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18 条记录 (耗时 0.017 秒)

    Ellipsometry methods and apparatus using solid immersion tunneling
    1.
    发明授权
    Ellipsometry methods and apparatus using solid immersion tunneling 有权
    椭圆偏振方法和使用固体浸入隧道的设备

    公开(公告)号：US06934024B2

    公开(公告)日：2005-08-23

    申请号：US10388857

    申请日：2003-03-14

    申请人： Qiwen Zhan ,  James R. Leger

    发明人： Qiwen Zhan ,  James R. Leger

    IPC分类号： G01J4/00 ,  G01N21/21

    CPC分类号： G01N21/211 ,  G01J4/00

    摘要： A solid immersion tunneling ellipsometer and methods relating thereto may include a solid immersion apparatus (e.g., a prism or an objective lens in combination with a solid immersion lens) that facilitates optical tunneling and provide information that can be used in the determination of one or more characteristics (e.g., thickness, index of refraction, etc.) of samples (e.g., thin films, ultrathin films, etc.).

    摘要翻译： 固体浸入式隧道椭偏仪及其相关方法可以包括便于光学隧穿的固体浸没装置（例如，棱镜或物镜与固体浸没透镜组合），并提供可用于确定一个或多个 样品的特性（例如，厚度，折射率等）（例如，薄膜，超薄膜等）。

    Phase conjugating difractive elements and method
    3.
    发明授权
    Phase conjugating difractive elements and method 失效
    相位共轭折射元件和方法

    公开(公告)号：US5592505A

    公开(公告)日：1997-01-07

    申请号：US434788

    申请日：1995-05-04

    申请人： James R. Leger

    发明人： James R. Leger

    IPC分类号： G02B5/18 ,  G02B27/00 ,  H01S3/08 ,  H01S3/10

    CPC分类号： G02B5/1871 ,  G02B27/0037 ,  H01S3/10076 ,  H01S2301/206 ,  H01S3/08045 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068

    摘要： Method for making a custom phase-conjugating diffractive mirror for a laser resonator comprising the steps of: (a) choosing a specified beam mode profile a.sub.1 (x,y) that will suit need of said designer, (b) calculating the mode profile b(x',y') which is a value of the specified beam a.sub.1 (x,y) that is propagated to the reflection surface of the diffractive mirror and (c) calculating mirror reflectance t(x',y') which reflects phase conjugate of b(x',y'). A method for fabricating such a mirror is shown. Another aspect of the invention is the addition of a phase adjusting element into a laser resonator, and compensating for the addition of a phase adjusting element in the design of other phase-adjusting elements such as the mirrors.

    摘要翻译： 一种用于制造用于激光谐振器的定制相位共轭衍射镜的方法，包括以下步骤：（a）选择适合所述设计者需要的指定波束模式分布a1（x，y），（b）计算模式分布b （x'，y'），其是传播到衍射镜的反射面的指定光束a1（x，y）的值，（c）计算反射相位的镜面反射率t（x'，y'） b（x'，y'）的共轭。 示出了制造这种反射镜的方法。 本发明的另一方面是将相位调整元件添加到激光谐振器中，并且在其他相位调整元件（例如反射镜）的设计中补偿相位调整元件的添加。

    Phase grating and mode-selecting mirror for a laser
    5.
    发明授权
    Phase grating and mode-selecting mirror for a laser 失效
    用于激光的相位光栅和模式选择镜

    公开(公告)号：US5454004A

    公开(公告)日：1995-09-26

    申请号：US239028

    申请日：1994-05-06

    申请人： James R. Leger

    发明人： James R. Leger

    IPC分类号： G02B5/18 ,  G02B27/00 ,  H01S3/08 ,  H01S3/10

    CPC分类号： G02B5/1871 ,  G02B27/0037 ,  H01S3/10076 ,  H01S2301/206 ,  H01S3/08045 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068

    摘要： Method for making a custom phase-conjugating diffractive mirror for a laser resonator comprising the steps of: (a) (a) choosing a specified beam mode profile a.sub.i (x,y) that will suit need of said designer, (b) calculating the mode profile b(x',y') which is a value of the specified a.sub.i (x,y) that is propagated to the reflection surface of the diffractive mirror and (c) calculating mirror reflectance t(x',y') which reflects phase conjugate of b(x',y'). A method for fabricating such a mirror is shown. Another aspect of the invention is the addition of a phase adjusting element into a laser resonator, and compensating for the addition of a phase adjusting element in the design of other phase-adjusting elements such as the mirrors.

