公开(公告)号：US20130327921A1

公开(公告)日：2013-12-12

申请号：US13492348

申请日：2012-06-08

申请人： U-Ting CHEN ,  Dun-Nian YAUNG ,  Jen-Cheng LIU ,  Yu-Hao SHIH ,  Chih-Chien WANG ,  Shih Pei CHOU ,  Wei-Tung HUANG ,  Cheng-Ta WU

发明人： U-Ting CHEN ,  Dun-Nian YAUNG ,  Jen-Cheng LIU ,  Yu-Hao SHIH ,  Chih-Chien WANG ,  Shih Pei CHOU ,  Wei-Tung HUANG ,  Cheng-Ta WU

IPC分类号： H01L31/18 ,  H01L27/146

CPC分类号： H01L21/0334 ,  H01L21/0337 ,  H01L27/14603 ,  H01L27/1464 ,  H01L27/14689

摘要： A method of forming of an image sensor device includes a substrate having a pixel region and a periphery region. A plurality of first trenches is etched in the periphery region. Each of the first trenches has a depth D1. A mask layer is formed over the substrate. The mask layer has a plurality of openings in the pixel region. A spacer is formed in an interior surface of each opening. A plurality of second trenches is etched through each opening having the spacer in the pixel region. Each of the second trenches has a depth D2. The depth D1 is larger than the depth D2.

摘要翻译： 形成图像传感器装置的方法包括具有像素区域和周边区域的基板。 在周边区域中蚀刻多个第一沟槽。 每个第一沟槽具有深度D1。 掩模层形成在衬底上。 掩模层在像素区域中具有多个开口。 间隔件形成在每个开口的内表面中。 通过在像素区域中具有间隔物的每个开口蚀刻多个第二沟槽。 每个第二沟槽具有深度D2。 深度D1大于深度D2。