公开(公告)号：US08050370B2

公开(公告)日：2011-11-01

申请号：US12270394

申请日：2008-11-13

申请人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

发明人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

IPC分类号： H04B1/10

CPC分类号： H04B1/123

摘要： A digital signal receiving apparatus includes a detection-judging portion having a first smoothing filter generating a first smoothed signal by smoothing an auto-correlation signal and judging a possible presence of a desired signal when a signal level of the first smoothed signal is greater than a reference level and an absence of the desired signal when being smaller than the reference level. The smoothing filter includes a limiting portion limiting a fluctuation width of the first smoothed signal; and an adjusting portion configured to adjust the fluctuation width of the first smoothed signal limited by the limiting portion to be reduced while an elapsing time after the detection-judging means judges the possible presence of the desired signal is increasing.

摘要翻译： 一种数字信号接收装置，包括具有第一平滑滤波器的检测判断部分，该第一平滑滤波器通过平滑自相关信号产生第一平滑信号，并且当第一平滑信号的信号电平大于一个信号时判断期望信号的可能存在 参考电平和当小于参考电平时缺少所需信号。 平滑滤波器包括限制第一平滑信号的波动宽度的限制部分; 以及调整部，其被配置为在检测判断装置判断出所需信号的可能存在之后的经过时间时，调整受限制部分限制的第一平滑信号的波动宽度的减小。

公开(公告)号：US20090129510A1

公开(公告)日：2009-05-21

申请号：US12270416

申请日：2008-11-13

申请人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

发明人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

IPC分类号： H04L27/14 ,  H04B1/10

CPC分类号： H04B1/123 ,  H04L27/14

摘要： A frequency shift keying digital signal receiving apparatus includes a detecting portion detecting a new signal on the basis of a signal, from which a correlated ambient noise is filtered out by an adaptive filter, a holding portion holding a first electric power for the signal received before a new signal is detected, a calculating portion calculating a second electric power for the signal received after the new signal is detected, a comparing portion comparing levels of the first and second electric powers, a selector selecting the signal, from which the correlated ambient noise is filtered out, when the first electric power is higher than the second electric power and selecting the signal bypassing the adaptive filter when the first electric power is lower than the second electric power, and a demodulating portion demodulating a desired signal on the basis of the signal selected by the selecting portion.

摘要翻译： 频移键控数字信号接收装置包括：检测部，其基于由自适应滤波器滤除相关的环境噪声的信号，检测新信号;保持部，其对于接收到的信号之前保持第一电力 检测到新的信号，计算部分，对于检测到新信号之后接收到的信号计算第二电力，比较部分，比较第一和第二电力的电平;选择器，选择信号，相关环境噪声 被滤出，当第一电力高于第二电力时，并且当第一电力低于第二电力时选择旁路自适应滤波器的信号，以及解调部分，基于 信号由选择部分选择。

公开(公告)号：US08155242B2

公开(公告)日：2012-04-10

申请号：US12270416

申请日：2008-11-13

申请人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

发明人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

IPC分类号： H03D3/00

CPC分类号： H04B1/123 ,  H04L27/14

摘要： A frequency shift keying digital signal receiving apparatus includes a detecting portion detecting a new signal on the basis of a signal, from which a correlated ambient noise is filtered out by an adaptive filter, a holding portion holding a first electric power for the signal received before a new signal is detected, a calculating portion calculating a second electric power for the signal received after the new signal is detected, a comparing portion comparing levels of the first and second electric powers, a selector selecting the signal, from which the correlated ambient noise is filtered out, when the first electric power is higher than the second electric power and selecting the signal bypassing the adaptive filter when the first electric power is lower than the second electric power, and a demodulating portion demodulating a desired signal on the basis of the signal selected by the selecting portion.

