公开(公告)号：US20190237290A1

公开(公告)日：2019-08-01

申请号：US16381512

申请日：2019-04-11

申请人： ULVAC, INC.

发明人： Takumi YUZE ,  Toshihiro TERASAWA ,  Naruyasu SASAKI

IPC分类号： H01J37/08 ,  H01J37/317 ,  H01J37/30

摘要： An ion source having an ion generation container configured to generate ions by reacting ionized gas introduced into the container via a tubular gas introduction pipe with an ion source material emitted in the container. The gas introduction pipe is configured to introduce the ionized gas into an inner space of the gas introduction pipe via a gas supply pipe. In the inner space of the gas introduction pipe, a detachable cooling trap member is disposed and includes a cooling trap portion configured to cool and trap a byproduct produced in the ion generation container. The cooling trap portion is disposed near a supply-side leading end of the gas supply pipe in the inner space of the gas introduction pipe and is not contact with an interior wall face of the gas introduction pipe.

公开(公告)号：US20160013011A1

公开(公告)日：2016-01-14

申请号：US14833533

申请日：2015-08-24

申请人： ULVAC, Inc.

发明人： Takumi YUZE ,  Toshihiro TERASAWA

IPC分类号： H01J37/04

CPC分类号： H01J37/04 ,  H01J37/09 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/0213 ,  H01J2237/028 ,  H05H1/16 ,  H05H7/04

摘要： Positive ions that fly within an ion acceleration tube are accelerated by a plurality of acceleration electrodes arranged within the ion acceleration tube and are irradiated to an irradiation target. A plurality of magnet devices is arranged within the ion acceleration tube; the directions of the lines of magnetic force formed respectively by the magnet devices are made to differ between the adjacent magnet devices by an angle of more than 0 degree and at most 90 degrees or less; and each of the lines of magnetic force is rotated in one direction within the ion acceleration tube. Electrons travelling in reverse within the ion acceleration tube are made to intersect the lines of magnetic force, and made to increase a distance from a flying axis while traveling in reverse. Since the electrons collide with members within the ion acceleration tube and stop before having high energy, high-energy X-rays are not generated.

摘要翻译： 在离子加速管内飞行的正离子被布置在离子加速管内的多个加速电极加速并照射到照射目标。 多个磁体装置设置在离子加速管内; 使磁铁装置分别形成的磁力线的方向在相邻的磁体装置之间的角度大于0度，最大为90度以下; 并且每个磁力线在离子加速管内沿一个方向旋转。 使离子加速管内的相反行进的电子与磁力线相交，并且在相反行进时增加与飞行轴的距离。 由于电子与离子加速管内的构件碰撞并且在具有高能量之前停止，所以不产生高能X射线。