公开(公告)号：US5636724A

公开(公告)日：1997-06-10

申请号：US396673

申请日：1995-03-01

申请人： Werner Scheler ,  Juergen Graefe ,  Andreas Mages ,  Andreas Birkner ,  Erich Adler

发明人： Werner Scheler ,  Juergen Graefe ,  Andreas Mages ,  Andreas Birkner ,  Erich Adler

IPC分类号： B65G49/07 ,  H01L21/677 ,  H01R13/24 ,  H01R41/00 ,  B65G47/24

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.

摘要翻译： 用于在两个终端位置之间传送传输对象的设备的目的是在确保高度灵活的传送的同时，在可靠性和洁净室条件以及冗长的传输路径中排除负面影响。 为了控制用于传送的驱动器的可移动部分的传感器和致动器的操作，这些传感器和致动器之间的电接触以及位于驱动器的静止部分中的供应单元仅在两个端部位置进行。 该器件特别用于制造半导体，例如用于对半导体加工机进行充电，但不限于此。

公开(公告)号：US5601484A

公开(公告)日：1997-02-11

申请号：US406976

申请日：1995-04-03

申请人： Erich Adler ,  Marlies Mages

发明人： Erich Adler ,  Marlies Mages

IPC分类号： B65G49/07 ,  H01L21/677 ,  F24F3/16

CPC分类号： H01L21/67772 ,  Y10S414/14

摘要： In order to transfer a magazine from a depositing position to a processing station, a linear drive for a rigid gripper arm is attached to a supporting column, an air passage opening being formed by the space between the supporting column and an elevator drive, this linear drive being vertically adjustable in the movement direction of the elevator. The range of action of the gripper arm is located above the magazine in the depositing position and is directed vertically to the movement direction of the elevator. All drive parts are separated from the clean room by a dust-tight enclosure and suction devices are arranged adjacent to openings through which the transport elements project into the clean room.

摘要翻译： PCT No.pct / ep94 / 02447 Sec。 371日期：1995年4月3日 102（e）日期1995年4月3日PCT 1994年7月25日PCT公布。 WO95 / 05003 PCT出版物 日期1995年2月16日为了将仓库从存放位置传送到处理站，用于刚性夹臂的线性驱动装置附接到支撑柱，空气通道开口由支撑柱和支撑柱之间的空间形成 电梯驱动器，该线性驱动器可在电梯的移动方向上垂直调节。 夹持臂的作用范围位于存放位置上的盒体上方并且垂直于电梯的移动方向。 所有驱动部件通过防尘外壳与洁净室隔开，吸入装置邻近开口设置，运输元件通过该开口投射到洁净室中。

公开(公告)号：US06510688B2

公开(公告)日：2003-01-28

申请号：US09158560

申请日：1998-09-22

申请人： Erich Adler ,  Andreas Berger ,  Marlies Mages

发明人： Erich Adler ,  Andreas Berger ,  Marlies Mages

IPC分类号： F15B1522

CPC分类号： H01L21/67775 ,  F16P3/12 ,  F16P3/14 ,  Y10S414/139 ,  Y10S414/14

摘要： A safety device for a moving system with a drive in which a pneumatically operated piston, by linear movement in a cylinder, moves a transported object past a stationary part in at least one direction has the aim of generating a switching signal at every point of a through-opening when an obstacle is located between the moving object and the edge of the through-opening, regardless of the movement direction of the object and the geometrical construction of the through-opening. The cylinder has, at its ends, devices for measuring the pressure of the air flowing out of the cylinder in the movement direction of the piston, wherein a drop in the otherwise substantially constant pressure below a threshold value serves as a switching signal at least for switching off the system. The device is useful for safety purposes during the transport of objects, particularly when the objects form shearing edges with neighboring objects.

摘要翻译： 一种用于具有驱动器的移动系统的安全装置，其中通过气缸中的线性运动的气动活塞使运送的物体沿至少一个方向移动经过固定部分，目的是在每个点处产生切换信号 当障碍物位于移动物体和通孔的边缘之间时，不管物体的移动方向如何，以及通孔的几何结构都是贯通的。 气缸在其端部具有用于测量在活塞的移动方向上流出气缸的空气的压力的装置，其中低于阈值的基本恒定压力的下降至少为 关闭系统。 该装置在运输物体时特别适用于在相邻物体形成剪切边缘时用于安全目的。