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    SERRATED MEMS RESONATORS
    2.
    发明申请
    SERRATED MEMS RESONATORS 有权

    公开(公告)号：US20080150656A1

    公开(公告)日：2008-06-26

    申请号：US11613910

    申请日：2006-12-20

    申请人： Paul Merritt Hagelin ,  David Raymond Pedersen

    发明人： Paul Merritt Hagelin ,  David Raymond Pedersen

    IPC分类号： H03H9/24

    CPC分类号： H03H9/02259 ,  H03H9/02244 ,  H03H9/02433 ,  H03H9/2405 ,  H03H9/2484 ,  H03H2009/0248 ,  H03H2009/02496

    摘要： One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

    PIEZOELECTRIC DEVICE AND ELECTRONIC APPARATUS
    3.
    发明申请
    PIEZOELECTRIC DEVICE AND ELECTRONIC APPARATUS 有权
    压电器件和电子设备

    公开(公告)号：US20140368088A1

    公开(公告)日：2014-12-18

    申请号：US14293630

    申请日：2014-06-02

    申请人： Sony Corporation

    发明人： Kazuo TAKAHASHI ,  Satoshi MITANI ,  Hidetoshi KABASAWA

    IPC分类号： H03H9/21

    CPC分类号： H03H9/21 ,  G01C19/5607 ,  H03H9/02259 ,  H03H9/2484 ,  H03H9/2489

    摘要： A piezoelectric device includes a vibrator, a piezoelectric drive unit, and a first piezoelectric detector. The vibrator includes a first surface, a first groove formed along a first axis direction, and a second groove formed to be parallel to the first groove. The piezoelectric drive unit includes a first electrode pair provided in the first groove and opposed to each other in a second axis direction orthogonal to the first axis direction and parallel to the first surface, and a first piezoelectric body provided between the first electrode pair, and is capable of vibrating the vibrator. The first piezoelectric detector includes a second electrode pair provided in the second groove and opposed to each other in the second axis direction, and a second piezoelectric body provided between the second electrode pair, and is capable of detecting a vibration of the vibrator.

    摘要翻译： 压电装置包括振动器，压电驱动单元和第一压电检测器。 振动器包括第一表面，沿着第一轴线方向形成的第一凹槽和形成为平行于第一凹槽的第二凹槽。 所述压电驱动单元包括：第一电极对，设置在所述第一槽中，并且在与所述第一轴方向正交且与所述第一表面平行的第二轴方向上彼此相对;以及第一压电体，设置在所述第一电极对之间， 能振动振动器。 第一压电检测器包括设置在第二槽中并在第二轴向彼此相对的第二电极对，以及设置在第二电极对之间并且能够检测振动器的振动的第二压电体。

    MICROMECHANICAL RESONATOR
    4.
    发明申请
    MICROMECHANICAL RESONATOR 有权
    微生物共振器

    公开(公告)号：US20120091854A1

    公开(公告)日：2012-04-19

    申请号：US13284196

    申请日：2011-10-28

    申请人： Ville KAAJAKARI

    发明人： Ville KAAJAKARI

    IPC分类号： H02N1/00

    CPC分类号： H03H9/2463 ,  H02N1/008 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2478 ,  H03H9/2484 ,  H03H2009/02299

    摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.

    摘要翻译： 本发明涉及微机械谐振器的设计，更确切地说，涉及微机电系统（MEMS）谐振器的设计。 本发明提供了一种用于包括可移动质量结构和弹簧结构的微机电系统（MEMS）谐振器的改进的设计结构。 弹簧结构包括弹簧元件。 弹簧元件从一端锚定并在另一端连接到多个电极指。 多个电极指在弹簧元件的另一端可操作地连接在一起。 改进的结构对于制造变化是稳定的，并且具有良好性能的可靠的频率参考，特别是在小尺寸解决方案中。

    Serrated MEMS resonators
    5.
    发明授权
    Serrated MEMS resonators 有权
    锯齿型MEMS谐振器

