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    Polishing method and fabrication method of thin film magnetic head
    1.
    发明授权
    Polishing method and fabrication method of thin film magnetic head 有权
    薄膜磁头抛光方法及其制造方法

    公开(公告)号：US06340558B1

    公开(公告)日：2002-01-22

    申请号：US09450773

    申请日：1999-11-30

    申请人： Toshio Kubota ,  Masumi Sugawara ,  Takehiro Horinaka ,  Fujimi Kimura

    发明人： Toshio Kubota ,  Masumi Sugawara ,  Takehiro Horinaka ,  Fujimi Kimura

    IPC分类号： B24B3700

    CPC分类号： G11B5/3163 ,  B24B37/048 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49048

    摘要： This invention relates to a polishing method for polishing a surface of a material to be polished and a fabrication method of a thin film magnetic head having a planarization process for planarizing the surface of the material to be polished by polishing, and an object thereof is to reduce variations of a residual film thickness on the surface of a material to be polished after polishing. An insulating film 14 is formed on an AlTiC substrate 12 and a bottom shielding layer 16 is formed thereover. After forming a coating layer 18 and etching a mask layer 22 as an etching mask, a protruding portion of the coating layer 18 at the bottom of the opening of the mask layer 22 is removed by a desired thickness. Since a protruding portion of the coating layer 18 on the periphery of the opening of the mask layer is suitably undercut, the protruding portion is shaved, thereby obtaining the coating layer 18 which is planarized as a whole.

    摘要翻译： 本发明涉及一种抛光抛光材料表面的抛光方法和一种具有用于通过抛光使待抛光材料的表面平坦化的平面化处理的薄膜磁头的制造方法，其目的是 减少研磨后的被研磨材料的表面的残留膜厚的变化。 在AlTiC基板12上形成绝缘膜14，在其上形成底部屏蔽层16。 在形成涂层18并蚀刻作为蚀刻掩模的掩模层22之后，将掩模层22的开口底部的涂层18的突出部分去除期望的厚度。 由于掩模层的开口周围的涂层18的突出部分被适当地切割，所以突出部分被刮削，从而获得整体平坦化的涂层18。

    Film thickness measuring method, polishing method, fabrication method of thin film magnetic head and substrate for forming the thin film magnetic head
    2.
    发明授权
    Film thickness measuring method, polishing method, fabrication method of thin film magnetic head and substrate for forming the thin film magnetic head 有权
    膜厚度测量方法，抛光方法，薄膜磁头的制造方法以及用于形成薄膜磁头的基板

    公开(公告)号：US06475062B1

    公开(公告)日：2002-11-05

    申请号：US09459653

    申请日：1999-12-13

    申请人： Toshio Kubota ,  Masumi Sugawara ,  Takehiro Horinaka

    发明人： Toshio Kubota ,  Masumi Sugawara ,  Takehiro Horinaka

    IPC分类号： B24B4900

    CPC分类号： G11B5/3166 ,  B24B37/013 ,  B24B37/042 ,  B24B49/12 ,  G11B5/3116 ,  G11B5/3163

    摘要： The present invention relates to a film thickness measuring method measuring a film thickness of an element formation layer formed on a substrate and its object is to provide a film thickness measuring method which can measure a residual film thickness of a polishing object film in a polishing process at a high accuracy. In a fabrication method of a thin film magnetic head, alumina is coated over a dummy layer 54 and a bottom shielding layer 16 after forming the dummy layer 54 along with the bottom shielding layer 16 and a planarized layer 24 is formed by polishing the surface thereof using a CMP. Next, after forming a top shielding layer 32 over the bottom shielding layer 16, a planarized layer 38 is form by embedding alumina. A film thickness of an embedded 38 on the dummy layer 54 is measured by a non-contact optical film thickness measuring equipment and a film thickness of the top shielding layer 32 is measured based on the film thickness.

    摘要翻译： 本发明涉及测量形成在基板上的元件形成层的膜厚度的膜厚度测量方法，其目的是提供一种可以在抛光过程中测量抛光对象膜的残留膜厚度的膜厚度测量方法 以高精度。 在薄膜磁头的制造方法中，在与底部屏蔽层16一起形成虚设层54之后，将氧化铝涂覆在虚设层54和底部屏蔽层16上，并且通过抛光其表面形成平坦化层24 使用CMP。 接下来，在底部屏蔽层16上形成顶部屏蔽层32之后，通过包埋氧化铝形成平坦化层38。 通过非接触式光学膜厚度测量装置测量虚拟层54上的嵌入层38的膜厚度，并且基于膜厚度测量顶部屏蔽层32的膜厚度。

    Thin-film magnetic head structure adapted to manufacture a thin-film head having a base magnetic pole part, a york magnetic pole part, and an intervening insulative film
    4.
    发明授权
    Thin-film magnetic head structure adapted to manufacture a thin-film head having a base magnetic pole part, a york magnetic pole part, and an intervening insulative film 有权
    薄膜磁头结构适于制造具有基极磁极部分，约克磁极部分和中间绝缘膜的薄膜头

    公开(公告)号：US07910160B2

    公开(公告)日：2011-03-22

    申请号：US12219041

    申请日：2008-07-15

    申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： G11B5/127 ,  G11B5/33 ,  H01F27/02

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/313 ,  Y10T29/49032 ,  Y10T428/11

    摘要： A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer includes a base magnetic pole part comprising the magnetic pole end part and a base depression distanced farther from the medium-opposing surface than the magnetic pole end part, and an embedded magnetic pole part buried in the base depression and joined to the base magnetic pole part. The thin-film magnetic head structure includes a yoke magnetic pole part joined to the base magnetic pole part and embedded magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer, and an intervening insulative film disposed between the embedded magnetic pole part and yoke magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer.

