公开(公告)号：US10903314B2

公开(公告)日：2021-01-26

申请号：US16017840

申请日：2018-06-25

Applicant: United Microelectronics Corp.

Inventor： Wen-Shen Li ,  Ching-Yang Wen ,  Purakh Raj Verma ,  Xingxing Chen ,  Chee-Hau Ng

IPC: H01L29/06 ,  H01L23/528 ,  H01L23/522 ,  H01L21/311 ,  H01L21/768 ,  H01L21/306 ,  H01L21/285

Abstract: A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device includes an insulating layer, a semiconductor layer, a plurality of isolation structures, a transistor, a first contact, a plurality of silicide layers, and a protective layer. The semiconductor layer is disposed on a front side of the insulating layer. The plurality of isolation structures are disposed in the semiconductor layer. The transistor is disposed on the semiconductor layer. The first contact is disposed beside the transistor and passes through one of the plurality of isolation structures and the insulating layer therebelow. The plurality of silicide layers are respectively disposed on a bottom surface of the first contact and disposed on a source, a drain, and a gate of the transistor. The protective layer is disposed between the first contact and the insulating layer.

公开(公告)号：US11362048B2

公开(公告)日：2022-06-14

申请号：US16145128

申请日：2018-09-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Purakh Raj Verma ,  Wen-Shen Li ,  Ching-Yang Wen

IPC: H01L23/48 ,  H01L23/52 ,  H01L23/66 ,  H01L21/762 ,  H01L21/56 ,  H01L23/00 ,  H01L23/522 ,  H01L21/768 ,  H01L23/528

Abstract: A radiofrequency device includes a buried insulation layer, a transistor, a contact structure, a connection bump, an interlayer dielectric layer, and a mold compound layer. The buried insulation layer has a first side and a second side opposite to the first side in a thickness direction of the buried insulation layer. The transistor is disposed on the first side of the buried insulation layer. The contact structure penetrates the buried insulation layer and is electrically connected with the transistor. The connection bump is disposed on the second side of the buried insulation layer and electrically connected with the contact structure. The interlayer dielectric layer is disposed on the first side of the buried insulation layer and covers the transistor. The mold compound layer is disposed on the interlayer dielectric layer. The mold compound layer may be used to improve operation performance and reduce manufacturing cost of the radiofrequency device.

公开(公告)号：US20190355812A1

公开(公告)日：2019-11-21

申请号：US16017840

申请日：2018-06-25

Applicant: United Microelectronics Corp.

Inventor： Wen-Shen Li ,  Ching-Yang Wen ,  Purakh Raj Verma ,  Xingxing Chen ,  Chee-Hau Ng

IPC: H01L29/06 ,  H01L23/528 ,  H01L23/522 ,  H01L21/311 ,  H01L21/768 ,  H01L21/306

Abstract: A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device includes an insulating layer, a semiconductor layer, a plurality of isolation structures, a transistor, a first contact, a plurality of silicide layers, and a protective layer. The semiconductor layer is disposed on a front side of the insulating layer. The plurality of isolation structures are disposed in the semiconductor layer. The transistor is disposed on the semiconductor layer. The first contact is disposed beside the transistor and passes through one of the plurality of isolation structures and the insulating layer therebelow. The plurality of silicide layers are respectively disposed on a bottom surface of the first contact and disposed on a source, a drain, and a gate of the transistor. The protective layer is disposed between the first contact and the insulating layer.

公开(公告)号：US20200075514A1

公开(公告)日：2020-03-05

申请号：US16145128

申请日：2018-09-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Purakh Raj Verma ,  Wen-Shen Li ,  Ching-Yang Wen

IPC: H01L23/66 ,  H01L21/762 ,  H01L21/56 ,  H01L23/00 ,  H01L23/528 ,  H01L23/522 ,  H01L23/48 ,  H01L21/768

Abstract: A radiofrequency device includes a buried insulation layer, a transistor, a contact structure, a connection bump, an interlayer dielectric layer, and a mold compound layer. The buried insulation layer has a first side and a second side opposite to the first side in a thickness direction of the buried insulation layer. The transistor is disposed on the first side of the buried insulation layer. The contact structure penetrates the buried insulation layer and is electrically connected with the transistor. The connection bump is disposed on the second side of the buried insulation layer and electrically connected with the contact structure. The interlayer dielectric layer is disposed on the first side of the buried insulation layer and covers the transistor. The mold compound layer is disposed on the interlayer dielectric layer. The mold compound layer may be used to improve operation performance and reduce manufacturing cost of the radiofrequency device.

