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公开(公告)号：US4968374A
公开(公告)日：1990-11-06
申请号：US359817
申请日：1989-06-01
IPC分类号： C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065
CPC分类号： H01J37/32082 , H01J37/32541
摘要： A dry etching apparatus has a vacuum chamber provided therein with an RF electrode. On the RF electrode an object substrate(s) is placed. The RF electrode is covered with a substrate bed(s) and detachable dielectric members. The substrate bed(s) includes a dielectric portion and a conductive portion provided just under the dielectric portion. The conductive portion is equipotential in terms of direct current to the RF electrode. At least one gap extension is consituted of a gap(s) between the dielectric members, a gap(s) between the dielectric members and the substrate bed(s), etc. and extends from the surface of the RF electrode to the plasma space. The gap extension(s) extends zigzaggedly from the RF electrode to the plasma space so that the plasma space can not structurally be viewed from the surface of the RF electrode irrespective the dimesions of the substrate. To the RF electrode is applied a negative DC voltage having larger absolute value than that of a negative self-bias voltage at the object substrate(s) induced by plasma discharge.
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2.发明授权
公开(公告)号：US5356574A
公开(公告)日：1994-10-18
申请号：US118742
申请日：1993-09-10
摘要： A process for providing activated carbon fibers consisting of optically anisotropic components and optically isotropic components by spinning a pitch into fibers, and infusibilizing the resulting fibers, followed by an activation treatment. The pitch for spinning is prepared by melt mixing together (A) 100 parts by weight of an optically isotropic pitch having a softening point of 230.degree.-300.degree. C. obtained by heat treatment of a pitch while blowing an oxygen containing gas into the pitch, and (B) 10-50 parts by weight of an optically isotropic pitch having a softening point of 200.degree.-270.degree. C. obtained by polymerization of naphthalene in the presence of a Lewis acid catalyst. The optically isotropic pitch (B) is further characterized as having the property of being converted into an optically anisotropic pitch by the stress occurring at the time of spinning. The carbon fibers produced by spinning the spinning pitch into fibers have a double layer structure, the surface layer exhibiting optical isotropy and the center portion exhibiting optical anisotropy. The spun fibers are infusibilized, followed by carbonization and/or graphitization.
摘要翻译： 提供由光学各向异性组分和光学各向同性组分组成的活性炭纤维的方法，其通过将沥青纺丝成纤维，并使所得到的纤维熔融化，然后进行活化处理。 通过熔融混合（A）将100重量份的软化点为230-300℃的光学各向同性沥青通过熔融混合在一起而制备，所述光学各向同性沥青通过在将含氧气体吹入沥青中的同时加热处理而获得 ，（B）10-50重量份的通过萘在路易斯酸催化剂存在下聚合得到的软化点为200〜-270℃的光学各向同性沥青。 光学各向同性沥青（B）的特征还在于通过旋转时发生的应力将其转化为光学各向异性的沥青。 通过将纺丝沥青纺丝成纤维而生产的碳纤维具有双层结构，表面层具有光学各向同性，中心部分表现出光学各向异性。 纺丝纤维是不熔化的，随后碳化和/或石墨化。
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公开(公告)号：US5824245A
公开(公告)日：1998-10-20
申请号：US535747
申请日：1995-09-28
申请人： Toshio Tamaki , Minoru Tamaki , Yasushi Katsuta
发明人： Toshio Tamaki , Minoru Tamaki , Yasushi Katsuta
CPC分类号： D01F9/145
摘要： Disclosed is a process for preparing milled graphite fibers in which the amount of metallic components contained in the milled carbon fibers before graphitizing is limited to not more than 100/1,000,000 in terms of a ratio by weight. Also disclosed is a process for preparing milled graphite fibers in which the amount of metallic components contained in the milled carbon fibers before graphitizing except metallic components originally contained in the fibers themselves is limited to not more than 50/1,000,000 in terms of a ratio by weight. According to these processes, there can be obtained milled graphite fibers whose surfaces are inert, which suffer few longitudinal crackings and which are almost free from occurrence of particulate substances comprising agglomerated or bonded fibers.
