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公开(公告)号：US20150136236A1
公开(公告)日：2015-05-21
申请号：US14547655
申请日：2014-11-19
申请人： VAT Holding AG
发明人： Christoph Bachmann , Florian Ehrne
摘要： Method of operating a valve (1) which connects openings (2, 3) of at least two chambers (4, 5) to one another and, for closing the openings (2, 3) of each of the chambers (4, 5), has at least one dedicated closure member (6, 7), wherein for opening one of the openings (2, 3), the chamber (4, 5) assigned to said opening (2, 3) has generated in it a positive pressure which is higher than a current pressure in the valve-housing interior (8), wherein, by virtue of this positive pressure, the closure member (6, 7) assigned to said opening is raised up from the valve seat (10, 11) assigned to said opening (2, 3) and then, through this opening (2, 3), pressure equalization is carried out between the valve-housing interior (8) and the chamber (4, 5) assigned to said opening (2, 3). (FIG. 1)
摘要翻译： 操作将至少两个室（4,5）的开口（2,3）彼此连接并且用于封闭每个室（4,5）的开口（2,3）的阀（1）的方法， 具有至少一个专门的封闭件（6,7），其中为了打开其中一个开口（2,3），分配给所述开口（2,3）的腔室（4,5）在其中产生正压 其高于阀壳体内部（8）中的当前压力，其中，通过该正压力，分配给所述开口的关闭构件（6,7）从阀座（10,11）升高， 分配给所述开口（2,3），然后通过该开口（2,3），在阀壳体内部（8）和分配给所述开口（2）的腔室（4,5）之间进行压力平衡， 3）。 （图。1）
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公开(公告)号：US11333227B2
公开(公告)日：2022-05-17
申请号：US16612944
申请日：2018-05-09
申请人： VAT HOLDING AG
发明人： Florian Ehrne
IPC分类号： F16K3/06 , F16K3/10 , F16K31/53 , F16K31/54 , F16H19/04 , F16H57/023 , H01L21/687
摘要： An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).
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公开(公告)号：US20180163877A1
公开(公告)日：2018-06-14
申请号：US15890822
申请日：2018-02-07
申请人： VAT Holding AG
IPC分类号： F16K3/18 , F16K51/02 , F16K31/122
CPC分类号： F16K3/182 , F16K3/184 , F16K31/1225 , F16K51/02
摘要： A valve with an opening surrounded by a seat, and a closure member, which, in a closed position, presses onto the seat and closes the opening and, in an intermediate position, is raised from the seat and overlaps with the opening and, in a maximum opening position, at least partially releases the opening. The valve has a frst valve drive for moving the closure member between the maximum opening position and the intermediate position along a first movement track, and a second valve drive for moving the closure member between the intermediate position and the closed position along a second movement track which is at an angle to the first movement track. The valve has at least one transmission part which is provided for reversible deformation by the second valve drive, and the first valve drive acts on the closure member with the interposition of the transmission part.
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公开(公告)号：US09976655B2
公开(公告)日：2018-05-22
申请号：US14694031
申请日：2015-04-23
申请人： VAT Holding AG
IPC分类号： F16K3/18 , F16K51/02 , F16K31/122
CPC分类号： F16K3/182 , F16K3/184 , F16K31/1225 , F16K51/02
摘要： A valve with an opening surrounded by a seat, and a closure member, which, in a closed position, presses onto the seat and closes the opening and, in an intermediate position, is raised from the seat and overlaps with the opening and, in a maximum opening position, at least partially releases the opening. The valve has a first valve drive for moving the closure member between the maximum opening position and the intermediate position along a first movement track, and a second valve drive for moving the closure member between the intermediate position and the closed position along a second movement track which is at an angle to the first movement track. The valve has at least one transmission part which is provided for reversible deformation by the second valve drive, and the first valve drive acts on the closure member with the interposition of the transmission part.
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公开(公告)号：US20180045333A1
公开(公告)日：2018-02-15
申请号：US15552822
申请日：2016-02-19
申请人： VAT Holding AG
发明人： Florian Ehrne , Christof Bachmann , Daniel Seitz
摘要： A vacuum valve is provided having a valve housing (1) with a valve opening (2, 3) that has an axis (4, 5) and is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state of the valve opening (2, 3) and rests against the valve seat (6, 7) in a closed state of the valve opening (2, 3), and a carrier unit (9) that supports the valve plate (10, 11) and can be moved between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) is connected to the carrier unit (9) via at least two spaced drive elements (20) of the carrier unit (9) and can be moved between a retracted position and an extended position by the drive elements (20). In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state. In the retracted position, the valve plate (10, 11) is supported against the carrier unit (9) via at least one supporting element (33) made of plastic.