公开(公告)号：US20190051666A1

公开(公告)日：2019-02-14

申请号：US15691757

申请日：2017-08-31

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wen-Shen Li ,  XIAOYUAN ZHI ,  XINGXING CHEN ,  Ching-Yang Wen

IPC: H01L27/12 ,  H01L23/48 ,  H01L21/84 ,  H01L21/768 ,  H01L21/683

Abstract: A semiconductor device includes a substrate having a frontside and a backside. The substrate includes a semiconductor layer and a buried insulator layer. A transistor is disposed on the semiconductor layer. An interlayer dielectric (ILD) layer is disposed on the frontside and covering the transistor. A contact structure penetrates through the ILD layer, the semiconductor layer and the buried insulator layer. A silicide layer caps an end surface of the contact structure on the backside. A passive element is disposed on the backside of the substrate. The contact structure is electrically connected to the passive element.

公开(公告)号：US11715709B2

公开(公告)日：2023-08-01

申请号：US17715067

申请日：2022-04-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Purakh Raj Verma ,  Wen-Shen Li ,  Ching-Yang Wen

IPC: H01L23/66 ,  H01L23/48 ,  H01L23/52 ,  H01L21/762 ,  H01L21/56 ,  H01L23/00 ,  H01L23/522 ,  H01L21/768 ,  H01L23/528

CPC classification number: H01L23/66 ,  H01L21/565 ,  H01L21/76243 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/528 ,  H01L23/5226 ,  H01L24/11 ,  H01L24/13 ,  H01L2223/6616

Abstract: A radiofrequency device includes a buried insulation layer, a transistor, a contact structure, a connection bump, an interlayer dielectric layer, and a mold compound layer. The buried insulation layer has a first side and a second side opposite to the first side in a thickness direction of the buried insulation layer. The transistor is disposed on the first side of the buried insulation layer. The contact structure penetrates the buried insulation layer and is electrically connected with the transistor. The connection bump is disposed on the second side of the buried insulation layer and electrically connected with the contact structure. The interlayer dielectric layer is disposed on the first side of the buried insulation layer and covers the transistor. The mold compound layer is disposed on the interlayer dielectric layer. The mold compound layer may be used to improve operation performance and reduce manufacturing cost of the radiofrequency device.

公开(公告)号：US20220230975A1

公开(公告)日：2022-07-21

申请号：US17715067

申请日：2022-04-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Purakh Raj Verma ,  Wen-Shen Li ,  Ching-Yang Wen

IPC: H01L23/66 ,  H01L21/762 ,  H01L21/56 ,  H01L23/00 ,  H01L23/522 ,  H01L23/48 ,  H01L21/768 ,  H01L23/528

Abstract: A radiofrequency device includes a buried insulation layer, a transistor, a contact structure, a connection bump, an interlayer dielectric layer, and a mold compound layer. The buried insulation layer has a first side and a second side opposite to the first side in a thickness direction of the buried insulation layer. The transistor is disposed on the first side of the buried insulation layer. The contact structure penetrates the buried insulation layer and is electrically connected with the transistor. The connection bump is disposed on the second side of the buried insulation layer and electrically connected with the contact structure. The interlayer dielectric layer is disposed on the first side of the buried insulation layer and covers the transistor. The mold compound layer is disposed on the interlayer dielectric layer. The mold compound layer may be used to improve operation performance and reduce manufacturing cost of the radiofrequency device.

公开(公告)号：US20210104602A1

公开(公告)日：2021-04-08

申请号：US17124124

申请日：2020-12-16

Applicant: United Microelectronics Corp.

Inventor： Wen-Shen Li ,  Ching-Yang Wen ,  Purakh Raj Verma ,  Xingxing Chen ,  Chee-Hau Ng

IPC: H01L29/06 ,  H01L23/528 ,  H01L23/522 ,  H01L21/768 ,  H01L21/306 ,  H01L21/311

Abstract: A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device includes an insulating layer, a semiconductor layer, a plurality of isolation structures, a transistor, a first contact, a plurality of silicide layers, and a protective layer. The semiconductor layer is disposed on a front side of the insulating layer. The plurality of isolation structures are disposed in the semiconductor layer. The transistor is disposed on the semiconductor layer. The first contact is disposed beside the transistor and passes through one of the plurality of isolation structures and the insulating layer therebelow. The plurality of silicide layers are respectively disposed on a bottom surface of the first contact and disposed on a source, a drain, and a gate of the transistor. The protective layer is disposed between the first contact and the insulating layer.