公开(公告)号：US20130264610A1

公开(公告)日：2013-10-10

申请号：US13441134

申请日：2012-04-06

申请人： Tung-Tsun CHEN ,  Chia-Hua CHU ,  Chung-Hsien LIN ,  Jui-Cheng HUANG

发明人： Tung-Tsun CHEN ,  Chia-Hua CHU ,  Chung-Hsien LIN ,  Jui-Cheng HUANG

IPC分类号： H01L29/66 ,  H01L27/06

CPC分类号： H01L23/34 ,  B81B7/0096 ,  B81B2201/0278 ,  B81C1/0023 ,  H01L23/345 ,  H01L27/0629 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device with temperature control system. Embodiments of the device may include a MEMS chip including a first heater with a dedicated first temperature control loop and a CMOS chip including a second heater with a dedicated second temperature control loop. Each control loop may have a dedicated temperature sensor for controlling the thermal output of each heater. The first heater and sensor are disposed proximate to a MEMS device in the MEMS chip for direct heating thereof. The temperature of the MEMS chip and CMOS chip are independently controllable of each other via the temperature control loops.

摘要翻译： 具有温度控制系统的半导体器件。 该装置的实施例可以包括包括具有专用第一温度控制回路的第一加热器和包括具有专用第二温度控制回路的第二加热器的CMOS芯片的MEMS芯片。 每个控制回路可以具有用于控制每个加热器的热输出的专用温度传感器。 第一加热器和传感器靠近MEMS芯片中的MEMS器件设置，用于直接加热MEMS芯片。 MEMS芯片和CMOS芯片的温度可以通过温度控制回路彼此独立控制。

公开(公告)号：US20130213139A1

公开(公告)日：2013-08-22

申请号：US13401134

申请日：2012-02-21

申请人： Tung-Tsun CHEN ,  Jui-Cheng HUANG ,  Chung-Hsien LIN

发明人： Tung-Tsun CHEN ,  Jui-Cheng HUANG ,  Chung-Hsien LIN

IPC分类号： G01L7/00 ,  H01L29/84

CPC分类号： G01L21/22 ,  B81C99/0045 ,  H01L27/0688

摘要： A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a motion beam anchored to an internal surface in the sealed enclosure. A driving electrode is disposed beneath the motion beam and a bias is supplied to cause the motion beam to deflect through electromotive force. A sensing electrode is also provided and detects capacitance between the sensing electrode disposed on the internal surface, and the motion beam. Capacitance changes as the gap between the motion beam and the sensing electrode changes. The amount of deflection is determined by the vacuum level in the sealed enclosure. The vacuum level in the sealed enclosure is thereby sensed by the sensing electrode.

摘要翻译： 提供了用于感测密封外壳中的真空的真空传感器。 密封的外壳包括希望保持在真空条件下的有源MEMS器件。 真空传感器包括锚定在密封外壳中的内表面的运动梁。 驱动电极设置在运动光束下方，并且提供偏压以使运动光束通过电动势偏转。 还提供感测电极并且检测设置在内表面上的感测电极与运动光束之间的电容。 电容随着运动光束与感应电极之间的间隙而变化。 偏转量由密封外壳中的真空度决定。 因此，密封外壳中的真空度由感测电极感测。

公开(公告)号：US20120187983A1

公开(公告)日：2012-07-26

申请号：US13009952

申请日：2011-01-20

申请人： Chung-Hsien LIN ,  Jui-Cheng HUANG ,  Wan-Te CHEN ,  Chia-Hua CHU

发明人： Chung-Hsien LIN ,  Jui-Cheng HUANG ,  Wan-Te CHEN ,  Chia-Hua CHU

IPC分类号： H03B19/00

CPC分类号： H03B21/01 ,  H03B5/30

摘要： A mechanical frequency generator has a first mechanical resonator and a second mechanical resonator and a circuit connected with the first and second mechanical resonators. The first and second mechanical resonators having substantially the same resonator frequency coefficients as a function of an environment of the first and the second mechanical resonators. The first mechanical resonator differing in size from the second mechanical resonator. The circuit adapted to generate a difference frequency signal responsive to the first and second mechanical resonator frequency signals and based on the first and the second predetermined resonant frequencies.

摘要翻译： 机械频率发生器具有第一机械谐振器和第二机械谐振器以及与第一和第二机械谐振器连接的电路。 第一和第二机械谐振器具有与第一和第二机械谐振器的环境的函数基本上相同的谐振器频率系数。 第一机械谐振器的尺寸与第二机械谐振器的尺寸不同。 该电路适于响应于第一和第二机械谐振器频率信号并基于第一和第二预定谐振频率产生差频信号。