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公开(公告)号：US09086172B2
公开(公告)日：2015-07-21
申请号：US13940369
申请日：2013-07-12
申请人： VAT Holding AG
发明人： Florian Ehrne
CPC分类号： F16K51/02 , F16K3/184 , F16K3/186 , F16K3/3165
摘要： A vacuum valve includes a valve housing (1) with at least one valve opening (2, 3), at least one valve plate (10, 11) and a carrying unit (9), which carries the at least one valve plate (10, 11). The at least one valve plate (10, 11) is connected to the carrying unit (9) via at least two connecting devices, each having a connecting part (45), with a neck portion (47) and an enlarged head portion (48), which projects in relation to the neck portion (47), and having a receiving part (46, 56′), with a respective receiving slot (49) into which the neck portion (47) of the connecting part (45). In order to prevent the connecting parts (45) from moving out of the receiving slots (49), at least one of the receiving parts (46′) of the connecting devices can be rotated about an axis of rotation (80) from an introduction position, in which the associated connecting part (45) can be introduced into the receiving slot (49), by way of its neck portion (47), as far as the end position, into a blocking position.
摘要翻译： 真空阀包括具有至少一个阀开口（2,3），至少一个阀板（10,11）和承载单元（9）的阀壳体（1），其承载至少一个阀板（10） ，11）。 至少一个阀板（10,11）经由至少两个连接装置连接到承载单元（9），每个连接装置具有连接部分（45），其具有颈部（47）和扩大的头部（48） ），其相对于颈部（47）突出并且具有接收部分（46,56'），具有相应的接收槽（49），连接部分（45）的颈部部分（47）。 为了防止连接部件（45）从接收槽（49）移出，连接装置的接收部件（46'）中的至少一个可以绕引导轴旋转（80） 位置，其中可以通过其颈部（47）将关联的连接部分（45）引入到接收槽（49）中，直到最终位置进入阻挡位置。
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公开(公告)号：US11282725B2
公开(公告)日：2022-03-22
申请号：US16421746
申请日：2019-05-24
申请人： VAT Holding AG
发明人： Florian Ehrne , Martin Netzer , Andreas Hofer , Eligio Belleri , Marco Apolloni , Thomas L. Swain
IPC分类号： H01L21/67 , G06N20/00 , H01L21/673 , H01L21/677 , H04B5/00
摘要： A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.
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公开(公告)号：US10539253B2
公开(公告)日：2020-01-21
申请号：US15552822
申请日：2016-02-19
申请人： VAT Holding AG
发明人： Florian Ehrne , Christof Bachmann , Daniel Seitz
摘要： A vacuum valve has a valve opening (2, 3) that is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state and rests against the valve seat (6, 7) in a closed state, and a carrier unit (9) that supports the valve plate (10, 11) and moves between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) moves between a retracted position and an extended position. In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state. In the retracted position, the valve plate (10, 11) is supported against the carrier unit (9).
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公开(公告)号：US10302225B2
公开(公告)日：2019-05-28
申请号：US15556863
申请日：2016-02-19
申请人： VAT Holding AG
发明人： Florian Ehrne
IPC分类号： F16K51/02 , F16K3/18 , F16K31/122
摘要： A vacuum valve having a valve body with a valve opening surrounded by a valve seat, a closure member displaceable parallel to a longitudinal adjustment direction between an open position, and an intermediate position, in which the closure member covers the valve opening but is raised from valve seat, and a closed position, a valve rod supporting the closure member, a longitudinal stroke linear guide which has a longitudinal stroke slider connected to the valve rod and a longitudinal stroke guide part by which the longitudinal stroke slider is guided in a linearly displaceable manner in the longitudinal adjustment direction, and a transverse stroke linear guide which includes a transverse stroke slider connected to the longitudinal stroke guide part and a transverse stroke guide part by which the transverse stroke slider is guided in a linearly displaceable in an oblique adjustment direction positioned oblique to the longitudinal adjustment direction.
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公开(公告)号：US20180051825A1
公开(公告)日：2018-02-22
申请号：US15682673
申请日：2017-08-22
申请人： VAT Holding AG
发明人： Florian Ehrne , Daniel Seitz , Andreas Hofer
IPC分类号： F16K51/02
CPC分类号： F16K51/02 , F16K3/18 , F16K3/184 , F16K3/188 , F16K31/02 , F16K31/122 , F16K31/1225
摘要： A vacuum valve, including a valve body (1) with a first valve opening (2a) and with a second valve opening (2b), a first and a second closure element (4a, 4b) which are attached to a valve rod (9), a transmission piece (12) which is attached to the valve rod (9) and is adjustable in a longitudinal adjustment direction (16) from an open position into an intermediate position, and in a transverse adjustment direction (30) from the intermediate position into a first closing position, and counter to the transverse adjustment direction (30) from the intermediate position into a second closing position, where the transmission piece (12) is connected via a longitudinal stroke linear guide (13) and a transverse stroke linear guide (17), which comprises a transverse stroke guide part (19) which extends parallel to an oblique adjustment direction (20) lying obliquely with respect to the longitudinal adjustment direction (16), and a transverse stroke carriage (18) which is guided displaceably by the transverse stroke guide part (19), to the valve body (1), and, in order to adjust the transmission piece (12) from the intermediate position into the first or second closing position, the transverse stroke carriage (18) is displaceable linearly in relation to the transverse stroke guide part (19), or the transverse stroke guide part (19) is displaceable linearly in relation to the transverse stroke carriage (18), in or counter to the oblique adjustment direction (20) by the transverse stroke drive (31) from a central position into a first or second press-on position.
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