公开(公告)号：US09244095B2

公开(公告)日：2016-01-26

申请号：US14364309

申请日：2012-12-12

Applicant: UNIVERSITAT BASEL

Inventor： Marija Plodinec ,  Marko Loparic ,  Roderick Y H Lim

IPC: G01Q10/00 ,  G01Q10/06 ,  B82Y35/00

CPC classification number: G01Q10/06 ,  B82Y35/00 ,  G01Q10/065

Abstract: The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1) along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device (100) for controlling a scanning probe microscope.