公开(公告)号：US20240237505A1

公开(公告)日：2024-07-11

申请号：US18544876

申请日：2023-12-19

Applicant: Universal Display Corporation

Inventor： Seckin Gokaltun ,  Gregory McGraw ,  William E. Quinn ,  Craig Anthony Outten ,  Jeff HAWTHORNE

IPC: H10K71/00 ,  B23K26/064 ,  B23K26/16 ,  B23K26/36 ,  H10K71/16

CPC classification number: H10K71/811 ,  B23K26/064 ,  B23K26/16 ,  B23K26/36 ,  H10K71/162

Abstract: Embodiments of the disclosed subject matter provide a laser source configured to output a laser beam, a beam transfer cavity to receive the outputted laser beam on a first side of the apparatus and output the laser beam on a second side of the apparatus, wherein the first side is opposite the second side, and a plume removal device having an exhaust aperture on the second side of the apparatus facing a heat affected zone (HAZ). A bottom surface of the plume removal device may be facing the substrate, where organic matter is disposed on the substrate, and the HAZ may be aligned with the surface of the substrate having the organic matter to be ablated by the laser beam.