公开(公告)号：US20240237505A1

公开(公告)日：2024-07-11

申请号：US18544876

申请日：2023-12-19

Applicant: Universal Display Corporation

Inventor： Seckin Gokaltun ,  Gregory McGraw ,  William E. Quinn ,  Craig Anthony Outten ,  Jeff HAWTHORNE

IPC: H10K71/00 ,  B23K26/064 ,  B23K26/16 ,  B23K26/36 ,  H10K71/16

CPC classification number: H10K71/811 ,  B23K26/064 ,  B23K26/16 ,  B23K26/36 ,  H10K71/162

Abstract: Embodiments of the disclosed subject matter provide a laser source configured to output a laser beam, a beam transfer cavity to receive the outputted laser beam on a first side of the apparatus and output the laser beam on a second side of the apparatus, wherein the first side is opposite the second side, and a plume removal device having an exhaust aperture on the second side of the apparatus facing a heat affected zone (HAZ). A bottom surface of the plume removal device may be facing the substrate, where organic matter is disposed on the substrate, and the HAZ may be aligned with the surface of the substrate having the organic matter to be ablated by the laser beam.

公开(公告)号：US20220190245A1

公开(公告)日：2022-06-16

申请号：US17549066

申请日：2021-12-13

Applicant: Universal Display Corporation

Inventor： Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Daniel TOET ,  Jeff HAWTHORNE ,  William E. QUINN

IPC: H01L51/00

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US20240155931A1

公开(公告)日：2024-05-09

申请号：US18402792

申请日：2024-01-03

Applicant: Universal Display Corporation

Inventor： Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Daniel TOET ,  Jeff HAWTHORNE ,  William E. QUINN

IPC: H10K71/13 ,  C23C14/04 ,  C23C14/22 ,  C23C14/50 ,  H10K71/10 ,  H10K71/16

CPC classification number: H10K71/135 ,  C23C14/04 ,  C23C14/228 ,  C23C14/50 ,  H10K71/164 ,  H10K71/191

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US20230357918A1

公开(公告)日：2023-11-09

申请号：US18311519

申请日：2023-05-03

Applicant: Universal Display Corporation

Inventor： Jeff HAWTHORNE ,  William E. QUINN ,  Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Gregory McGRAW ,  Daniel TOET

IPC: C23C14/22 ,  C23C14/12 ,  C23C14/50 ,  C23C14/54

CPC classification number: C23C14/228 ,  C23C14/12 ,  C23C14/50 ,  C23C14/54

Abstract: Methods, systems, and devices are provided for organic vapor jet deposition (OVJP), which require significantly fewer print heads than conventional OVJP deposition systems. The disclosed OVJP systems include half the number of OVJP print heads than a conventional system, or less, and provide for relative movement of the substrate and print heads to allow for rapid and comprehensive material deposition over the full surface of the substrate.