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    CONTOUR-MODE PIEZOELECTRIC MICROMECHANICAL RESONATORS
    6.
    发明申请
    CONTOUR-MODE PIEZOELECTRIC MICROMECHANICAL RESONATORS 审中-公开
    轮廓模压电微型谐振器

    公开(公告)号：US20160142039A1

    公开(公告)日：2016-05-19

    申请号：US14198552

    申请日：2014-03-05

    申请人： The Regents of the University of California

    发明人： Gianluca Piazza ,  Philip J. Stephanou ,  Albert P. Pisano

    IPC分类号： H03H9/54

    CPC分类号： H03H9/542 ,  H03H3/02 ,  H03H9/132 ,  H03H9/171 ,  H03H9/172 ,  H03H9/205 ,  H03H9/54 ,  H03H2003/027 ,  H03H2009/02196 ,  H03H2009/02354 ,  H03H2009/241 ,  Y10T29/42 ,  Y10T29/49005

    摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.

    摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。

    ENHANCED MEMS VIBRATING DEVICE
    7.
    发明申请
    ENHANCED MEMS VIBRATING DEVICE 有权
    增强MEMS振动器件

    公开(公告)号：US20150318838A1

    公开(公告)日：2015-11-05

    申请号：US14703060

    申请日：2015-05-04

    申请人： RF Micro Devices, Inc.

    发明人： Kushal Bhattacharjee ,  Sergei Zhgoon

    IPC分类号： H03H9/02 ,  H03H9/17

    CPC分类号： H03H9/02228 ,  H03H9/02338 ,  H03H9/172 ,  H03H2009/155 ,  H03H2009/241

    摘要： A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof.

    摘要翻译： MEMS振动装置包括基板，在基板的表面上的至少一个锚定件以及通过至少一个锚悬挂在基板上的振动体。 振动体包括第一压电薄膜层，第一压电薄膜层上的第二压电薄膜层和嵌入在第一压电薄膜层和第二压电薄膜之间的数字间换能器 层。 在第一压电薄膜层和第二压电薄膜层之间嵌入数字式换能器可能导致MEMS振动装置的振动特性的增强，从而提高其性能。

    TUNABLE AND SWITCHABLE RESONATOR AND FILTER STRUCTURES IN SINGLE CRYSTAL PIEZOELECTRIC MEMS DEVICES USING BIMORPHS
    8.
    发明申请
    TUNABLE AND SWITCHABLE RESONATOR AND FILTER STRUCTURES IN SINGLE CRYSTAL PIEZOELECTRIC MEMS DEVICES USING BIMORPHS 有权
    单晶压电谐振器和滤波器结构在单晶压电MEMS器件中的应用

    公开(公告)号：US20140125431A1

    公开(公告)日：2014-05-08

    申请号：US14071173

    申请日：2013-11-04

    申请人： RF Micro Devices, Inc.

    发明人： Kushal Bhattacharjee

    IPC分类号： H01L41/09 ,  H01G5/18 ,  B81B7/02 ,  H03H9/46

    CPC分类号： H01G5/18 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2201/0271 ,  B81B2201/032 ,  H03H9/02275 ,  H03H9/02409 ,  H03H9/2405 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/467 ,  H03H2009/241

    摘要： A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.

    摘要翻译： MEMS器件包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。 值得注意的是，压电层是包括第一双晶片层和第二双晶片层的双晶片。 第一电极可以设置在面对基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。 第二电极可以设置在与衬底相对的压电层的第二表面上，使得第二电极与压电层的第二双压电晶片层接触。 第二电极可以包括第一导电部分和第二导电部分，其在数字上分散在第二表面上。

    Contour-mode piezoelectric micromechanical resonators
    9.
    发明授权
    Contour-mode piezoelectric micromechanical resonators 有权
    轮廓模式压电微机械谐振器

    公开(公告)号：US08704616B2

    公开(公告)日：2014-04-22

    申请号：US13662340

    申请日：2012-10-26

    申请人： The Regents of the University of California

    发明人： Gianluca Piazza ,  Philip J. Stephanou ,  Albert P. Pisano

    IPC分类号： H03H9/00 ,  H03H9/54

    CPC分类号： H03H9/542 ,  H03H3/02 ,  H03H9/132 ,  H03H9/171 ,  H03H9/172 ,  H03H9/205 ,  H03H9/54 ,  H03H2003/027 ,  H03H2009/02196 ,  H03H2009/02354 ,  H03H2009/241 ,  Y10T29/42 ,  Y10T29/49005

    摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.

    摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。

    Microelectromechanical resonators with thermally-actuated frequency tuning beams
    10.
    发明授权
    Microelectromechanical resonators with thermally-actuated frequency tuning beams 有权
    具有热驱动频率调谐波束的微机电谐振器

    公开(公告)号：US08633635B1

    公开(公告)日：2014-01-21

    申请号：US13174082

    申请日：2011-06-30

    申请人： Wanling Pan

    发明人： Wanling Pan

    IPC分类号： H03H3/04

    CPC分类号： H03H9/2405 ,  H03H2009/02165 ,  H03H2009/02496 ,  H03H2009/241

    摘要： A microelectromechanical resonator includes a resonator body anchored to a substrate by at least a pair of tethers that suspend the resonator body opposite an underlying opening in the substrate. A first thermally-actuated tuning beam is provided, which is mechanically coupled to a first portion of the resonator body that is spaced apart from the pair of tethers. The first thermally-actuated tuning beam is configured to induce a mechanical stress in the resonator body by establishing a thermal expansion difference between the first thermally-actuated tuning beam and the resonator body in response to a passing of current through the first thermally-actuated tuning beam.

    摘要翻译： 微机电谐振器包括通过至少一对将谐振器体悬挂在衬底中的下面开口相对的系绳的方式锚固到衬底的谐振器体。 提供了第一热致动调谐光束，其​​被机械耦合到与所述一对系绳间隔开的谐振器本体的第一部分。 第一热致动调谐波束被配置为通过响应于通过第一热驱动调谐器的电流而在第一热致动调谐波束和谐振器本体之间建立热膨胀差而在谐振器本体中引起机械应力 光束。