    摘要翻译： 一种用于制造用于激光谐振器的定制相位共轭衍射镜的方法，包括以下步骤：（a）（a）（a）选择适合所述设计者需要的指定波束模式分布ai（x，y），（b） 模式分布b（x'，y'），其是传播到衍射镜的反射面的规定的ai（x，y）的值，（c）计算镜面反射率t（x'，y'）， 反映b（x'，y'）的相位共轭。 示出了制造这种镜子的方法。 本发明的另一方面是将相位调整元件添加到激光谐振器中，并且在其他相位调整元件（例如反射镜）的设计中补偿相位调整元件的添加。

    Array illuminator using a binary optics phase plate
    6.
    发明授权
    Array illuminator using a binary optics phase plate 失效
    阵列照明器采用二元光学相位板

    公开(公告)号：US5124843A

    公开(公告)日：1992-06-23

    申请号：US457492

    申请日：1989-12-27

    申请人： James R. Leger ,  Gary J. Swanson

    发明人： James R. Leger ,  Gary J. Swanson

    IPC分类号： G02B5/18 ,  G02B27/00

    CPC分类号： G02B27/0087 ,  G02B27/0037 ,  G02B27/425 ,  G02B5/1876 ,  G02B5/1885

    摘要： An optical element for converting a uniform beam of light of wavelength .lambda. into an array of illuminated spots, the optical element including a phase plate made of an array of constant phase zones; and an image plane disposed parallel to and at a preselected distance from the phase plate, the preselected distance being selected so that illuminating the phase plate with uniform coherent illumination of wavelength .lambda. produces the array of illuminated spots on the image plane, the spot array having a fill factor in at least one dimension that is less than 1/2.

    摘要翻译： 一种光学元件，用于将波长λ的均匀光束转换成照明光斑的阵列，所述光学元件包括由恒定相位阵列组成的相位板; 以及平行于相位板预定距离设置的图像平面，选择的预定距离使得以波长λ的均匀相干照明照射相位板产生在图像平面上的点阵阵列，该点阵列具有 至少一个尺寸小于1/2的填充因子。

    Coherent beam combining of lasers using microlenses and diffractive coupling
    7.
    发明授权
    Coherent beam combining of lasers using microlenses and diffractive coupling 失效
    使用微透镜和衍射耦合的激光器的相干光束组合

    公开(公告)号：US4813762A

    公开(公告)日：1989-03-21

    申请号：US154898

    申请日：1988-02-11

    申请人： James R. Leger ,  Wilfrid B. Veldkamp ,  Miles L. Scott

    发明人： James R. Leger ,  Wilfrid B. Veldkamp ,  Miles L. Scott

    IPC分类号： G02B27/44 ,  H01S5/40 ,  G02B5/08 ,  H01S3/098 ,  H01S3/19

    CPC分类号： H01S5/4062 ,  G02B19/0014 ,  G02B19/0057 ,  G02B5/1885

    摘要： A diffractive lenslet array receives light from multiple lasers. The lenslet array is spaced apart from a partially reflecting mirror by a distance Z=nd.sup.2 /.lambda. where n is an integer or half integer, .lambda. is the laser wavelength and d is the spacing of the lenslets in the array. In a preferred embodiment the apparatus is a unitary design in which the lenslets are etched into one surface of a substrate and a parallel surface is coated to form the partially reflecting mirror. The lenslets abut one another to produce a fill factor (percentage of array containing light) close to one and each of the lenslets is a multistep diffractive lens. Diffractive speading over a round trip distance from lasers to mirror and back again causes feedback light from a single lenslet to couple into adjacent lenslets. The light from all the lenslets is coupled back into the laser waveguides efficiently only when the wavefront at each of the lenslets is flat, that is, when the phase of the feedback is uniform across a lenslet. Uniformity is achieved when the separation between lenslet array and mirror is the Talbot self-imaging condition set forth above.

    摘要翻译： 衍射微透镜阵列接收来自多个激光器的光。 透镜阵列与部分反射镜隔开距离Z = nd2 /λ，其中n是整数或半整数，λ是激光波长，d是阵列中小透镜的间距。 在优选实施例中，该装置是其中将小透镜蚀刻到基板的一个表面中并且平行表面被涂覆以形成部分反射镜的整体设计。 小透镜彼此邻接以产生接近1的填充因子（包含光的阵列的百分比），并且每个小透镜是多阶衍射透镜。 从激光到镜面和背面的往返行程距离的衍射色差再次导致来自单个小透镜的反射光耦合到相邻的小透镜中。 来自所有小透镜的光只有当每个小透镜的波前平坦时，即当反射的相位在透镜小透镜上是均匀的时，才有效地耦合回激光波导中。 当小透镜阵列和反射镜之间的分离是上述塔尔博特自我成像条件时，实现均匀性。

