Optical guided wave devices employing semiconductor-insulator structures
    3.
    发明授权
    Optical guided wave devices employing semiconductor-insulator structures 失效
    采用半导体 - 绝缘体结构的光导波器件

    公开(公告)号:US4420873A

    公开(公告)日:1983-12-20

    申请号:US115420

    申请日:1980-01-25

    IPC分类号: G02B6/122 G02B6/13 G02B5/172

    摘要: A method for fabricating three-dimensional optical waveguides is disclosed. In this method, a single crystal semiconductor layer is grown upon an insulator which has an index of refraction lower than the semiconductor. The semiconductor layer is deposited to a thickness which provides confinement of light propagating in the semiconductor layer in the vertical direction. An effective larger index of refraction over a cross-sectional region of the semiconductor layer is then formed to provide confinement of light in the lateral direction. In the preferred method, the growth of single crystal semiconductor upon the insulator is achieved by a vapor-phase lateral epitaxial overgrowth technique.Devices fabricated according to the method are also disclosed.

    摘要翻译: 公开了制造三维光波导的方法。 在该方法中,单晶半导体层生长在折射率低于半导体的绝缘体上。 半导体层被沉积成在垂直方向上提供在半导体层中传播的光的限制的厚度。 然后在半导体层的横截面区域上形成有效的较大的折射率,以在侧向方向上提供光的约束。 在优选的方法中,单晶半导体在绝缘体上的生长通过气相横向外延生长技术实现。 还公开了根据该方法制造的器件。

    Optical guided wave devices employing semiconductor-insulator structures
    4.
    发明授权
    Optical guided wave devices employing semiconductor-insulator structures 失效
    采用半导体 - 绝缘体结构的光导波器件

    公开(公告)号:US4518219A

    公开(公告)日:1985-05-21

    申请号:US463568

    申请日:1983-02-03

    IPC分类号: G02B6/13 G02B5/174

    CPC分类号: G02B6/131

    摘要: A three-dimensional optical waveguide is disclosed. This waveguide comprises a single crystal semiconductor layer grown upon an insulator which has an index of refraction lower than the semiconductor. The semiconductor layer has a thickness which provides confinement of light propagating in the semiconductor layer in the vertical direction. An effective larger index of refraction over a cross-sectional region of the semiconductor layer provides confinement of light in the lateral direction. This lateral confinement is achieved by side walls in the semiconductor layer which extend toward, but fall short of, the insulator layer.

    摘要翻译: 公开了一种三维光波导。 该波导包括在绝缘体上生长的单晶半导体层,其具有低于半导体的折射率。 半导体层具有在垂直方向上提供在半导体层中传播的光的限制的厚度。 在半导体层的横截面区域上的有效的较大的折射率提供了在横向方向上的光的限制。 该侧向约束由半导体层中的侧壁延伸,但是绝缘层延伸但不短。