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公开(公告)号：US20190032203A1
公开(公告)日：2019-01-31
申请号：US16078282
申请日：2017-02-23
Applicant: Wacker Chemie AG
Inventor： Simon PEDRON
Abstract: In situ coating of the reactor tube of a CVD fluidized bed reactor for producing granular polysilicon allows a wider selection of reactor tube materials to be used and provides granular polysilicon product of higher purity.
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公开(公告)号：US20170158516A1
公开(公告)日：2017-06-08
申请号：US15320971
申请日：2015-06-19
Applicant: Wacker Chemie AG
Inventor： Simon PEDRON , Bernhard BAUMANN , Gerhard FORSTPOINTNER
IPC: C01B33/03 , C01B33/029 , B01J8/18
CPC classification number: C01B33/03 , B01J8/1827 , B01J8/1836 , B01J8/1872 , B01J2208/00761 , B01J2208/00902 , C01B33/027 , C01B33/029
Abstract: A fluidized-bed reactor for preparing granular polycrystalline silicon has a reactor vessel, a reactor tube and a reactor bottom within the reactor vessel, and an intermediate jacket located between the reactor tube and the reactor vessel, a heating device, at least one bottom gas nozzle for introducing of fluidizing gas and at least one secondary gas nozzle for introducing reaction gas, a silicon seed particle feed, an offtake line for granular polycrystalline silicon and reactor offgas discharge, wherein a main element of the reactor tube comprises at least 60% by weight of silicon carbide with a CVD coating having a layer thickness of at least 5 μm and is at least 99.995% by weight of SiC, or a main element of the reactor tube is a sapphire glass comprising at least 99.99% by weight of α-Al2O3.
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Patent Agency Ranking
公开(公告)号：US20190055130A1
公开(公告)日：2019-02-21
申请号：US16078262
申请日：2017-02-23
Applicant: Wacker Chemie AG
Inventor： Simon PEDRON
CPC classification number: C01B33/03 , B01J8/1827 , B01J8/1836 , B01J8/1872 , B01J19/02 , B01J2208/00168 , B01J2208/00495 , B01J2219/0213
Abstract: Prolonged operation campaigns in a fluidized bed reactor for producing granular polysilicon by deposition of silicon onto silicon seed particles from a silicon-containing precursor gas is made possible by employing a silicon-coated reaction tube which is not insulated above a region of the fluidized bed and as a result has a lower temperature such that the ratio of the thickness of the silicon on the reactor tube adjoining the fluidized bed to the coating thickness over the total reactor tube is from 7:1 to 1.5 to 1 after production campaign of from 15 to 500 days.
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公开(公告)号：US20160101982A1
公开(公告)日：2016-04-14
申请号：US14889347
申请日：2014-04-28
Applicant: WACKER CHEMIE AG
Inventor： Simon PEDRON , Gerhard FORSTPOINTNER
IPC: C01B33/03 , C23C16/442 , C23C16/24 , B01J8/24 , B01J8/00
CPC classification number: C01B33/03 , B01J8/0015 , B01J8/1827 , B01J8/1836 , B01J8/1872 , B01J8/24 , B01J2208/00752 , B01J2208/00761 , B01J2208/00902 , B01J2208/065 , C01B33/027 , C23C16/24 , C23C16/442
Abstract: The fluidized bed process for preparing polysilicon by chemical vapor deposition is improved by positioning at least one Laval nozzle upstream from a gas inlet into the reactor.
Abstract translation: 通过化学气相沉积制备多晶硅的流化床方法通过将至少一个拉瓦尔喷嘴从气体入口上游定位到反应器中得到改善。
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公开(公告)号：US20180345239A1
公开(公告)日：2018-12-06
申请号：US15777851
申请日：2016-11-07
Applicant: Wacker Chemie AG
Inventor： Simon PEDRON
IPC: B01J8/18 , C01B33/029
CPC classification number: C01B33/027 , B01J8/1836 , B01J2208/00415
Abstract: By disposing a radiation shield between a heater insulator and the heater in a fluidized bed reactor for producing granular polysilicon, significant energy savings are obtained.
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公开(公告)号：US20180297852A1
公开(公告)日：2018-10-18
申请号：US15737967
申请日：2016-11-09
Applicant: Wacker Chemie AG
Inventor： Simon PEDRON , Bernhard BAUMANN
IPC: C01B33/027 , B01J8/18 , B01J8/24
Abstract: Campaigns for the production of polycrystalline silicon granules in a fluidized bed process are lengthened by employing an inner reaction tube within the fluidized bed reactor which has a low ash content, preferably a coefficient of thermal expansion similar to that of silicon carbide, and has a silicon carbide coating layer consisting of at least 99.995 wt. % of silicon carbide with a thickness of from 5 μm to 700 μm.
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公开(公告)号：US20160107894A1
公开(公告)日：2016-04-21
申请号：US14893015
申请日：2014-05-21
Applicant: WACKER CHEMIE AG
Inventor： Simon PEDRON
IPC: C01B33/03
CPC classification number: C01B33/03 , C01B33/027 , C01B33/029
Abstract: Production of granular polysilicon is made more economical by extracting heat from the hot off-gas from the fluidized bed reactor to heat at least one of a fluidizing gas, reactant gas, silicon feed particles, or an aqueous medium.
Abstract translation: 通过从来自流化床反应器的热废气中提取热量以加热流化气体，反应气体，硅进料颗粒或水性介质中的至少一种，使颗粒状多晶硅的生产变得更经济。
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