公开(公告)号：US20230207295A1

公开(公告)日：2023-06-29

申请号：US17928510

申请日：2022-03-18

Applicant: ULVAC, INC.

Inventor： Toshiya Aoyagi ,  Makoto Arai ,  Satoru Takasawa

IPC: H01J37/34 ,  C23C14/35 ,  C23C14/34

CPC classification number: H01J37/3405 ,  C23C14/35 ,  C23C14/3407 ,  H01J37/3455

Abstract: A cathode unit includes first and second magnet units that are driven to rotate around an axis on a side opposed to a sputtering surface of a target. The first magnet unit is configured to cause a first leakage magnetic field to act on a space in front of the sputtering surface including a target center inward. The second magnet unit is configured to cause a second leakage magnetic field to act locally in the space in front of the sputtered surface located between the target center and the outer edge of the target and to enable self-holding discharge under low pressure of plasma confined by the second leakage magnetic field.