公开(公告)号：US20110048563A1

公开(公告)日：2011-03-03

申请号：US12868121

申请日：2010-08-25

Applicant: Toshio NEGISHI ,  Tatsuhiko Koshida

Inventor： Toshio NEGISHI ,  Tatsuhiko Koshida

IPC: F16K11/065

CPC classification number: F16K17/38 ,  F16K1/42 ,  F16K13/10 ,  F16K25/00 ,  Y10T137/4643 ,  Y10T137/86879

Abstract: A switch valve having a long span of life is provided. The switch valve 70 of the present invention has a low-melting-point metal 76 having a surface on which a blocking member contacts, with the low-melting-point metal 76 melted, thereby a closed state appears in which an inner space of the switch valve 70 is split up into an inner space and an outer space of the blocking member 72. When the inner space and the outer space of the blocking member 72 are connected in the inner space of the switch valve 70, outside devices are blocked from each other in the closed state. The outside devices are connected to each other in an opened state in which the lower end of the blocking member 72 is spaced away from the low-melting-point metal 76.

Abstract translation: 提供寿命长的开关阀。 本发明的切换阀70具有低熔点金属76，该低熔点金属76具有阻挡部件接触的表面，低熔点金属76熔化，从而形成闭合状态，其中内部空间 切换阀70分成阻挡构件72的内部空间和外部空间。当阻挡构件72的内部空间和外部空间连接在开关阀70的内部空间中时，外部装置被阻挡 彼此处于关闭状态。 外部装置在打开状态彼此连接，其中阻挡构件72的下端与低熔点金属76间隔开。

公开(公告)号：US20100209609A1

公开(公告)日：2010-08-19

申请号：US12719216

申请日：2010-03-08

Applicant: Toshio NEGISHI ,  Tatsuhiko Koshida

Inventor： Toshio NEGISHI ,  Tatsuhiko Koshida

IPC: C23C16/455 ,  C23C16/04

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/228 ,  H01L51/0011

Abstract: A technology for organic material vapor deposition is provided, which can enhance efficiency in the evaporation material, prevent time-degradation of the evaporation material, and surely prevent any mask deformation by heat during vapor deposition. An organic material evaporation source including: a shower-plate shape emission part having a plurality of emission orifices arranged within a plane thereof; a feeding pipe provided inside the emission part for feeding the vapor of introduced organic evaporation material into the emission part via the blowout orifices by emitting the vapor toward the bottom part of the emission part; and a cooling means provided at least in a position on the emission orifice side of the emission part. The cooling means is formed by, for example, covering the entire emission part, and has vapor passage holes for allowing the organic evaporation material vapor to pass in positions corresponding to the emission orifice of the emission part.

Abstract translation: 提供了一种用于有机材料气相沉积的技术，其可以提高蒸发材料的效率，防止蒸发材料的时间劣化，并且可以确保在气相沉积期间通过热量的任何掩模变形。 一种有机材料蒸发源，包括：喷淋板形状发射部分，其具有布置在其平面内的多个排放孔; 设置在所述排出部内的供给管，用于经由所述吹出孔将引入的有机蒸发材料的蒸气向所述排出部的底部排出， 以及至少设置在排放部的排出口侧的位置的冷却装置。 冷却装置例如通过覆盖整个发射部分而形成，并且具有用于允许有机蒸发材料蒸气在与排放部分的排放孔对应的位置中通过的蒸气通过孔。

公开(公告)号：US20100176391A1

公开(公告)日：2010-07-15

申请号：US12731385

申请日：2010-03-25

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5092 ,  H01L51/5234 ,  H01L2251/5315

Abstract: A dense cathode electrode layer having a step coverage is to be formed on an electron injection layer. The electron injection layer in which fine particles of an electron injection material is dispersed in an organic thin film having an electron transport property is formed by vapor co-depositing the electron transport material and the electron injection material; and a cathode electrode layer made of an alloy layer of MgAg is formed by a sputtering method. Since lower portions of the fine particles of the electron injection material dispersed in the surface of the organic thin film are buried in the organic thin film, the electron injection particles are not peeled off even if sputtering particles collide with the electron injection particles, and the upper portions are in contact with the cathode electrode layer formed by sputtering particles.

Abstract translation: 在电子注入层上形成具有台阶覆盖层的致密的阴极电极层。 通过气相共沉积电子传输材料和电子注入材料形成电子注入材料的细颗粒分散在具有电子传输性的有机薄膜中的电子注入层; 并且通过溅射法形成由MgAg的合金层制成的阴极电极层。 由于分散在有机薄膜表面的电子注入材料的细颗粒的下部被埋在有机薄膜中，所以即使溅射颗粒与电子注入颗粒碰撞也不会剥离电子注入颗粒，并且 上部与由溅射颗粒形成的阴极电极层接触。

公开(公告)号：US20100013385A1

公开(公告)日：2010-01-21

申请号：US12544665

申请日：2009-08-20

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: H01J1/62 ,  B05C11/10 ,  C23C14/34 ,  B05D5/06 ,  C23C16/513 ,  B32B38/00