摘要翻译： 频移键控数字信号接收装置包括：检测部，其基于由自适应滤波器滤除相关的环境噪声的信号，检测新信号;保持部，其对于接收到的信号之前保持第一电力 检测到新的信号，计算部分，对于检测到新信号之后接收到的信号计算第二电力，比较部分，比较第一和第二电力的电平;选择器，选择信号，相关环境噪声 被滤出，当第一电力高于第二电力时，并且当第一电力低于第二电力时选择旁路自适应滤波器的信号，以及解调部分，基于 信号由选择部分选择。

公开(公告)号：US08050364B2

公开(公告)日：2011-11-01

申请号：US12270453

申请日：2008-11-13

申请人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

发明人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

IPC分类号： H04L27/06

CPC分类号： H04B1/123

摘要： A digital signal receiving apparatus includes: detection-judging portion judging a possible presence of a desired signal when a signal level of a smoothed signal is greater than a reference level; wherein said first smoothed signal and said second smoothed signal are compared in order to generate a detection signal representing a judgment of a possible presence of a desired signal, said second smoothed signal having a convergence speed slower than that of the first smoothing filter, a filter controlling portion switching an adaptive filter from an adaptive mode to a non-adaptive mode when the detection-judging portion judges the possible presence of the desired signal and switching from the non-adaptive mode to the adaptive mode when the detection-judging portion judges the absence of the desired signal; a limiting portion limiting a signal level of an auto-correlation signal to the signal level of the smoothed signal; and a demodulating portion demodulating the auto-correlation signal having the signal level limited by the limiting means so as to generate a demodulated signal, wherein the input to the demodulator is limited to the level of a smoothed signal, said smoothed signal being generated from the input of the detection judging portion.

摘要翻译： 数字信号接收装置包括：检测判断部分，当平滑信号的信号电平大于参考电平时，判断可能存在的期望信号; 其中所述第一平滑信号和所述第二平滑信号被比较以产生表示对所需信号的可能存在的判断的检测信号，所述第二平滑信号的收敛速度比第一平滑滤波器的收敛速度慢;滤波器 当检测判断部分判断出所需信号的可能存在并且从非自适应模式切换到自适应模式时，控制部分将自适应滤波器从自适应模式切换到非自适应模式 没有所需信号; 限制部分，将自相关信号的信号电平限制到平滑信号的信号电平; 以及解调部分，对具有由限制装置限制的信号电平的自相关信号进行解调，以产生解调信号，其中将解调器的输入限制为平滑信号的电平，所述平滑信号从 检测判断部分的输入。

公开(公告)号：US20090129523A1

公开(公告)日：2009-05-21

申请号：US12270394

申请日：2008-11-13

申请人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

发明人： Tomohiro Yamamoto ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

IPC分类号： H04B1/10

CPC分类号： H04B1/123

摘要： A digital signal receiving apparatus includes a detection-judging portion having a first smoothing filter generating a first smoothed signal by smoothing an auto-correlation signal and judging a possible presence of a desired signal when a signal level of the first smoothed signal is greater than a reference level and an absence of the desired signal when being smaller than the reference level. The smoothing filter includes a limiting portion limiting a fluctuation width of the first smoothed signal; and an adjusting portion configured to adjust the fluctuation width of the first smoothed signal limited by the limiting portion to be reduced while an elapsing time after the detection-judging means judges the possible presence of the desired signal is increasing.

摘要翻译： 一种数字信号接收装置，包括具有第一平滑滤波器的检测判断部分，该第一平滑滤波器通过平滑自相关信号产生第一平滑信号，并且当第一平滑信号的信号电平大于一个信号时判断期望信号的可能存在 参考电平和当小于参考电平时缺少所需信号。 平滑滤波器包括限制第一平滑信号的波动宽度的限制部分; 以及调整部，其被配置为在检测判断装置判断出所需信号的可能存在之后的经过时间时，调整受限制部分限制的第一平滑信号的波动宽度的减小。

公开(公告)号：US20090129520A1

公开(公告)日：2009-05-21

申请号：US12270453

申请日：2008-11-13

申请人： Tomohiro YAMAMOTO ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

发明人： Tomohiro YAMAMOTO ,  Akira Furuhashi ,  Takahiro Horie ,  Yuichi Murakami ,  Kazunori Ono ,  Frederic Coutant ,  Tarik Aouine

