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公开(公告)号：US10420173B2
公开(公告)日：2019-09-17
申请号：US15283769
申请日：2016-10-03
Applicant: Watlow Electric Manufacturing Company
Inventor： Mohammad Nosrati , Roger Brummell , Timothy Tompkins
Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module for determining a dielectric parameter of the resistive heater when the resistive heater is in an active mode, and a diagnostic module for diagnosing performance of the resistive heater based on the dielectric parameter.
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公开(公告)号：US20160118277A1
公开(公告)日：2016-04-28
申请号：US14990118
申请日：2016-01-07
Applicant: Watlow Electric Manufacturing Company
Inventor： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
IPC: H01L21/67 , H01L21/683
Abstract: A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.
Abstract translation: 提供一种加热器系统，其包括具有至少一个功能区的基础功能层。 衬底被固定到功能构件上，并且调谐层固定到与基底功能层相对的衬底上。 调谐层包括数量大于基底功能层的区域的多个区域，并且调谐层提供比基底功能层更低的功率。 组件被固定到与衬底相对的调谐层，并且衬底限定热传导率以吸收和消散来自基底功能层的所需量的功率。 还提供了一种控制系统，其具有与电力线电连通的多个可寻址控制元件，并且在调谐层中，控制元件提供调谐层区域的选择性控制。
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公开(公告)号：US11343879B2
公开(公告)日：2022-05-24
申请号：US16196820
申请日：2018-11-20
Applicant: Watlow Electric Manufacturing Company
Inventor： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC: H05B3/28 , H05B3/06 , H01L23/48 , H01L23/52 , F27B5/14 , H05B1/02 , H01L21/67 , H01L23/522 , H01L23/485 , C23C16/458 , H01L21/687
Abstract: A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.
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公开(公告)号：US10043685B2
公开(公告)日：2018-08-07
申请号：US14990109
申请日：2016-01-07
Applicant: Watlow Electric Manufacturing Company
Inventor： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
IPC: F27B5/14 , H05B3/28 , H01L21/67 , H05B3/20 , H05B1/02 , H05B1/00 , H05B3/02 , H01L21/683 , H05B3/06
CPC classification number: H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
Abstract: An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment, that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.
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公开(公告)号：US20170069514A1
公开(公告)日：2017-03-09
申请号：US15260357
申请日：2016-09-09
Applicant: Watlow Electric Manufacturing Company
Inventor： Mohammad Nosrati , Roger Brummell , Kenneth D. Ames , Paul S. Whetstone
Abstract: A heater assembly includes a heating member, a mounting member that mounts the heating member to a wall of an external component, and an insulator disposed between the heating member and the wall. The insulator electrically insulates the heating member from the wall and blocks a ground path from the heating member to the wall of the external component.
Abstract translation: 加热器组件包括加热构件，将加热构件安装到外部构件的壁上的安装构件以及设置在加热构件和壁之间的绝缘体。 绝缘体使加热构件与壁电绝缘，并且阻挡从加热构件到外部构件的壁的接地路径。
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Patent Agency Ranking
公开(公告)号：US12127310B2
公开(公告)日：2024-10-22
申请号：US17696486
申请日：2022-03-16
Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY
Inventor： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC: H05B3/28 , C23C16/458 , F27B5/14 , H01L21/67 , H01L21/687 , H01L23/48 , H01L23/485 , H01L23/52 , H01L23/522 , H05B1/02 , H05B3/06
CPC classification number: H05B3/06 , C23C16/4586 , H01L21/67103 , H01L21/67109 , H01L21/67248 , H01L21/68735 , H01L21/68757 , H01L23/485 , H01L23/522 , H05B1/0202 , H05B1/0233 , H05B3/28 , H05B2203/005 , H05B2203/007 , H05B2203/014 , H05B2203/016 , H05B2203/035
Abstract: A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.
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公开(公告)号：US11895741B2
公开(公告)日：2024-02-06
申请号：US17832890
申请日：2022-06-06
Applicant: Watlow Electric Manufacturing Company
Inventor： Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
IPC: H05B3/06 , H05B3/28 , H05B1/02 , H01L21/67 , H01L23/522 , H01L23/485 , C23C16/458 , H01L21/687
CPC classification number: H05B3/06 , C23C16/4586 , H01L21/67103 , H01L21/67109 , H01L21/67248 , H01L21/68735 , H01L21/68757 , H01L23/485 , H01L23/522 , H05B1/0202 , H05B1/0233 , H05B3/28 , H05B2203/005 , H05B2203/007 , H05B2203/014 , H05B2203/016 , H05B2203/035
Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.
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公开(公告)号：US11692905B2
公开(公告)日：2023-07-04
申请号：US16907976
申请日：2020-06-22
Applicant: Watlow Electric Manufacturing Company
Inventor： Mohammad Nosrati , Fatemeh Nosrati , Jacob Lindley , John Lilleland , Sanhong Zhang
IPC: G01M7/02 , G01M7/00 , G05B19/042 , H01L21/67
CPC classification number: G01M7/025 , G01M7/00 , G05B19/042 , H01L21/67017 , G05B2219/49056
Abstract: A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.
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公开(公告)号：US11133201B2
公开(公告)日：2021-09-28
申请号：US15377088
申请日：2016-12-13
Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY
Inventor： Kevin R. Smith , Kevin Ptasienski , Ray Alan Derler , Cal T. Swanson , Philip S. Schmidt , Mohammad Nosrati , Jacob R. Lindley , Allen N. Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis S. Grimard
Abstract: A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.
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公开(公告)号：US20170236732A1
公开(公告)日：2017-08-17
申请号：US15377088
申请日：2016-12-13
Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY
Inventor： Kevin R. Smith , Kevin Ptasienski , Ray Alan Derler , Cal T. Swanson , Philip S. Schmidt , Mohammad Nosrati , Jacob R. Lindley , Allen N. Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis S. Grimard
IPC: H01L21/67 , H05B3/20 , H05B3/06 , H01L21/683 , H05B1/02
CPC classification number: H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
Abstract: A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.
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