公开(公告)号：US08878633B1

公开(公告)日：2014-11-04

申请号：US13294950

申请日：2011-11-11

申请人： Wan-Thai Hsu ,  Guohong He ,  John Ryan Clark

发明人： Wan-Thai Hsu ,  Guohong He ,  John Ryan Clark

IPC分类号： H03H9/24 ,  H03H9/05 ,  H03H9/46 ,  H03H9/50 ,  H03H9/02 ,  H03H7/00

CPC分类号： H03H9/0023 ,  H03B5/30 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/02409 ,  H03H9/02417 ,  H03H9/02448 ,  H03H9/2431 ,  H03H9/2447 ,  H03H9/2452 ,  H03H9/505 ,  H03H2007/008 ,  H03H2009/02291 ,  H03H2009/02354 ,  H03H2009/02511 ,  H03H2009/241

摘要： A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps. The plurality of electrodes include multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, or multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration.

摘要翻译： 微机械装置包括衬底，由衬底支撑并被配置为相对于衬底的谐波振荡的微机械结构，以及由衬底支撑并由微机械结构通过相应的间隙间隔开的多个电极。 多个电极包括相对于微机械结构构造的多个驱动电极，以利用差分激励信号激励泛音共振振动，或者相对于微机械结构配置的多个感测电极，以产生来自谐波谐振振动的差分输出。