公开(公告)号：US07889349B2

公开(公告)日：2011-02-15

申请号：US11560362

申请日：2006-11-16

申请人： Trent Ridder ,  Ben ver Steeg ,  Michael Haass ,  John D. Maynard ,  Zachary Benz

发明人： Trent Ridder ,  Ben ver Steeg ,  Michael Haass ,  John D. Maynard ,  Zachary Benz

IPC分类号： G01B9/02 ,  G01J3/45

CPC分类号： G01J3/45

摘要： The present invention provides improved methods and apparatuses for accurate measurements using interferometers. A functional relationship between the optical path difference and time is determined from a reference signal from an interferometer. The times at which the interferometer had specific optical path differences can be determined from the functional relationship. Those times can then be used to select times at which the spectroscopic signal from the interferometer was produced at the specific optical path differences. The invention can be applied, as examples, to maintain instrument calibration, and to transfer or compare calibrations or measurements across different interferometers.

摘要翻译： 本发明提供了使用干涉仪精确测量的改进的方法和装置。 从干涉仪的参考信号确定光程差和时间之间的功能关系。 干涉仪具有特定光程差的时间可以从功能关系确定。 然后可以使用那些时间选择在特定光程差处产生来自干涉仪的分光信号的时间。 作为示例，本发明可以应用于维持仪器校准，以及传送或比较不同干涉仪之间的校准或测量。

公开(公告)号：US20080117405A1

公开(公告)日：2008-05-22

申请号：US11560362

申请日：2006-11-16

申请人： Trent Ridder ,  Ben ver Steeg ,  John D. Maynard ,  Michael Haass ,  Zachary Benz

发明人： Trent Ridder ,  Ben ver Steeg ,  John D. Maynard ,  Michael Haass ,  Zachary Benz

IPC分类号： G01C3/08

CPC分类号： G01J3/45

摘要： The present invention provides improved methods and apparatuses for accurate measurements using interferometers. A functional relationship between the optical path difference and time is determined from a reference signal from an interferometer. The times at which the interferometer had specific optical path differences can be determined from the functional relationship. Those times can then be used to select times at which the spectroscopic signal from the interferometer was produced at the specific optical path differences. The invention can be applied, as examples, to maintain instrument calibration, and to transfer or compare calibrations or measurements across different interferometers.

摘要翻译： 本发明提供了使用干涉仪精确测量的改进的方法和装置。 从干涉仪的参考信号确定光程差和时间之间的功能关系。 干涉仪具有特定光程差的时间可以从功能关系确定。 然后可以使用那些时间选择在特定光程差处产生来自干涉仪的分光信号的时间。 作为示例，本发明可以应用于维持仪器校准，以及传送或比较不同干涉仪之间的校准或测量。

公开(公告)号：US07446878B2

公开(公告)日：2008-11-04

申请号：US11560361

申请日：2006-11-16

申请人： Trent Ridder ,  Ben ver Steeg ,  John D. Maynard ,  Zachary Benz

发明人： Trent Ridder ,  Ben ver Steeg ,  John D. Maynard ,  Zachary Benz

IPC分类号： G01B9/02 ,  G01J5/02 ,  G01J3/45

CPC分类号： G01J3/45 ,  G01J3/02 ,  G01J3/027

摘要： The present invention provides methods and apparatuses that can improve measurement accuracy in interferometers. The invention provides methods for determining digital compensation filters that measure a frequency response or responses to be compensated, and then determining a filter target response from the inverse of the frequency response or responses. A digital compensation filter can be determined from the filter target response using a discrete sum of cosines with a phase argument. The invention also allows other desired filter responses to be integrated into the filter target response before determining the digital compensation filter.

摘要翻译： 本发明提供能够提高干涉仪的测量精度的方法和装置。 本发明提供了用于确定测量要补偿的频率响应或响应的数字补偿滤波器的方法，然后根据频率响应或响应的倒数来确定滤波器目标响应。 可以使用具有相位自变量的离散余弦和的滤波器目标响应来确定数字补偿滤波器。 在确定数字补偿滤波器之前，本发明还允许将其它期望的滤波器响应集成到滤波器目标响应中。

公开(公告)号：US20080120052A1

公开(公告)日：2008-05-22

申请号：US11560361

申请日：2006-11-16

申请人： Trent Ridder ,  Ben ver Steeg ,  John D. Maynard ,  Zachary Benz

发明人： Trent Ridder ,  Ben ver Steeg ,  John D. Maynard ,  Zachary Benz

IPC分类号： G06F19/00

CPC分类号： G01J3/45 ,  G01J3/02 ,  G01J3/027

摘要： The present invention provides methods and apparatuses that can improve measurement accuracy in interferometers. The invention provides methods for determining digital compensation filters that measure a frequency response or responses to be compensated, and then determining a filter target response from the inverse of the frequency response or responses. A digital compensation filter can be determined from the filter target response using a discrete sum of cosines with a phase argument. The invention also allows other desired filter responses to be integrated into the filter target response before determining the digital compensation filter.

摘要翻译： 本发明提供能够提高干涉仪的测量精度的方法和装置。 本发明提供了用于确定测量要补偿的频率响应或响应的数字补偿滤波器的方法，然后根据频率响应或响应的倒数来确定滤波器目标响应。 可以使用具有相位自变量的离散余弦和的滤波器目标响应来确定数字补偿滤波器。 在确定数字补偿滤波器之前，本发明还允许将其它期望的滤波器响应集成到滤波器目标响应中。