmar Hiller , Ulrich Starker
IPC分类号: G01J3/28
CPC分类号: G01J3/04 , G01J3/02 , G01J3/0202 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/0291 , G01J3/18 , G01J3/2803
摘要: In the spectroscopy module 1, a light absorbing layer 6 having a light-passing hole 6a through which light L1 advancing into a spectroscopic portion 3 passes and a light-passing hole 6b through which light L2 advancing into a light detecting portion 4a of a light detecting element 4 passes is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing hole 6a and the light-passing hole 6b. Further, since the occurrence of stray light is suppressed by the light absorbing layer 6 and the stray light is absorbed, the light detecting portion 4a of the light detecting element 4 can be suppressed from being made incident. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.
摘要翻译: 在光谱模块1中,具有通过光入射到分光部3的光L1通过的光通过孔6a的光吸收层6和通过光进入光的光检测部4a的光通过孔6b 检测元件4通过图案化一体地形成。 因此,可以防止通光孔6a和通光孔6b之间的相对位置关系的偏差。 此外,由于光吸收层6抑制了杂散光的发生,并且杂散光被吸收,所以能够抑制光检测元件4的光检测部4a的入射。 因此,根据光谱模块1,可以提高可靠性。
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