公开(公告)号：US06278241B1

公开(公告)日：2001-08-21

申请号：US09068706

申请日：1998-11-23

申请人： Vladimir Enguelcht ,  Pavel Koulik ,  Evgenia Zorina ,  Stanislav Begounov ,  Rudolph Konavko ,  Anatolii Saitschenko ,  Mikhail Samsonov ,  Ioulia Tsvetkova

发明人： Vladimir Enguelcht ,  Pavel Koulik ,  Evgenia Zorina ,  Stanislav Begounov ,  Rudolph Konavko ,  Anatolii Saitschenko ,  Mikhail Samsonov ,  Ioulia Tsvetkova

IPC分类号： H05H134

CPC分类号： H05H1/44

摘要： A four-nozzle plasma generator comprising two anode electrode chambers and two cathode electrode chambers connected to DC power sources and generating four plasma jets of which the shape and the path are determined by an external magnetic field system. The plasma jets converge on a central area into which the material to be processed is injected, in order to form a single plasma stream. The nozzles are symmetrically arranged on a hood which includes a flat water-cooled diaphragm provided with a central aperture.

摘要翻译： 一个四喷嘴等离子体发生器，包括两个阳极室和两个连接到直流电源的阴极室，并产生四个等离子体射流，其形状和路径由外部磁场系统决定。 等离子体射流会聚在其中注入待处理材料的中心区域，以便形成单个等离子体流。 喷嘴对称地布置在罩上，该罩包括设置有中心孔的平坦的水冷隔膜。

公开(公告)号：US06365235B2

公开(公告)日：2002-04-02

申请号：US09068695

申请日：1998-05-13

申请人： Pavel Koulik ,  Evgenia Zorina

发明人： Pavel Koulik ,  Evgenia Zorina

IPC分类号： C23C16452

CPC分类号： H01L21/3065 ,  C23C8/10 ,  C23C8/36 ,  C23C16/452

摘要： A surface treatment method wherein one or more active particle streams are generated and aimed at a surface to be treated so that the particle stream interacts therewith. The active particle stream consists of activated particles forming chemically active sites on the surface, and modifying particles occupying said sites. The energy of the activated particles is greater than the energy at break of the inhibited surface bonds of the surface, and lower than the radiative flaw formation energy on the surface. The strength of the particle stream at the treated surface is greater than a quantity N/t where N is the surface density of the inhibited bonds to be broken and t is the duration of exposure of any point on the treated surface to the stream. A device for carrying out the method is also provided.

摘要翻译： 一种表面处理方法，其中产生一种或多种活性粒子流并瞄准待处理的表面，使得粒子流与其相互作用。 活性颗粒物流由在表面上形成化学活性位点的活化颗粒和占据所述位点的改性颗粒组成。 活化颗粒的能量大于表面抑制表面键断裂的能量，并且低于表面上的辐射缺陷形成能。 处理表面处的颗粒物流的强度大于N / t的量，其中N是被破坏的粘合物的表面密度，t是处理过的表面上的任何点暴露于流的持续时间。 还提供了一种用于执行该方法的装置。