公开(公告)号：US06884359B2

公开(公告)日：2005-04-26

申请号：US09960727

申请日：2001-09-24

申请人： Toshio Kambe ,  Kazunari Sakai ,  Kazumi Oi ,  Koji Kawase

发明人： Toshio Kambe ,  Kazunari Sakai ,  Kazumi Oi ,  Koji Kawase

IPC分类号： C02F1/68 ,  B01D61/00 ,  B01F3/04 ,  B01F5/04 ,  C02F1/44 ,  C02F1/00

CPC分类号： B01F3/0446 ,  B01D61/00 ,  B01F5/0453 ,  C02F1/44 ,  C02F2103/04 ,  Y10S210/90

摘要： An apparatus for controlling the resistivity of ultra pure water, including a housing to house a gas permeable membrane, an inlet for untreated ultra pure water which communicates with an ultra pure water path, and an outlet for resistivity-controlled ultra pure water which communicates with the ultra pure water path. The gas permeable membrane divides the interior of the housing into the ultra pure water path and a mixed gas path. A mixed gas is selected from the group consisting of a mixed gas including carbon dioxide and a gas having a lower resistivity controlling ability than carbon dioxide and a mixed gas including ammonia and a gas having a lower resistivity controlling ability than ammonia. The gas permeable membrane is capable of supplying carbon dioxide or ammonia to the untreated ultra pure water at a concentration equal to or more than 90% of the equilibrium concentration.

摘要翻译： 一种用于控制超纯水的电阻率的装置，包括容纳透气膜的壳体，用于与超纯水路连通的未处理超纯水的入口，以及与电阻率控制的超纯水的出口，其与 超纯水道。 气体渗透膜将壳体的内部分成超纯水路径和混合气体路径。 混合气体选自包含二氧化碳的混合气体和具有比二氧化碳更低的电阻率控制能力的气体，以及包含氨和具有比氨低的电阻率控制能力的气体的混合气体。 透气膜能够以等于或大于平衡浓度的90％的浓度向未处理的超纯水中供应二氧化碳或氨。

公开(公告)号：US6158721A

公开(公告)日：2000-12-12

申请号：US195993

申请日：1998-11-20

申请人： Hitoshi Katou ,  Kazunari Sakai ,  Toshio Kambe ,  Kazumi Oi

发明人： Hitoshi Katou ,  Kazunari Sakai ,  Toshio Kambe ,  Kazumi Oi

IPC分类号： B01D53/22 ,  B01D63/02 ,  B01D69/02 ,  B01F1/00 ,  B01F3/04 ,  B01F5/04 ,  C01B5/00

CPC分类号： B01F3/0446 ,  B01F3/04241 ,  B01F5/0476 ,  B01F5/0498 ,  B01F2003/0439 ,  B01F2003/04404 ,  B01F2003/04858 ,  B01F2003/04893 ,  Y10S261/07

摘要： A small flow of a water with a high carbon dioxide content (normally a carbon-dioxide-saturated water) is produced using hollow-fiber membranes, and is uniformly mixed with a large flow of untreated water with constant proportions. Since the hollow-fiber membrane module has a reserve capacity for adding carbon dioxide to the water, the resistivity of the mixed water is maintained at a constant level by maintaining constant proportions of the small and large flows, even if the total flow rate fluctuates due to fluctuations in the rate of water used in a subsequent process. Accordingly, no automated control device is particularly necessary in order to maintain the resistivity at a constant level. Therefore, a compact and simple apparatus can be produced which can operate at a low cost.

摘要翻译： 使用中空纤维膜制造二氧化碳含量高的水（通常为二氧化碳饱和水）的小流量，并与大量未经处理的水以恒定比例均匀混合。 由于中空纤维膜组件具有用于向水中添加二氧化碳的储备能力，所以通过保持小流量和大流量的恒定比例，即使总流量波动，混合水的电阻率也保持在一定水平 在随后的过程中使用的水的波动。 因此，为了将电阻率保持在恒定水平，不需要自动控制装置。 因此，可以制造能够以低成本运行的紧凑简单的装置。