    Imaging ellipsometry
    8.
    发明授权
    Imaging ellipsometry 有权
    成像椭偏仪

    公开(公告)号：US06798511B1

    公开(公告)日：2004-09-28

    申请号：US09691006

    申请日：2000-10-18

    申请人： Qiwen Zhan ,  James R. Leger

    发明人： Qiwen Zhan ,  James R. Leger

    IPC分类号： G01J400

    CPC分类号： G01J4/00 ,  G01N21/211

    摘要： An ellipsometer apparatus and method for use in providing an image of at least a portion of a sample includes an objective lens having a focal plane at which a sample plane of a sample is positioned. Linearly polarized light normal to the sample plane incident on the objective lens is provided, and the incident linearly polarized light is focused onto the sample. At least a portion of the focused incident polarized light is reflected by the sample resulting in reflected light. Spatial filtering is used to modify at least a portion of the incident or the reflected light. An analyzer portion is operable to generate polarization information based on the reflected light.

    摘要翻译： 用于提供样品的至少一部分的图像的椭圆偏振仪装置和方法包括具有样品的样品平面所在的焦平面的物镜。 提供垂直于入射在物镜上的采样平面的线偏振光，并将入射的线偏振光聚焦到样品上。 聚焦的入射偏振光的至少一部分被样品反射，产生反射光。 空间滤波用于修改入射或反射光的至少一部分。 分析器部分可操作以基于反射光产生偏振信息。

    Ellipsometer using radial symmetry
    9.
    发明授权
    Ellipsometer using radial symmetry 有权
    椭圆计使用径向对称

    公开(公告)号：US06693711B1

    公开(公告)日：2004-02-17

    申请号：US09691346

    申请日：2000-10-18

    申请人： James R. Leger ,  Qiwen Zhan

    发明人： James R. Leger ,  Qiwen Zhan

    IPC分类号： G01J400

    CPC分类号： G01N21/211 ,  G01J4/00

    摘要： An ellipsometer and ellipsometry method uses radial symmetry. For example, circularly polarized light may be focused to a spot on a sample using an objective lens and reflected therefrom. A radially symmetric ellipsometric signal based on the reflected light and representative of at least one characteristic of the sample may be attained using a radially symmetric analyzer apparatus, e.g., a pure Polarization rotator such as two half wave plates and a radially symmetric analyzer such as a birefringent lens.

    摘要翻译： 椭偏仪和椭圆偏振法使用径向对称。 例如，可以使用物镜将圆偏振光聚焦到样品上的斑点并从其反射。 基于反射光并且代表样品的至少一个特征的径向对称椭偏信号可以使用径向对称的分析仪装置来获得，例如，诸如两个半波片的纯偏振旋转器和诸如 双折射透镜

    Binary phase-only optical correlation system
    10.
    发明授权
    Binary phase-only optical correlation system 失效
    二进制相位相关系统

    公开(公告)号：US4765714A

    公开(公告)日：1988-08-23

    申请号：US834092

    申请日：1986-02-27

    申请人： Joseph L. Horner ,  James R. Leger

    发明人： Joseph L. Horner ,  James R. Leger

    IPC分类号： G02B27/46 ,  G06K9/74 ,  G06K9/76 ,  G06G9/00

    CPC分类号： G06K9/745 ,  G02B27/46

    摘要： A binary phase-only optical correlation system incorporating therein a binary phase-only filter. The binary phase-only optical filter is made by mathematically generating preselected phase-only information by a fast Fourier Transform technique. This generated phase-only information is binarized into a function having two values. This binarized function is utilized to produce a mask which in turn is used in conjunction with an appropriate optical substrate to produce the binary phase-only filter. The manufacture of the binary phase-only filter is substantially easier than the production of a phase-only filter yet virtually the same correlation results when the binary phase-only filter when it is used in an optical correlation system.

    摘要翻译： 二进制相位相关系统，其中并入二进制相位滤波器。 二进制相位相位滤波器是通过快速傅立叶变换技术数学地产生预选的仅相位信息来制作的。 这样生成的相位相关信息被二值化为具有两个值的函数。 该二值化函数用于产生掩模，该掩模又与合适的光学基底一起使用以产生二相相位滤波器。 二相相位滤波器的制造比相位相关滤波器的制造要容易得多，但是当二值相位滤波器用于光学相关系统时，几乎相同的相关性产生相同的相关性。