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公开(公告)号：US20160376697A1
公开(公告)日：2016-12-29
申请号：US14648226
申请日：2014-01-28
Applicant: ULVAC, Inc.
Inventor： Tetsushi Fujinaga , Masahiro Matsumoto , Makoto Arai , Eriko Mase , Harunori Iwai , Koji Takahashi , Atsuhito Ihori
CPC classification number: C23C14/541 , C23C14/345 , C23C14/50 , C23C14/568 , H01J37/32009 , H01J37/3244 , H01J37/32697 , H01J37/32715 , H01J37/32724 , H01J37/34 , H01J37/3464 , H01J37/3497 , H01L21/67109 , H01L21/6838
Abstract: A thin substrate processing device includes a substrate processing unit configured to process a thin substrate, and a cooling unit configured to cool the thin substrate when the substrate processing unit is processing the thin substrate.
Abstract translation: 薄基板处理装置包括被配置为处理薄基板的基板处理单元和被配置为当基板处理单元正在处理薄基板时冷却薄基板的冷却单元。
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Patent Agency Ranking
公开(公告)号：US10370757B2
公开(公告)日：2019-08-06
申请号：US14648226
申请日：2014-01-28
Applicant: ULVAC, Inc.
Inventor： Tetsushi Fujinaga , Masahiro Matsumoto , Makoto Arai , Eriko Mase , Harunori Iwai , Koji Takahashi , Atsuhito Ihori
Abstract: A thin substrate processing device include a substrate processing unit configured to process a thin substrate, and a cooling unit configured to cool the thin substrate when the substrate processing unit is processing the thin substrate.
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公开(公告)号：US12293905B2
公开(公告)日：2025-05-06
申请号：US17928510
申请日：2022-03-18
Applicant: ULVAC, INC.
Inventor： Toshiya Aoyagi , Makoto Arai , Satoru Takasawa
Abstract: A cathode unit includes first and second magnet units that are driven to rotate around an axis on a side opposed to a sputtering surface of a target. The first magnet unit is configured to cause a first leakage magnetic field to act on a space in front of the sputtering surface including a target center inward. The second magnet unit is configured to cause a second leakage magnetic field to act locally in the space in front of the sputtered surface located between the target center and the outer edge of the target and to enable self-holding discharge under low pressure of plasma confined by the second leakage magnetic field.
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公开(公告)号：US20230207295A1
公开(公告)日：2023-06-29
申请号：US17928510
申请日：2022-03-18
Applicant: ULVAC, INC.
Inventor： Toshiya Aoyagi , Makoto Arai , Satoru Takasawa
CPC classification number: H01J37/3405 , C23C14/35 , C23C14/3407 , H01J37/3455
Abstract: A cathode unit includes first and second magnet units that are driven to rotate around an axis on a side opposed to a sputtering surface of a target. The first magnet unit is configured to cause a first leakage magnetic field to act on a space in front of the sputtering surface including a target center inward. The second magnet unit is configured to cause a second leakage magnetic field to act locally in the space in front of the sputtered surface located between the target center and the outer edge of the target and to enable self-holding discharge under low pressure of plasma confined by the second leakage magnetic field.
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公开(公告)号：US09891731B2
公开(公告)日：2018-02-13
申请号：US14647034
申请日：2014-07-10
Applicant: ULVAC, Inc.
Inventor： Manabu Harada , Atsuhito Ihori , Toshihiro Suzuki , Hidenori Yanagitsubo , Masahiro Matsumoto , Masashi Kubo , Makoto Arai
CPC classification number: G06F3/041 , G02B5/22 , G02B5/26 , G02B5/286 , G06F2203/04103 , G06F2203/04107
Abstract: A touch panel of the present invention includes: a cover substrate; a connector being provided on an area of the cover substrate other than a display area, and including a color layer and a shield layer, the shield layer being formed from a multilayer structure, the multilayer structure being configured so that a metal layer and a dielectric layer which is thicker than the metal layer are alternately laminated; and a touch panel substrate being arranged to face the cover substrate with the connector interposed therebetween.
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6.发明申请TOUCH PANEL, METHOD OF PRODUCING THE SAME, OPTICAL THIN FILM SUBSTRATE AND METHOD OF PRODUCING THE SAME 有权触控面板及其制造方法，光薄膜基板及其制造方法公开(公告)号：US20160109971A1
公开(公告)日：2016-04-21
申请号：US14647034
申请日：2014-07-10
Applicant: ULVAC, INC.
Inventor： Manabu Harada , Atsuhito Ihori , Toshihiro Suzuki , Hidenori Yanagitsubo , Masahiro Matsumoto , Masashi Kubo , Makoto Arai
CPC classification number: G06F3/041 , G02B5/22 , G02B5/26 , G02B5/286 , G06F2203/04103 , G06F2203/04107
Abstract: A touch panel of the present invention includes: a cover substrate; a connector being provided on an area of the cover substrate other than a display area, and including a color layer and a shield layer, the shield layer being formed from a multilayer structure, the multilayer structure being configured so that a metal layer and a dielectric layer which is thicker than the metal layer are alternately laminated; and a touch panel substrate being arranged to face the cover substrate with the connector interposed therebetween.
Abstract translation: 本发明的触摸面板包括：盖基板; 在所述盖基板的除了显示区域的区域上设置的连接器，所述连接器包括彩色层和屏蔽层，所述屏蔽层由多层结构形成，所述多层结构被配置为使得金属层和电介质 比金属层厚的层交替层叠; 并且触摸面板基板被布置为与所述盖基板相对，并且所述连接器插入在所述盖基板之
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