CPC classification number: H01J1/70 ,  H01L27/3244 ,  H01L51/5246 ,  H01L51/5253 ,  H01L51/529 ,  Y10T156/10

Abstract: A display device free from a deterioration in luminescence efficiency is provided. In the display device of the present invention, since an inorganic film is formed after concave parts in which luminescence portions are positioned are filled with a filling film, no crack is formed in the inorganic film. Since the inorganic film is made of a material having high gas tightness and heat conductivity (such as, diamond-like carbon or AlN), water and oxygen will hardly penetrate the luminescence portions, and heat of the luminescence portions will be conducted to the inorganic film, so that the luminescence portions do not reach high temperatures. Further, since a gap between first and second panels is filled with a resin film, the atmosphere does not enter from the outside. Because the luminescence portions are free from damage from water, oxygen and heat, the display device of the present invention has a prolonged life.

Abstract translation: 提供了没有发光效率劣化的显示装置。 在本发明的显示装置中，由于在其中配置有发光部分的凹部填充有填充膜之后形成无机膜，所以在无机膜中不会形成裂纹。 由于无机膜由具有高气密性和导热性的材料（例如类金刚石碳或AlN）制成，所以水和氧几乎不会渗入发光部分，并且发光部分的热量将被传导到无机膜 膜，使得发光部分不达到高温。 此外，由于第一和第二面板之间的间隙填充有树脂膜，因此气氛不会从外部进入。 由于发光部分没有水，氧气和热量的损害，本发明的显示装置具有延长的使用寿命。

公开(公告)号：US20100170444A1

公开(公告)日：2010-07-08

申请号：US12716478

申请日：2010-03-03

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: C23C16/00

CPC classification number: C23C14/12 ,  C23C14/228 ,  C23C14/246

Abstract: A thin film having a uniform film thickness is formed without increasing the film deposition rate. When an organic material is supplied from a supply unit to an evaporation chamber and evaporated on an evaporation surface of an evaporation device, a heating filter provided in advance is heated, and a carrier gas is made to flow therein to be heated and is introduced into the evaporation chamber. Organic material vapor thus produced and the carrier gas are mixed; and the mixed gas is introduced into a discharger. Whereas a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure inside the discharger is raised by the carrier gas so that a viscous flow is formed. Thus, the mixed gas is filled in the discharger and uniformly discharged. It is preferable that the organic material be supplied by a small amount so as not to make the film deposition rate too high.

Abstract translation: 在不增加膜沉积速率的情况下形成具有均匀膜厚度的薄膜。 当将有机材料从供应单元供应到蒸发室并在蒸发装置的蒸发表面上蒸发时，预先设置的加热过滤器被加热，并使载气在其中流动以被加热并被引入 蒸发室。 由此产生的有机材料蒸汽和载气混合; 并将混合气体引入排放器。 尽管在仅将有机材料蒸气引入排放器的情况下在排放器中形成分子流，但是通过载气使排出器内部的压力升高，从而形成粘性流动。 因此，将混合气体填充到排出器中并均匀排出。 优选以少量的方式供给有机材料，以使成膜速度过高。

公开(公告)号：US20100015361A1

公开(公告)日：2010-01-21

申请号：US12547676

申请日：2009-08-26

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: C23C16/48 ,  C23C16/00 ,  C23C16/44

CPC classification number: C23C14/246 ,  C23C14/12 ,  H01L51/001

Abstract: A vapor deposition apparatus capable of forming an organic thin film having a good film quality is provided. The vapor deposition apparatus of the present invention possesses an evaporating chamber and a vapor deposition case; and the vapor deposition case is connected with the evaporating chamber by a small hole. Since a vapor deposition material is fed into the evaporating chamber based on an amount necessary for each substrate, a large amount of the vapor deposition material is not heated for a long time period. Since the vapor deposition material is evaporated in the evaporating chamber, no liquid drops reach a substrate even during bumping. When the vapor deposition material is evaporated by irradiation with a laser beam, the vapor deposition material can be less chemically denatured.

Abstract translation: 提供一种能够形成具有良好膜质量的有机薄膜的气相沉积设备。 本发明的蒸镀装置具有蒸发室和气相沉积壳体， 蒸镀箱通过小孔与蒸发室连接。 由于气相沉积材料基于每个基板所需的量被馈送到蒸发室中，所以大量的气相沉积材料不会被长时间加热。 由于气相沉积材料在蒸发室中蒸发，即使在碰撞期间也没有液滴到达基底。 当气相沉积材料通过用激光束照射而蒸发时，气相沉积材料可以较少化学变性。

公开(公告)号：US20100015324A1

公开(公告)日：2010-01-21

申请号：US12567117

申请日：2009-09-25

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: C23C16/52 ,  C23C16/00

CPC classification number: C23C14/24 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246

Abstract: A vapor deposition apparatus capable of forming an organic thin film having a good film quality is provided. In the vapor deposition apparatus of the present invention, a tray is disposed in an evaporation chamber, and a feed device feeds a vapor deposition material onto the tray. The tray is placed on a mass meter, which measures the mass of the vapor deposition material disposed on the tray, and a controller compares the measured value with a reference value in order to make the feed device feed the vapor deposition material in a necessary amount. Since the vapor deposition material is replenished when needed, the vapor deposition material does not run short during the film formation, or a large amount of the vapor deposition material is not heated for a long time. Thus, the vapor deposition material does not change in quality.

