公开(公告)号：US11692263B2

公开(公告)日：2023-07-04

申请号：US16619840

申请日：2018-09-28

Applicant: VIAVI Solutions Inc.

Inventor： Zhao Yuan ,  Markus K. Tilsch ,  Georg J. Ockenfuss ,  Marius Grigonis ,  Andrew Clark ,  Donggong Peng ,  Yinxiang Xia ,  Eric Nybank ,  Neil Pinkerton

IPC: H01J37/34 ,  C23C14/54 ,  C23C14/35 ,  C23C14/00 ,  C23C14/52

CPC classification number: C23C14/547 ,  C23C14/0042 ,  C23C14/35 ,  C23C14/52 ,  C23C14/54 ,  H01J37/3464 ,  H01J37/3476

Abstract: A device may include one or more memories and one or more processors, communicatively coupled to the one or more memories, to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs; receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element; determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values; and cause the one or more runs to be performed based on the layer information.