摘要翻译： 公开了一种制备磨碎的石墨纤维的方法，其中在石墨化之前磨碎的碳纤维中所含的金属组分的量以重量比计为不大于100 / 1,000,000。 还公开了一种制备磨碎的石墨纤维的方法，其中除了原纤维本身含有的金属成分之外，在石墨化之前的研磨碳纤维中包含的金属成分的量以重量比计限于不大于50 / 1,000,000 。 根据这些方法，可以获得表面为惰性的磨碎的石墨纤维，其几乎没有纵向裂纹，并且几乎没有发生包含聚集或粘合的纤维的颗粒物质。
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4.发明授权
公开(公告)号：US5698341A
公开(公告)日：1997-12-16
申请号：US695848
申请日：1996-08-09
申请人： Toshio Tamaki , Yoshiyuki Nishimura
发明人： Toshio Tamaki , Yoshiyuki Nishimura
IPC分类号： C01B31/04 , H01M4/133 , H01M4/1393 , H01M4/58 , H01M4/583 , H01M10/052 , H01M10/36 , H01M4/62
CPC分类号： H01M4/583 , C01B31/04 , H01M4/133 , H01M4/1393 , C01P2002/60 , C01P2002/72 , C01P2002/74 , C01P2006/80 , H01M10/052
摘要： A carbon material for use in a lithium secondary battery, which is obtained by graphitization conducted in the presence of a boric compound so as to contain boron in an amount ranging from 1,000 ppm to 30,000 ppm and which, when subjected to X-ray diffractometry, exhibits an interplanar spacing of 002 surface (d.sub.002) of not greater than 0.338 nm, a crystallite size along c-axis (Lc) of at least 35 nm, a crystallite size along a-axis (La) of at least 50 nm and a ratio of diffraction peak (101) to diffraction peak (100), designated as P.sub.101 /P.sub.100, of at least 1.0; a negative electrode and a lithium secondary battery each produced by using the above carbon material; and a process for producing the carbon material. This carbon material exhibits large charge and discharge capacities, so that it can provide a negative electrode for use in a lithium secondary battery which is excellent in charge and discharge cycle characteristics.
摘要翻译： 一种用于锂二次电池的碳材料，其通过在硼化合物的存在下进行石墨化而获得，以便含有量为1,000ppm至30,000ppm的硼，并且当进行X射线衍射时， 表现出不大于0.338nm的002表面（d002）的晶面间距，沿c轴（Lc）至少35nm的微晶尺寸，沿a轴（La）至少50nm的微晶尺寸和 衍射峰（101）与衍射峰（100）的比值，指定为P101 / P100，为至少1.0; 通过使用上述碳材料制造的负极和锂二次电池; 以及碳材料的制造方法。 该碳材料具有大的充放电容量，因此能够提供充放电循环特性优异的锂二次电池用负极。
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5.发明授权
公开(公告)号：US5795678A
公开(公告)日：1998-08-18
申请号：US414195
申请日：1995-03-31
CPC分类号： H01M4/587
摘要： A negative electrode for use in a secondary battery which comprises milled graphite fibers derived from mesophase pitch each having circumferential, upper end and lower end faces, the milled graphite fibers each being composed of graphite layers having therebetween voids as inlets and outlets for lithium ions, all of the circumferential, upper end and lower end faces having openings of the voids between the graphite layers, which serve as inlets or outlets for lithium ions. This negative electrode for use in a secondary battery can be utilized to provide a lithium secondary battery of nonaqueous electrolyte which has large charge and discharge capacities and which permits setting the current density at charge or discharge high.
摘要翻译： 一种用于二次电池的负极，其包括衍生自具有圆周，上端和下端面的中间相沥青的磨碎石墨纤维，所述研磨石墨纤维各自由具有空隙的石墨层组成，用作锂离子的入口和出口， 所有圆周，上端和下端面都具有石墨层之间的空隙的开口，用作锂离子的入口或出口。 用于二次电池的负极可以用于提供具有大的充放电容量的非水电解质的锂二次电池，并且允许将充电或放电的电流密度设定得高。
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公开(公告)号：US5556723A
公开(公告)日：1996-09-17
申请号：US306614
申请日：1994-09-15
CPC分类号： H01M10/05 , H01M4/0459 , H01M4/382 , H01M4/583 , H01M4/622 , H01M2004/027 , H01M2300/0025 , H01M4/0404 , H01M4/405 , H01M4/587 , H01M4/661
摘要： A negative electrode for use in a secondary battery is disclosed, comprising milled carbon fibers derived from mesophase pitch wherein the milled carbon fibers each has a fiber cut surface and a fiber axis intersecting with each other at cross angles, the smaller one thereof being at least 65.degree. on the average. This negative electrode does not suffer from property deterioration, irrespective of multiple repetitions of charge and discharge, from which a nonaqueous-electrolyte-loaded lithic secondary battery having excellent cycle characteristics can be fabricated.
