Frequency-agile RF-power excitation for driving diffusion-cooled sealed-off, RF-excited gas lasers
    2.
    发明授权
    Frequency-agile RF-power excitation for driving diffusion-cooled sealed-off, RF-excited gas lasers 失效
    用于驱动扩散冷却密封的RF激励气体激光器的频率敏捷射频功率激励

    公开(公告)号:US07885308B2

    公开(公告)日:2011-02-08

    申请号:US12416908

    申请日:2009-04-01

    IPC分类号: H01S3/22 H01S3/13

    摘要: A gas discharge laser includes a laser housing including a laser gas and an electrode-assembly for lighting a discharge in the laser gas. The electrode assembly has a first resonant frequency when the discharge is not lit and a second resonant frequency when the discharge is lit. RF power delivering circuitry of the laser includes an arrangement for determining and recording the two resonant frequencies. RF power is applied to the electrodes at the first recorded resonant frequency to facilitate lighting of the discharge, and thereafter at the second resonant frequency to light and sustain the discharge.

    摘要翻译: 气体放电激光器包括包括激光气体的激光器壳体和用于点燃激光气体中的放电的电极组件。 当放电不亮时,电极组件具有第一谐振频率,并且当放电点亮时具有第二谐振频率。 激光器的RF功率输送电路包括用于确定和记录两个谐振频率的装置。 以第一记录谐振频率向电极施加RF功率以便于放电的点亮,此后在第二谐振频率点亮并维持放电。

    Transformer for impedance-matching power output of RF amplifier to gas-laser discharge
    3.
    发明授权
    Transformer for impedance-matching power output of RF amplifier to gas-laser discharge 有权
    变压器用于将RF放大器的功率输出阻抗匹配到气体激光放电

    公开(公告)号:US07605673B2

    公开(公告)日:2009-10-20

    申请号:US11805542

    申请日:2007-05-23

    IPC分类号: H03H7/38

    摘要: An RF impedance-matching transformer for matching the output impedance of an RF amplifier to the discharge of a gas-discharge laser includes upper and lower dielectric plates arranged face-to-face and bonded together. A primary U-shaped strip winding is embedded in the bonded surface of one of the dielectric plates. A secondary strip-winding is formed on an exposed surface of the upper dielectric plates. A ground-plane electrode formed on an exposed surface of the lower dielectric plate. An electrical connector connects one end of the secondary strip-winding to the ground-plane electrode via a via-hole extending through the dielectric plates. The other end of the secondary strip-winding can be connected to the laser.

    摘要翻译: 用于将RF放大器的输出阻抗与气体放电激光器的放电匹配的RF阻抗匹配变压器包括面对面地布置并结合在一起的上电介质板和下电介质板。 一个U形条形绕组嵌入在一个电介质板的接合表面中。 第二条带绕组形成在上电介质板的暴露表面上。 形成在下介电板的暴露表面上的接地平面电极。 电连接器通过延伸穿过电介质板的通孔将次级带状绕组的一端连接到接地平面电极。 第二条带绕组的另一端可以连接到激光器。