IPC分类号： H04B1/10

CPC分类号： H04B1/123

摘要： A digital signal receiving apparatus includes: detection-judging portion judging a possible presence of a desired signal when a signal level of a smoothed signal is greater than a reference level; wherein said first smoothed signal and said second smoothed signal are compared in order to generate a detection signal representing a judgment of a possible presence of a desired signal, said second smoothed signal having a convergence speed slower than that of the first smoothing filter, a filter controlling portion switching an adaptive filter from an adaptive mode to a non-adaptive mode when the detection-judging portion judges the possible presence of the desired signal and switching from the non-adaptive mode to the adaptive mode when the detection-judging portion judges the absence of the desired signal; a limiting portion limiting a signal level of an auto-correlation signal to the signal level of the smoothed signal; and a demodulating portion demodulating the auto-correlation signal having the signal level limited by the limiting means so as to generate a demodulated signal, wherein the input to the demodulator is limited to the level of a smoothed signal, said smoothed signal being generated from the input of the detection judging portion.

摘要翻译： 数字信号接收装置包括：检测判断部分，当平滑信号的信号电平大于参考电平时，判断可能存在的期望信号; 其中所述第一平滑信号和所述第二平滑信号被比较以产生表示对所需信号的可能存在的判断的检测信号，所述第二平滑信号的收敛速度比第一平滑滤波器的收敛速度慢;滤波器 当检测判断部分判断出所需信号的可能存在并且从非自适应模式切换到自适应模式时，控制部分将自适应滤波器从自适应模式切换到非自适应模式 没有所需信号; 限制部分，将自相关信号的信号电平限制到平滑信号的信号电平; 以及解调部分，对具有由限制装置限制的信号电平的自相关信号进行解调，以产生解调信号，其中将解调器的输入限制为平滑信号的电平，所述平滑信号从 检测判断部分的输入。

公开(公告)号：US20050058232A1

公开(公告)日：2005-03-17

申请号：US10937773

申请日：2004-09-10

申请人： Yuichi Murakami ,  Tomohiro Yamamoto ,  Akira Furuhashi ,  Kazunori Ono ,  Hiroki Okada

发明人： Yuichi Murakami ,  Tomohiro Yamamoto ,  Akira Furuhashi ,  Kazunori Ono ,  Hiroki Okada

IPC分类号： H04L27/01 ,  H04B1/10 ,  H04L25/03

CPC分类号： B60R25/24 ,  B60R25/2072 ,  H04L2025/03394 ,  H04L2025/03496

摘要： A digital receiving device includes a detecting means for detecting a specific code under a signal receiving state capable of successively receiving a desired signal, a setting means for setting a period for detecting the specific code as a non-communication state period, an adaptive filter having an adaptive mode and a non-adaptive mode, the adaptive mode by which a filter coefficient is sequentially updated so as to remove an ambient noise during the non-communication state period, and the non-adaptive mode by which the filter coefficient is stopped from being updated during a period except for the non-communication state period under the signal receiving state and a filter controlling means for controlling an operation for switching the adaptive mode and the non-adaptive mode of the adaptive filter.

摘要翻译： 数字接收装置包括检测装置，用于检测能够连续接收所需信号的信号接收状态下的特定码;设定装置，用于将用于检测特定码的周期设置为非通信状态周期;自适应滤波器，具有 自适应模式和非自适应模式，顺序地更新滤波器系数以在非通信状态期间去除环境噪声的自适应模式以及滤波器系数停止的非自适应模式 在除了信号接收状态之前的非通信状态期间的周期期间进行更新，以及滤波器控制装置，用于控制用于切换自适应滤波器的自适应模式和非自适应模式的操作。

公开(公告)号：US07327813B2

公开(公告)日：2008-02-05

申请号：US10937773

申请日：2004-09-10

申请人： Yuichi Murakami ,  Tomohiro Yamamoto ,  Akira Furuhashi ,  Kazunori Ono ,  Hiroki Okada

发明人： Yuichi Murakami ,  Tomohiro Yamamoto ,  Akira Furuhashi ,  Kazunori Ono ,  Hiroki Okada

IPC分类号： H04B1/10

CPC分类号： B60R25/24 ,  B60R25/2072 ,  H04L2025/03394 ,  H04L2025/03496

摘要： A digital receiving device includes a detecting means for detecting a specific code under a signal receiving state capable of successively receiving a desired signal, a setting means for setting a period for detecting the specific code as a non-communication state period, an adaptive filter having an adaptive mode and a non-adaptive mode, the adaptive mode by which a filter coefficient is sequentially updated so as to remove an ambient noise during the non-communication state period, and the non-adaptive mode by which the filter coefficient is stopped from being updated during a period except for the non-communication state period under the signal receiving state and a filter controlling means for controlling an operation for switching the adaptive mode and the non-adaptive mode of the adaptive filter.