    摘要翻译： 薄膜磁头结构具有适于制造薄膜磁头的结构，该薄膜磁头被构造成使得包括在与记录介质相对的介质相对表面侧的磁极端部的主磁极层，写入屏蔽 层，以在介质相对表面侧上形成记录间隙层，并且缠绕在写入屏蔽层或主磁极层上的薄膜线圈层叠。 主磁极层包括基极磁极部分，该基极磁极部分包括磁极端部和距中间相对表面远离磁极端部的基座凹部，以及埋入基座凹部中的嵌入式磁极部， 基极磁极部分。 薄膜磁头结构包括：与记录间隙层相比离开与介质相对表面更远的位置处连接到基极磁极部分和嵌入式磁极部分的轭磁极部分，以及设置在介质相对表面之间的中间绝缘膜 嵌入式磁极部和轭磁极部位于比记录间隙层远离介质相对面的位置。

    Perpendicular magnetic recording head with nonmagnetic metal layer even with top face of pole layer
    5.
    发明授权
    Perpendicular magnetic recording head with nonmagnetic metal layer even with top face of pole layer 有权
    具有非磁性金属层的垂直磁记录头，甚至具有极层的顶面

    公开(公告)号：US07843665B2

    公开(公告)日：2010-11-30

    申请号：US11518210

    申请日：2006-09-11

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Takehiro Horinaka ,  Hironori Araki ,  Tatsushi Shimizu ,  Tatsuya Shimizu

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Takehiro Horinaka ,  Hironori Araki ,  Tatsushi Shimizu ,  Tatsuya Shimizu

    IPC分类号： G11B5/31

    CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49046

    摘要： A magnetic head including an encasing layer having a groove; a nonmagnetic metal layer that has a sidewall located directly above the edge of the groove and that is disposed on a region of the encasing layer away from the medium facing surface; two side shield layers that have sidewalls located directly above the edge of the groove and that are disposed adjacent to the nonmagnetic metal layer on regions of the encasing layer closer to the medium facing surface than the nonmagnetic metal layer; and a pole layer. The pole layer is placed in an encasing section formed of the groove of the encasing layer, the sidewall of the nonmagnetic metal layer, and the sidewalls of the two side shield layers.

    摘要翻译： 一种磁头，包括具有槽的封装层; 非磁性金属层，其具有位于所述槽的边缘正上方的侧壁，并且所述侧壁设置在所述封装层的远离所述介质面向表面的区域上; 两个侧面屏蔽层，其具有位于所述凹槽边缘正上方的侧壁，并且在所述封装层的与所述非磁性金属层相比更靠近介质面向表面的区域上邻近所述非磁性金属层设置; 和极层。 极层被放置在由包装层的槽，非磁性金属层的侧壁和两个侧面屏蔽层的侧壁形成的包围部分中。

    Magnetic head for perpendicular magnetic recording with encasing layer
    7.
    发明授权
    Magnetic head for perpendicular magnetic recording with encasing layer 有权
    磁头，用于垂直磁记录与封装层

    公开(公告)号：US07663839B2

    公开(公告)日：2010-02-16

    申请号：US11129377

    申请日：2005-05-16

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Takehiro Horinaka ,  Kazuo Ishizaki

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Takehiro Horinaka ,  Kazuo Ishizaki

    IPC分类号： G11B5/31 ,  G11B5/39

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3169

    摘要： A pole layer has: a first portion having an end face located in a medium facing surface; and a second portion that is located farther from the medium facing surface than the first portion and has a thickness greater than that of the first portion. A surface of the first portion farther from a substrate is located closer to the substrate than a surface of the second portion farther from the substrate. The second portion has a front end face that couples the surface of the first portion farther from the substrate to the surface of the second portion farther from the substrate. A shield layer has a portion located between the front end face and the medium facing surface in a region closer to the substrate than the surface of the second portion farther from the substrate.

    摘要翻译： 极层具有：第一部分，其具有位于介质面向表面中的端面; 以及比所述第一部分位于比所述介质相对表面更远的第二部分，并且具有大于所述第一部分的厚度的厚度。 距离基板更远的第一部分的表面比距离基板更远的第二部分的表面更靠近基板。 第二部分具有前端面，该前端面将第一部分的表面从基板延伸到距离基板更远的第二部分的表面。 屏蔽层在距离基板的第二部分的表面更靠近基板的区域中具有位于前端面和介质对向表面之间的部分。

    Method of manufacturing a thin-film magnetic head
    10.
    发明授权
    Method of manufacturing a thin-film magnetic head 有权
    制造薄膜磁头的方法

    公开(公告)号：US07721415B2

    公开(公告)日：2010-05-25

    申请号：US11406268

    申请日：2006-04-19

    申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Horinaka ,  Takehiro Kamigama ,  Tatsushi Shimizu

    发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Horinaka ,  Takehiro Kamigama ,  Tatsushi Shimizu

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3123 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.

    摘要翻译： 如下制造薄膜磁头。 首先，形成具有凹陷形成为与主磁极层对应的形状的磁极形成凹部的基底绝缘层，形成用于填充磁极形成凹部的用于CMP的停止膜，然后形成磁性层 在停止电影。 接下来，通过在其外侧形成基本上围绕磁极形成凹部的分离槽来分离磁性层，由此分离的磁性层形成有覆盖整个上表面的覆盖绝缘膜。 通过CMP抛光表面，直到停止膜露出，使得残留在磁极形成凹部内侧的磁性层的一部分被用作主磁极层。 此外，形成记录间隙层，写入屏蔽层和薄膜线圈。