公开(公告)号：US20200228095A1

公开(公告)日：2020-07-16

申请号：US16737748

申请日：2020-01-08

Applicant: University of Florida Research Foundation, Inc.

Inventor： Roozbeh Tabrizian ,  Mayur Ghatge

IPC: H03H9/56 ,  H03H9/17 ,  H01L41/083 ,  H01L41/18

Abstract: A tunable non-reciprocal frequency limiter with an asymmetric micro-electro-mechanical resonator has two independent transducer ports. One port has a film stack including a 10 nm hafnium zirconium oxide (HZO) and another port has a film stack including a 120 nm aluminum nitride (AlN) film. These film stacks are deposited on top of 70 nm single crystal silicon substrate applying CMOS compatible fabrication techniques. The asymmetric transducer architecture with dissimilar electromechanical coupling coefficients force the resonator into mechanical nonlinearity on actuation with transducer having larger coupling. A proof-of-concept electrically-coupled channel filter is demonstrated with two such asymmetric resonators at ˜253 MHz with individual Qres of ˜870 and a non-reciprocal transmission ratio (NTR) ˜16 dB and BW3dB of 0.25%.

公开(公告)号：US20190188546A1

公开(公告)日：2019-06-20

申请号：US16011509

申请日：2018-06-18

Applicant: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

Inventor： Roozbeh Tabrizian ,  Swarup Bhunia

IPC: G06K19/04 ,  G06K1/12 ,  H01L41/09 ,  H01L41/314 ,  H01L41/187

Abstract: Data is encoded for identification and labeling using a multitude of nano-electro-mechanical structures formed on a substrate. The number of such structures, their shapes, choice of materials, the spacing therebetween and the overall distribution of the structures result in a vibrational pattern or an acoustic signature that uniquely corresponds to the encoded data. A first group of the structures is formed in conformity with the design rules of a fabrication process used to manufacture the device that includes the structures. A second group of the structures is formed so as not to conform to the design rules and thereby to undergo variability as a result of the statistical variations that is inherent in the fabrication process.

公开(公告)号：US11611330B2

公开(公告)日：2023-03-21

申请号：US16737748

申请日：2020-01-08

Applicant: University of Florida Research Foundation, Inc.

Inventor： Roozbeh Tabrizian ,  Mayur Ghatge

IPC: H01L41/083 ,  H01L41/18 ,  H03H9/17 ,  H03H9/54 ,  H03H9/56

Abstract: A tunable non-reciprocal frequency limiter with an asymmetric micro-electro-mechanical resonator has two independent transducer ports. One port has a film stack including a 10 nm hafnium zirconium oxide (HZO) and another port has a film stack including a 120 nm aluminum nitride (AlN) film. These film stacks are deposited on top of 70 nm single crystal silicon substrate applying CMOS compatible fabrication techniques. The asymmetric transducer architecture with dissimilar electromechanical coupling coefficients force the resonator into mechanical nonlinearity on actuation with transducer having larger coupling. A proof-of-concept electrically-coupled channel filter is demonstrated with two such asymmetric resonators at ˜253 MHz with individual Qres of ˜870 and a non-reciprocal transmission ratio (NTR) ˜16 dB and BW3 dB of 0.25%.

公开(公告)号：US10586135B2

公开(公告)日：2020-03-10

申请号：US16011509

申请日：2018-06-18

Applicant: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

Inventor： Roozbeh Tabrizian ,  Swarup Bhunia

IPC: G06K19/06 ,  G06K19/04 ,  G06K1/12 ,  H01L41/314 ,  H01L41/187 ,  H01L41/09 ,  G06K19/067

Abstract: Data is encoded for identification and labeling using a multitude of nano-electro-mechanical structures formed on a substrate. The number of such structures, their shapes, choice of materials, the spacing therebetween and the overall distribution of the structures result in a vibrational pattern or an acoustic signature that uniquely corresponds to the encoded data. A first group of the structures is formed in conformity with the design rules of a fabrication process used to manufacture the device that includes the structures. A second group of the structures is formed so as not to conform to the design rules and thereby to undergo variability as a result of the statistical variations that is inherent in the fabrication process.