摘要翻译： 公开了一种用于二次电池的负极，包括衍生自中间相沥青的磨碎碳纤维，其中研磨碳纤维各自具有纤维切割面和纤维轴线交叉的交叉角，其中较小的一个至少是 平均65度。 不管充放电多次重复，可以制造出具有优异的循环特性的非水电解质负载的锂二次电池，不会损害该负极的性能劣化。
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7.发明授权公开(公告)号：US06287729B1
公开(公告)日：2001-09-11
申请号：US09443347
申请日：1999-11-19
申请人： Toshio Tamaki , Kazunori Ishigami
发明人： Toshio Tamaki , Kazunori Ishigami
IPC分类号： H01M424
CPC分类号： H01M4/587 , H01M4/362 , H01M2004/021
摘要： There are disclosed graphite materials for a negative electrode used in a lithium secondary battery which graphite materials have an average specific surface area of 1.5 m2/gram to 5 m2/gram and comprise (A) milled graphite fibers which are produced by milling and graphitizing mesophase pitch-based carbon fibers, and which have an interplanar spacing of the graphite layer (d002) of at most 0.337 nm and a specific surface area of 0.8 m2/gram to 1.3 m2/gram; and (B) graphite materials which have an interplanar spacing of the graphite layer (d002) of at most 0.336 nm, a degree of graphitization (P101/P100) of at least 2.0 and a specific surface area of 2 m2/gram to 15 m2/gram, wherein the components (A) and (B) are mixed at a ratio (A)/(B) by weight of 90/10 to 50/50. The above graphite materials comprising the components (A) and (B), when used for a negative electrode in a lithium secondary battery, can enhance the performance of the battery and charge/discharge capacity thereof especially in a high load discharge.
摘要翻译： 公开了用于锂二次电池的负极用石墨材料，其中石墨材料的平均比表面积为1.5m 2 / g至5m 2 / g，并且包含（A）通过研磨和石墨化中间相制备的研磨石墨纤维 沥青基碳纤维，并且具有至多0.337nm的石墨层（d002）的面间距和0.8m 2 / g至1.3m 2 / g的比表面积; 和（B）具有至多0.336nm的石墨层的面间距（d002），石墨化度（P101 / P100）为2.0以上，比表面积为2m 2 / g〜15m 2的石墨材料 /克，其中组分（A）和（B）以90/10至50/50的重量比（A）/（B）混合。 包含组分（A）和（B）的上述石墨材料当用于锂二次电池中的负极时，可以提高电池的性能和充电/放电容量，特别是在高负载放电中。
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公开(公告)号：US5494567A
公开(公告)日：1996-02-27
申请号：US330607
申请日：1994-10-28
申请人： Toshio Tamaki
发明人： Toshio Tamaki
摘要： A process for producing an optically isotropic reformed pitch useful for various carbon materials is provided. This process comprises mixing a pitch having a ratio of aromatic hydrocarbon fa of more than 0.6 with a strong Lewis acid and a co-solvent so as to give a mol ratio of the said Lewis acid to the said pitch in the range of 0.3.about.5.0 and a mol ratio of the said co-solvent to the said pitch in the range of ratio of 2.5.about.50, reacting the mixture at a temperature of 100.degree..about.300.degree. C. and removing the Lewis acid and the co-solvent from the reaction product. Meso-Carbon microbeads having a uniform diameter of 20 .mu.m or less can be produced at a high yield of 60% or more by heat treating the said reformed pitch at 200.degree..about.380.degree. C. to produce the optically anisotropic small spheres and separating them from an optically isotropic matrix.
摘要翻译： 提供了可用于各种碳材料的光学各向同性重整沥青的制备方法。 该方法包括将具有大于0.6的芳烃fa比率的沥青与强路易斯酸和共溶剂混合，以使得所述沥青酸与所述沥青的摩尔比在0.3DIFFERENCE 5.0的范围内 和所述助溶剂与所述沥青的摩尔比在2.5分率50的范围内，在300℃的温度下使混合物反应，并从路易斯酸和共溶剂中除去路易斯酸和共溶剂 反应产物。 通过在380℃下在200℃下热处理所述改性沥青，可以以高达60％或更高的产率生产具有20μm或更小的均匀直径的中碳微珠，以产生光学各向异性的小球和分离 它们来自光学各向同性矩阵。
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公开(公告)号：US5387333A
公开(公告)日：1995-02-07
申请号：US857613
申请日：1992-03-25
申请人： Toshio Tamaki
发明人： Toshio Tamaki
摘要： An optically isotropic pitch can be obtained by a two-stage heat-treatment which combines a heat treatment with air-blowing under normal pressure with a heat treatment with air-blowing under a reduced pressure. Such a pitch is suitable for using as a raw material for producing carbon fibers or activated fibers.
摘要翻译： 光学各向同性沥青可以通过两步热处理得到，该热处理将常压下的热处理与空气吹扫在减压下进行空气吹制热处理。 这种沥青适用于生产碳纤维或活性纤维的原料。
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