摘要:
An RF power-supply for driving a carbon dioxide CO2 gas-discharge laser includes a plurality of power-oscillators phase-locked to a common reference oscillator. Outputs of the phase-locked power-oscillators are combined by a power combiner for delivery, via an impedance matching network, to discharge-electrodes of the laser. In one example the powers are analog power-oscillators. In another example, the power-oscillators are digital power-oscillators.
摘要:
A gas discharge laser includes a laser housing including a laser gas and an electrode-assembly for lighting a discharge in the laser gas. The electrode assembly has a first resonant frequency when the discharge is not lit and a second resonant frequency when the discharge is lit. RF power delivering circuitry of the laser includes an arrangement for determining and recording the two resonant frequencies. RF power is applied to the electrodes at the first recorded resonant frequency to facilitate lighting of the discharge, and thereafter at the second resonant frequency to light and sustain the discharge.
摘要:
An RF impedance-matching transformer for matching the output impedance of an RF amplifier to the discharge of a gas-discharge laser includes upper and lower dielectric plates arranged face-to-face and bonded together. A primary U-shaped strip winding is embedded in the bonded surface of one of the dielectric plates. A secondary strip-winding is formed on an exposed surface of the upper dielectric plates. A ground-plane electrode formed on an exposed surface of the lower dielectric plate. An electrical connector connects one end of the secondary strip-winding to the ground-plane electrode via a via-hole extending through the dielectric plates. The other end of the secondary strip-winding can be connected to the laser.