Abstract translation: 提供一种能够形成具有良好膜质量的有机薄膜的气相沉积设备。 在本发明的蒸镀装置中，托盘配置在蒸发室内，进料装置将蒸镀材料送入托盘。 托盘被放置在质量计上，该质量计测量设置在托盘上的气相沉积材料的质量，并且控制器将测量值与参考值进行比较，以使进料装置将蒸镀材料进料到必需量 。 由于在需要时补充气相沉积材料，因此在成膜期间气相沉积材料不会短路，或大量的气相沉积材料长时间不加热。 因此，气相沉积材料的质量不变。

公开(公告)号：US20110008539A1

公开(公告)日：2011-01-13

申请号：US12855349

申请日：2010-08-12

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: C23C16/00

CPC classification number: C23C14/12 ,  B05D1/60 ,  C23C14/243 ,  H01L51/001

Abstract: An organic thin film having excellent film quality is formed. A vapor generator of the present invention has an evaporation chamber, a dispense head and a tank. A vapor deposition material is in the liquid state, stored in the tank, and fed to the dispense head from the tank. The dispense head dispenses the vapor deposition material fed inside thereof from a dispense orifice and disposes the vapor deposition material on a heating member inside the evaporation chamber. The dispense head accurately feeds the vapor deposition material by a required amount. Because only the required amount of the vapor deposition material is heated, an organic thin film excellent in film quality is formed without deterioration.

Abstract translation: 形成膜质优异的有机薄膜。 本发明的蒸汽发生器具有蒸发室，分配头和罐。 气相沉积材料处于液态，储存在罐中，并从罐中进给到分配头。 分配头从分配孔分配供给到其内部的蒸镀材料，并将蒸镀材料配置在蒸发室内的加热部件上。 分配头将蒸镀材料精确地供给所需量。 由于仅需要量的蒸镀材料被加热，所以形成膜质量优异的有机薄膜而不劣化。

公开(公告)号：US20100178424A1

公开(公告)日：2010-07-15

申请号：US12718398

申请日：2010-03-05

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: C23C16/455

CPC classification number: C23C14/246 ,  C23C14/12 ,  C23C14/228 ,  H01L51/001

Abstract: A thin film of a uniform film thickness is formed even without increasing the film deposition rate. The temperature of an evaporation device disposed in an evaporation chamber is raised in advance, and an organic material is dropped from a supply unit onto an evaporation surface of the evaporation device; and when the organic material is evaporated, a heated carrier gas is introduced into the evaporation chamber, and is mixed in the evaporation chamber and is introduced into a discharger. While a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure within the discharger is raised due to the carrier gas, so that a viscous flow is formed and the mixed gas is filled in the discharger and is uniformly discharged. The organic material may be supplied by a small amount and the film deposition rate may not become too high.

Abstract translation: 即使不增加膜沉积速率，也形成均匀膜厚的薄膜。 设置在蒸发室中的蒸发装置的温度预先升高，并且有机材料从供应单元落到蒸发装置的蒸发表面上; 并且当有机材料蒸发时，将加热的载气引入蒸发室，并在蒸发室中混合并引入到排放器中。 虽然在只有有机材料蒸气被引入排放器的情况下在排放器中形成分子流，但是由于载气，排出器内的压力升高，从而形成粘性流动并填充混合气体 在放电器中并均匀排出。 有机材料可以少量供应，并且成膜速度可能不会变得太高。

公开(公告)号：US20100170439A1

公开(公告)日：2010-07-08

申请号：US12718350

申请日：2010-03-05

Applicant: Toshio NEGISHI

Inventor： Toshio NEGISHI

IPC: C23C16/00

CPC classification number: C23C14/042 ,  C23C14/12 ,  C23C14/246 ,  C23C14/56 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/0029 ,  H01L51/56

Abstract: Contamination of organic EL device is prevented. After a colored layer of the first color is formed, a positioning device moves relatively a substrate and a mask inside the same vacuum chamber, and an opening of the mask is moved to a position above the region where a colored layer of the next color is to be formed. As a result, since the colored layers of two or more colors can be formed without changing the mask and the moving distance of the substrate during deposition becomes short, dust is not generated and contamination of the organic EL device is prevented.

Abstract translation: 防止有机EL装置的污染。 在形成第一颜色的着色层之后，定位装置相对于相同的真空室内的基板和掩模移动，并且将掩模的开口移动到下一个颜色的着色层的区域上方的位置 要形成 结果，由于可以在不改变掩模的情况下形成两种或更多种颜色的着色层，并且沉积期间基板的移动距离变短，所以不会产生灰尘，并且防止了有机EL器件的污染。