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公开(公告)号：US20160298228A1
公开(公告)日：2016-10-13
申请号：US15093883
申请日：2016-04-08
申请人： Tosoh SMD, Inc.
CPC分类号： C23C14/3414 , B22F3/14 , B22F2998/10 , C22C1/0433 , C22C33/02 , C22C38/00 , C22C2202/02 , C23C14/14 , H01F41/183 , H01J37/3429 , H01J37/3491 , B22F9/082 , B22F1/0003 , B22F3/15
摘要： Sputter targets and method of producing same having improved pass through flux (PTF). The targets may consist essentially of Fe—Co wherein the Co is predominantly hcp phase. The targets are prepared via powder precursors wherein at least the Co is made by a gas atomization process. This atomization process includes the steps of subjecting liquid Co to the action of dry argon gas and solidifying the liquid into small droplets. After the requisite powders have been sintered, they may be cold worked at temperatures of about 25-422° C.
摘要翻译： 溅射靶及其制造方法，具有改善的通过通量（PTF）。 目标基本上可以由Fe-Co组成，其中Co主要是hcp相。 目标通过粉末前体制备，其中至少Co通过气体雾化法制备。 这种雾化方法包括使液体Co受到干燥氩气的作用并将液体固化成小液滴的步骤。 在所需的粉末已经烧结之后，它们可以在约25-422℃的温度下进行冷加工
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公开(公告)号：US20180312960A1
公开(公告)日：2018-11-01
申请号：US15770302
申请日：2016-10-17
申请人： Tosoh SMD, Inc.
发明人： Eugene Y. Ivanov , Eduardo del Rio
CPC分类号： C23C14/3414 , B22F2998/10 , B22F2999/00 , C22C1/045 , H01J37/3426 , H01J37/3491 , B22F3/10 , B22F2201/01 , B22F3/04 , B22F2003/185 , B22F2201/10 , B22F2201/11
摘要： Tungsten sputter targets have a purity of greater than four nines, a density of about 97% and higher, and an oxygen content of 10 ppm or less. Method of making such targets from powder precursors are disclosed wherein the tungsten powder is pressure consolidated such as by CIPing following by a sintering step under a hydrogen atmosphere to control oxygen and carbon content of the target.
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公开(公告)号：US11062889B2
公开(公告)日：2021-07-13
申请号：US15993075
申请日：2018-05-30
申请人： Tosoh SMD, Inc.
发明人： Eugene Y. Ivanov , Eduardo del Rio
摘要： A method of making a metal or metal alloy target having the steps of providing a billet, the billet having a generally cylindrical configuration and having a central axis, cutting the billet in half parallel to the central axis to form at least a half cylindrical blank, and cross rolling the half cylindrical blank to form a target.
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公开(公告)号：US20190084048A1
公开(公告)日：2019-03-21
申请号：US16106656
申请日：2018-08-21
申请人： Tosoh SMD, Inc.
发明人： Eugene Y. Ivanov , Eduardo del Rio
摘要： A method of making an atomized spherical β-Ti/Ta alloy powder for additive manufacturing, having the steps of: a) blending elemental Ti and Ta powders to form a Ti—Ta powder composition; b) hot-isostatically pressing said powder composition to form an Ti—Ta electrode; and c) processing said Ti—Ta electrode by electrode induction melting gas atomization (EIGA) to produce an atomized spherical Ti—Ta alloy powder. A true spherical Ti-50 wt % Ta alloy powder, the product obtained by the process having the steps of: (a) blending elemental Ti and Ta powders to form a 50 wt %-50 wt % Ti—Ta powder composition; b) hot-isostatically pressing said powder composition to form a Ti—Ta electrode; and c) processing said Ti—Ta electrode by electrode induction melting gas atomization (EIGA) to produce an atomized spherical Ti-50 wt % Ta powder comprising spherical β-Ti/Ta alloy particles.
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公开(公告)号：US20180374690A1
公开(公告)日：2018-12-27
申请号：US15993075
申请日：2018-05-30
申请人： Tosoh SMD, Inc.
发明人： Eugene Y. Ivanov , Eduardo del Rio
摘要： A method of making a metal or metal alloy target having the steps of providing a billet, the billet having a generally cylindrical configuration and having a central axis, cutting the billet in half parallel to the central axis to form at least a half cylindrical blank, and cross rolling the half cylindrical blank to form a target.
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