    公开(公告)号：US07545239B2

    公开(公告)日：2009-06-09

    申请号：US11613910

    申请日：2006-12-20

    申请人： Paul Merritt Hagelin ,  David Raymond Pedersen

    发明人： Paul Merritt Hagelin ,  David Raymond Pedersen

    IPC分类号： H03H9/125 ,  H03H9/24 ,  H03B5/30 ,  H03H9/46

    CPC分类号： H03H9/02259 ,  H03H9/02244 ,  H03H9/02433 ,  H03H9/2405 ,  H03H9/2484 ,  H03H2009/0248 ,  H03H2009/02496

    摘要： One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

    摘要翻译： 本发明的一个实施例提出了用于驱动MEMS谐振器结构的锯齿状致动器。 致动器包括固定的驱动电极，其具有与具有锯齿状齿表面的MEMS谐振器臂相对的锯齿状齿表面，其中，当将CCP信号施加到驱动电极时，MEMS谐振臂被配置为朝向驱动电极旋转。 这种配置允许将更高幅度的信号施加到驱动电极，而不会使致动器的性能受到非线性效应的影响。 此外，即使在操作期间由MEMS谐振器臂穿过的距离相当小，锯齿形齿构造也能够保持足够高的致动力。 此外，锯齿形配置允许MEMS谐振器系统承受较大的电压波动和较大的衬底应力，而不会发生谐振频率的实质性偏移。

    Piezoelectric device and electronic apparatus
    8.
    发明授权
    Piezoelectric device and electronic apparatus 有权
    压电器件和电子设备

    公开(公告)号：US09337803B2

    公开(公告)日：2016-05-10

    申请号：US14293630

    申请日：2014-06-02

    申请人： Sony Corporation

    发明人： Kazuo Takahashi ,  Satoshi Mitani ,  Hidetoshi Kabasawa

    IPC分类号： H03H9/21 ,  G01C19/5607 ,  H03H9/24 ,  H03H9/02

    CPC分类号： H03H9/21 ,  G01C19/5607 ,  H03H9/02259 ,  H03H9/2484 ,  H03H9/2489

    摘要： A piezoelectric device includes a vibrator, a piezoelectric drive unit, and a first piezoelectric detector. The vibrator includes a first surface, a first groove formed along a first axis direction, and a second groove formed to be parallel to the first groove. The piezoelectric drive unit includes a first electrode pair provided in the first groove and opposed to each other in a second axis direction orthogonal to the first axis direction and parallel to the first surface, and a first piezoelectric body provided between the first electrode pair, and is capable of vibrating the vibrator. The first piezoelectric detector includes a second electrode pair provided in the second groove and opposed to each other in the second axis direction, and a second piezoelectric body provided between the second electrode pair, and is capable of detecting a vibration of the vibrator.

    摘要翻译： 压电装置包括振动器，压电驱动单元和第一压电检测器。 振动器包括第一表面，沿着第一轴线方向形成的第一凹槽和形成为平行于第一凹槽的第二凹槽。 所述压电驱动单元包括：第一电极对，设置在所述第一槽中，并且在与所述第一轴方向正交且与所述第一表面平行的第二轴方向上彼此相对;以及第一压电体，设置在所述第一电极对之间， 能振动振动器。 第一压电检测器包括设置在第二槽中并在第二轴向彼此相对的第二电极对，以及设置在第二电极对之间并且能够检测振动器的振动的第二压电体。

    Micromechanical resonator
    10.
    发明授权
    Micromechanical resonator 有权
    微机械谐振器

    公开(公告)号：US08334736B2

    公开(公告)日：2012-12-18

    申请号：US13284196

    申请日：2011-10-28

    申请人： Ville Kaajakari

    发明人： Ville Kaajakari

    IPC分类号： H03H9/00 ,  H03H9/05 ,  H03H9/125 ,  H03H9/24

    CPC分类号： H03H9/2463 ,  H02N1/008 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2478 ,  H03H9/2484 ,  H03H2009/02299

    摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.

    摘要翻译： 本发明涉及微机械谐振器的设计，更确切地说，涉及微机电系统（MEMS）谐振器的设计。 本发明提供了一种用于包括可移动质量结构和弹簧结构的微机电系统（MEMS）谐振器的改进的设计结构。 弹簧结构包括弹簧元件。 弹簧元件从一端锚定并在另一端连接到多个电极指。 多个电极指在弹簧元件的另一端可操作地连接在一起。 改进的结构对于制造变化是稳定的，并且具有良好性能的可靠的频率参考，特别是在小尺寸解决方案中。