REACTOR AND PROCESS FOR PREPARING GRANULAR POLYSILICON

    公开(公告)号:US20170120210A1

    公开(公告)日:2017-05-04

    申请号:US15126921

    申请日:2015-03-12

    Inventor: Dirk WECKESSER

    Abstract: A reactor for preparing granular polysilicon by deposition of polycrystalline silicon on silicon seed particles has a reaction vessel, an inner reactor tube for a fluidized bed comprising granular polysilicon and a reactor bottom within the reactor vessel, a heating device for heating the fluidized bed in the inner reactor tube, at least one bottom gas nozzle for introduction of fluidizing gas and at least one reaction gas nozzle for introduction of reaction gas, a feed device to introduce silicon seed particles, an offtake line for granular polysilicon, and a device for discharging reactor offgas from the reactor vessel, and has a cylindrical component which has openings on its cylindrical surface, with at least 5% and not more than 95% of the cylindrical surface being open located between the inner reactor tube and the heating device.

    PROCESS FOR OPERATING A FLUIDIZED BED REACTOR
    4.
    发明申请
    PROCESS FOR OPERATING A FLUIDIZED BED REACTOR 审中-公开
    流化床反应器的操作流程

    公开(公告)号:US20160145109A1

    公开(公告)日:2016-05-26

    申请号:US14899143

    申请日:2014-06-17

    Inventor: Dirk WECKESSER

    Abstract: Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.

    Abstract translation: 来自生产或消耗硅的流化床反应器的纯度提高的产物的产率通过用惰性气体吹扫,用氢气吹扫和用含氯硅烷气体吹扫来提高。 用氢气吹扫在升高的温度下进行。

    FLUIDIZED BED REACTOR AND METHOD FOR PRODUCING GRANULAR POLYSILICON
    6.
    发明申请
    FLUIDIZED BED REACTOR AND METHOD FOR PRODUCING GRANULAR POLYSILICON 有权
    流化床反应器和生产颗粒聚硅氧烷的方法

    公开(公告)号:US20160236940A1

    公开(公告)日:2016-08-18

    申请号:US14888594

    申请日:2014-04-15

    Abstract: Granular polysilicon is produced in a fluidized-bed reactor by fluidizing silicon particles by means of a gas flow in a fluidized bed heated to a temperature of 850-1100° C., adding a silicon-containing reaction gas by means of a nozzle and depositing of silicon on the silicon particles, wherein, in at least 56% of an axially symmetric region around a nozzle opening of the nozzle,the reaction gas concentration is greater than 75% of the maximum concentration of the reaction gas (10 to 50 mol %),the fluidized-bed temperature is greater than 95% of the fluidized-bed temperature outside the axially symmetric region (850-1100° C.) andthe solids concentration is greater than 85% of the solids concentration at the edge of the fluidized bed (55 to 90% by volume).

    Abstract translation: 通过在加热到850-1100℃的流化床中的气流使硅颗粒流化,在流化床反应器中产生颗粒状多晶硅,通过喷嘴加入含硅反应气体和沉积 的硅颗粒上的硅,其中,在喷嘴的喷嘴开口周围的轴向对称区域的至少56%中,反应气体浓度大于反应气体的最大浓度的75%(10〜50摩尔% ),流化床温度大于轴向对称区域(850-1100℃)之外的流化床温度的95%,固体浓度大于流化床边缘处固体浓度的85% 床(55〜90%)。

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