摘要翻译： 数字接收装置包括检测装置，用于检测能够连续接收所需信号的信号接收状态下的特定码;设定装置，用于将用于检测特定码的周期设置为非通信状态周期;自适应滤波器，具有 自适应模式和非自适应模式，顺序地更新滤波器系数以在非通信状态期间去除环境噪声的自适应模式以及滤波器系数停止的非自适应模式 在除了信号接收状态之前的非通信状态期间的周期期间进行更新，以及滤波器控制装置，用于控制用于切换自适应滤波器的自适应模式和非自适应模式的操作。

公开(公告)号：US08221941B2

公开(公告)日：2012-07-17

申请号：US12647808

申请日：2009-12-28

申请人： Toshiyuki Suzuki ,  Masahiro Hashimoto ,  Kazunori Ono ,  Ryo Ohkubo ,  Kazuya Sakai

发明人： Toshiyuki Suzuki ,  Masahiro Hashimoto ,  Kazunori Ono ,  Ryo Ohkubo ,  Kazuya Sakai

IPC分类号： G03F1/22

CPC分类号： G03F1/32

摘要： A thin film made of a material containing a metal and silicon is formed on a light-transmissive substrate. Then, a treatment is performed to modify a main surface of the thin film in advance so that when exposure light having a wavelength of 200 nm or less is accumulatively irradiated on a thin film pattern of a photomask to be produced by patterning the thin film, the transfer characteristic of the thin film pattern does not change more than a predetermined degree. This treatment is performed by carrying out, for example, a heat treatment in an atmosphere containing oxygen at 450° C. to 900° C.

摘要翻译： 在透光性基板上形成由含有金属和硅的材料构成的薄膜。 然后，进行处理以预先修改薄膜的主表面，使得当将具有200nm或更小的波长的曝光光累积地照射到通过对薄膜进行图案化而制造的光掩模的薄膜图案上时， 薄膜图案的转印特性不会超过预定的程度。 该处理通过例如在450℃〜900℃的含氧气氛中进行热处理来进行。

公开(公告)号：US08785086B2

公开(公告)日：2014-07-22

申请号：US13812627

申请日：2011-07-29

申请人： Masahiro Hashimoto ,  Kazunori Ono ,  Kenta Tsukagoshi ,  Tooru Fukui

发明人： Masahiro Hashimoto ,  Kazunori Ono ,  Kenta Tsukagoshi ,  Tooru Fukui

IPC分类号： G03F1/24

CPC分类号： G03F1/24 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/78 ,  Y10S430/143

摘要： To solve a problem of reduction in accumulated energy due to backward scattering, leading to degradation in CD linearity, which is caused when a generally used high-contrast resist is used in the manufacture of a reflective mask. A reflective mask blank for manufacturing a reflective mask includes a substrate, a multilayer reflective film which is formed on the substrate and adapted to reflect exposure light, and an absorber film which is formed on the multilayer reflective film and adapted to absorb the exposure light. A resist film for electron beam writing is formed on the absorber film and the contrast value γ of the resist film for electron beam writing is 30 or less.

摘要翻译： 为了解决由于反向散射引起的累积能量的降低的问题，导致当在通常使用的高对比度抗蚀剂用于制造反射掩模时引起的CD线性的降低。 用于制造反射掩模的反射掩模坯料包括基板，形成在基板上并适于反射曝光光的多层反射膜，以及形成在多层反射膜上并适于吸收曝光光的吸收膜。 在吸收膜上形成用于电子束写入的抗蚀剂膜，并且用于电子束写入的抗蚀剂膜的对比度值γ为30或更小。